Extreme Ultraviolet Lithography Seminar Report 2006 1. INTRODUCTION Silicon has been the heart of the world's technology boom for nearly half a century, but microprocessor…

EUVL Table of Contents Topic Name 1. Abstract 2. Introduction 3. Extreme Ultra Violet Lithography 3.1 Why EUVL? 3.2 EUVL technology 3.3 Here’s how EUV works 3.4 Multilayer…

EXTREME ULTRAVIOLET LITHOGRAPHY CHAPTER 1 INTRODUCTION Microprocessors, also called computer chips, are made using a process called lithography. Specifically, deep-ultraviolet…

Chapter 2 CMOS FABRICATION TECHNOLOGY AND DESIGN RULES Notice: This chapter is a largely based on Chapter 2 (Fabrication of MOSFETs) of the book CMOS Digital Integrated Circuit…

The RF MEMS acronym stands for radio frequency microelectromechanical system, and refers to components of which moving sub-millimeter-sized parts provide RF functionality.…

Extreme Ultraviolet Lithography 1. INTRODUCTION Silicon has been the heart of the world's technology boom for nearly half a century, but microprocessor manufacturers…

Slide 1Toshitaka Fukushima, Ph.D Fujitsu International Technology Roadmap for Semiconductors 2001 Slide 2 ISS Korea 2002, March 22, T. Fukushima 1992NTRS Transition of ITRS…

Slide 1Advanced Photoresist Technology Jie Sun EE 518 Instructor: Dr. Jerzy Ruzyllo Apr. 4 2006 Slide 2 Presentation outline Introduction of Photoresists Roadmap of Photoresist…

Slide 1Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma). 3.Optics (reflection mirrors). 4.Mask (absorber on mirrors). 5.Resist…

1.NANOTECHNOLOGY2. Topics of the day• Introduction• Defination• History• Timeline• Tools & techniques▫ Carbon nanotubes▫ Nanorods▫ Nanobots• Approaches…