Documents VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tian a), Mark Denning b)...

Slide 1 VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tian a), Mark Denning b) and Mark J. Kushner a) a) University of Michigan, Ann Arbor,…

Documents VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE*

Slide 1 VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tiana), Mark Denningb) , Randall Urdhalb) and Mark J. Kushnera) a)University of Michigan,…

Documents VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE*

Slide 1 VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tiana), Mark Denningb) and Mark J. Kushnera) a)University of Michigan, Ann Arbor, MI 48109…