Documents Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma)......

Slide 1Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma). 3.Optics (reflection mirrors). 4.Mask (absorber on mirrors). 5.Resist…