VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tian a), Mark Denning b) and Mark J. Kushner a) a) University of Michigan,

VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE*

Peng Tiana), Mark Denningb) and Mark J. Kushnera)

a)University of Michigan, Ann Arbor, MI 48109 USA [email protected], [email protected]

b)Agilent Technologies, 5301 Stevens Creek Blvd, Santa Clara, [email protected]

* Work supported by Agilent Technologies.

· Microplasma UV/VUV photon sources

· Split Ring Microwave Micro-plasma

· Description of model

· Photon generation

· Pressure

· Pd Scaling

· Pulsing with Ar/He gas mixtures

· Concluding Remarks

AGENDA

University of MichiganInstitute for Plasma Science & Engr.MIPSE_2013 P.T.

University of MichiganInstitute for Plasma Science & Engr.

· Rare gas microplasmas are efficient and discretely tunable UV/VUV light sources.

· Compact, inexpensive microplasma light sources have many applications ranging from analytical chemistry, mass spectrometry and surface analysis.

· Controlling metastable fluxes, light wavelengths and ion, VUV photon fluxes are important to achieving chemical selectivity.

· Microwave excited microplasmas can provide lower excitation voltage, high power efficiency and longer life time of the devices compared with DC microplasmas.

· In this project, a microwave excited microplasma light source by a split-ring resonator (SRR) antenna will be studied as discretely tunable VUV source.

MIPSE_2013 P.T.

UV/VUV PHOTON SOURCES BY MICROPLASMA

· A microstrip split-ring resonator was investigated to ignite and sustain a RF microplasma proposed by N. Miura and J. Hopwood.

· This concept was further developed as a SRR microplasma cavity as VUV light source.

SPLIT-RING-RESONATOR (SRR) MICROPLASMA CAVITY


SRR-GEOMETRY BASE CASE


· Microwave capacitively coupled plasma excited by push-pull electrodes.

· Quartz coated electrodes.

· Base Condition:

· Ar, 4 Torr, 3 sccm· 2.5 GHz CW power, 2 W.· Cavity width: 2 mm

· Main focus: production of VUV photons and metastable states at the collection plane.

MIPSE_2013 P.T.

· Argon Species:

· Ar(3s), Ar(1s2,3,4,5),

Ar(4p), Ar(4d),

Ar+, Ar2+, e

· Electron impact excitation and super-elastic collisions between all levels.

· Radiation transport for Ar(1s2) (106 nm), Ar(1s4) (105 nm) and Ar2

* (121 nm).

ATOMIC MODEL FOR Ar


Ar(4p)

Ar(1s3)

Ar+

Ar(1s2)

Ar(1s5)Ar(1s4)

Ar(3s)

= 105, 106 nm

Ar(4d)

MIPSE_2013 P.T.


· The Hybrid Plasma Equipment Model (HPEM) is a modular simulator that combines fluid and kinetic approaches.

· Radiation transport is addressed using a spectrally resolved Monte Carlo simulation.

,

,,

, rB

rE

zr

rSrTrk e

,

,rje

rTrn

rNrE

ie

izr

,

,,,

r

naturalA trappedA

SurfaceChemistry

Module

HYBRID PLASMA EQUIPMENT MODEL

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RADIATION TRANSPORT MODEL IN HPEM

· Frequency resolved radiation transport in HPEM is modeled using a Monte Carlo simulation that accounts for radiation trapping

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ELECTRON DENSITY & TEMPERATURE


· Electron Density · Electron Temperature

· Electron density reaches nearly 1014 cm-3, or an ionization fraction of 1%.

· High energy electrons scatter through nozzle due to smaller collision cross section.

· Ar, 4 Torr, 3 sccm, 2 W

MIPSE_2013 P.T.

ION DENSITIES


· Ar+ Density · Ar2+ Density

· Substantial amount of Ar2+ are created by 2 body associative ionization.

· Ions driven through nozzle by positive plasma potential.

· Ar, 4 Torr, 3 sccm, 2 W

MIPSE_2013 P.T.

FLUX TO TOP PLANES


· Total Ion and Photon flux· Ion and Photon fluxes· Resonant radiation from Ar excited states is

the main photon source, far exceeding the excimer radiation from Ar2

*.

· Ar+ and Ar2+ fluxes are comparable at the

collection plane. · Ar, 4 Torr, 3 sccm, 2 W

Fluxes

POWER/PRESSURE=0.5 W/Torr: ELECTRON DENSITY

· Bulk electron densities maintain a diffusive profile due to highly conductive plasma.

· Peak electron densities are 1013 cm-3 with power/pressure=0.5 W/Torr

MIPSE_2013 P.T.


· Electron Density (cm-3)

POWER/PRESSURE=0.5 W/Torr: Ar(1s2)+Ar(1s4)

· As Pressure increases, mean free path decreases.

· The source of photons (Ar(1s2, 1s4)) is localized above electrodes.

· Power efficiency of photon generation decreases.

MIPSE_2013 P.T.


· Ar Radiative States (cm-3)

PD (PRESSURE x SIZE) SCALING


· Varying the size of cavity, while keeping pd (pressure x size) constant.

· The input power is also varied to keep (power/Ngas Volume) constant.

· Flow rate adjusted to maintain constant gas residence time.

1

1/2

1/4

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· Relative Source Size

PD SCALING : LIGHT SOURCE SIZE


· Ar(1S2)+Ar(1S4), Max=8.7 x 1013 cm-3 [2 dec]

4 Torr

8 Torr

16 Torr

· Photon sources are confined at center of the cavity.

· Relative source size (Source/Cavity) decreases at higher pressure (i.e., smaller cavity).

PD SCALING: EFFICIENCY


· As pressure increases (cavity size decreases):

· The photon source is more focused at center of the cavity, providing larger viewing angle to top plane.

· Power efficiency of photon source increases.

· Photon Flux vs. Power

Photon Flux


· Electron temperature over-shoots at the beginning of pulse.

· Bulk averaged photon flux and ion density peaked during pulse-on time.

· 200 kHz PRF, 10% DC, 160 V.

MIPSE_2013 P.T.

· Bulk Ion Density and Photon Flux

· Te and Plasma Potential

PULSING - GAS MIXTURES: Ar


· With more He, larger over-shoot of Te enhanced photon generation during pulse-on period.

MIPSE_2013 P.T.

PULSING - GAS MIXTURES: He/ArHe/Ar=90/10He/Ar=70/30He/Ar=10/90


· Pening ionization is depleting He radiative states during afterglow.

· Ar+ is always the dominant ion in plasma. MIPSE_2013 P.T.

PULSING - GAS MIXTURES: He/ArHe/Ar=90/10He/Ar=70/30He/Ar=10/90

CONCLUDING REMARKS


· Modeling of a microwave excited SRR microplasmas as sources of VUV light.

· Pure Ar plasma at 4 Torr, 2 W produces peak electron density close to 1014 cm-3, a fractional ionization of 1%.

· Shape and position of light source in plasma can be controlled by pressure.

· The relative size of light source in plasma and power efficiency of photon flux generation is related to the size of the cavity, with p*d scale kept unchanged.

· Pulsing with He addition could increase Te and thus enhanced pulsing effect.

BACKUP SLIDES

· Microplasmas as VUV light source for resonance absorption spectroscopy


APPLICATION OF MICROWAVE LIGHT SOURCES

· Electron Energy Distributions – Electron Monte Carlo Simulation

c

vrzrz

t

trvftrvf

m

rBvrErEqtrvfv

t

trvf

,,,,

,,,,

,,

· Phase dependent electrostatic fields· Phase dependent electromagnetic fields· Electron-electron collisions using particle-mesh algorithm· Phase resolved electron currents computed for wave equation

solution.· Captures long-mean-free path and anomalous behavior.· Separate calculations for bulk and beam (secondary electrons)

HPEM-EQUATIONS SOLVED - ,, rf

iiii SvNt

NNeutralsIonsElectrons )(:,,

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ji

ji

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ii

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1:,

222

2

)()(:, Em

qNUNUPQ

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NNeutralsIons

ii

iiiiiiiii

ii

j

jBijjij

ijBijjiji

js

ii

ii TkRNNTTkRNNmm

mE

m

qN3)(32

2

HPEM-EQUATIONS SOLVED - ,rN

rzeeeee EnnDElectrons

:

iii

iiis qt-Nq-ttPotentialticElectrosta

:

VARYING PRESSURE AND POWER: CONDITION

· Based on base case condition, change pressure and power.

· Power deposited per particle is kept constant by keeping Power/Pressure = 0.5 W/Torr

Pressure (Torr) Power (W)

4 2

6 3

8 4

10 5

12 6

16 8

20 10

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PULSED PLASMAS


· Carrier frequency is modulated by a pulse, a fixed pulsing voltage and duty cycle.

· The fast rising edge can “over-shoot” the self sustaining E/N, raising the “hot tail” in EEDF f().

Time = 1/

Duty CyclePower(t)

Pmax

Pmin

0

1dttPPave

pulsedave

21

e0 0 Pulsed0

21

eCWCW kd

m

2dttf

1d

m

2tfk

//

,,

MIPSE_2013 P.T.

VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tian a), Mark Denning b) and Mark J. Kushner a) a) University of Michigan,

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