Spring 2007 Yield Management Solutions28 New Inspection Technology for 45nm Wafers Becky Pinto, Jason Saito, William Shen, Lisa Cheung, Albert Wang â KLA-Tencor Corporation…
yms yieldmanagementsolutions www.kla-tencor.com/ymsmagazine Summer 2007 | Issue 2 The 45nm Innovation Challenge This issue of YMS magazine features a range of articles related…