Documents ALD Thin Film Materials LDRD review 2009NuFact09.

Atomic Layer deposition ALD Thin Film Materials LDRD review 2009 NuFact09 1 ALD of III-V semiconductors and other structure/materials What have been done: -GaN -AlN -AlGaN…

Documents ALD Thin Film Materials

Atomic Layer deposition ALD Thin Film Materials LDRD review 2009 NuFact09 1 ALD of III-V semiconductors and other structure/materials What have been done: -GaN -AlN -AlGaN…