Documents Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma)......

Slide 1Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma). 3.Optics (reflection mirrors). 4.Mask (absorber on mirrors). 5.Resist…

Documents Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma)......

Slide 1 Extreme UV (EUV) lithography Overview, why EUV lithography? EUV source (hot and dense plasma). Optics (reflection mirrors). Mask (absorber on mirrors). Resist (sensitivity,…

Documents Extreme UV (EUV) lithography

Slide 1 Extreme UV (EUV) lithography Overview, why EUV lithography? EUV source (hot and dense plasma). Optics (reflection mirrors). Mask (absorber on mirrors). Resist (sensitivity,…

Documents Extreme UV (EUV) lithography

Slide 1 Extreme UV (EUV) lithography Overview, why EUV lithography? EUV source (hot and dense plasma). Optics (reflection mirrors). Mask (absorber on mirrors). Resist (sensitivity,…