Documents Effects of Switched-Bias Annealing on Charge Trapping in HfO 2 high- Gate Dielectrics

Effects of Switched-Bias Annealing on Charge Trapping in HfO2 high- Gate Dielectrics X. J. Zhou,a D. M. Fleetwood,a L. Tsetseris,b R. D. Schrimpf,a S. T. Pantelidesb a…

Documents Effects of Switched-Bias Annealing on Charge Trapping in HfO 2 high- Gate Dielectrics

Effects of Switched-Bias Annealing on Charge Trapping in HfO2 high- Gate Dielectrics X. J. Zhou,a D. M. Fleetwood,a L. Tsetseris,b R. D. Schrimpf,a S. T. Pantelidesb a…