Slide 1 PLASMA DYNAMICS OF MICROWAVE EXCITED MICROPLASMAS IN A SUB-MILLIMETER CAVITY* Peng Tiana), Mark Denningb) , Mehrnoosh Vahidpour, Randall Urdhalb) and Mark J. Kushnera)…

PowerPoint Presentation * Work supported by SRC 2071.025, National Science Foundation and Lam Research. CHARACTERISTICS OF ION ENERGY DISTRIBUTION IN DUAL- FREQUENCY CAPACITIVELY…

Slide 1 VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tiana), Mark Denningb) , Randall Urdhalb) and Mark J. Kushnera) a)University of Michigan,…

PowerPoint Presentation SiO2 ETCH PROPERTIES AND ION ENERGY DISTRIBUTION IN PULSED CAPACITIVELY COUPLED PLASMAS SUSTAINED IN Ar/CF4/O2* Sang-Heon Songa) and Mark J. Kushnerb)…

Slide 1 VUV PHOTON SOURCE OF A MICROWAVE EXCITED MICROPLASMAS AT LOW PRESSURE* Peng Tiana), Mark Denningb) and Mark J. Kushnera) a)University of Michigan, Ann Arbor, MI 48109…

PowerPoint Presentation COMPUTATIONAL INVESTIGATION OF DUAL-FREQUENCY POWER TRANSFER IN CAPACITIVELY COUPLED PLASMAS* Yiting Zhang and Mark J. Kushner Department of Electrical…

PowerPoint Presentation PROPERTIES OF NONTHERMAL CAPACITIVELY COUPLED PLASMAS GENERATED IN NARROW QUARTZ TUBES FOR SYNTHESIS OF SILICON NANOPARTICLES* Sang-Heon Songa), Romain…