p F E A T U R E S Chemical M device proces s metal polish face. In add change the p nections betw a of the integr High-Resolution Profiler (HRP) is tungsten plug. Next, the…

Autumn 1999 Yield Management Solutions 5 S E C T I O N S This past July, KLA-Tencor announced key promotions within its executive management ranks: the appointment of Ken…

Spring 1999 Yield Management Solutions 33 found that s-polarization and high sensitivity provided the best results, especially in open areas of low pattern density (figure…

yms yieldmanagementsolutions www.kla-tencor.com/ymsmagazine Summer 2007 | Issue 2 The 45nm Innovation Challenge This issue of YMS magazine features a range of articles related…

Autumn 1999 Yield Management Solutions 15 The semiconductor industry is shrinking the area den- sity of devices by 40 percent per year. The challenge for companies developing…

Yield ManagementYield Management Yield Acceleration Strategies for the Semiconductor Industry S O L U T I O N S Yield Acceleration Strategies for the Semiconductor Industry…