Atomic Layer deposition ALD Thin Film Materials LDRD review 2009 NuFact09 1 ALD of III-V semiconductors and other structure/materials What have been done: -GaN -AlN -AlGaN…
Status of Accelerator Development Prospect of High Gradient Cavity H. Hayano, 10222013 Tohoku Forum for Creativity 2013 Remarks of Rongli Geng at IWLC2010 >60MV/m by Thin-Film…
SRF Materials: Fundamental studies of interfacial oxidation chemistry of niobium Recent Progress with Atomic Layer Deposition T.Proslier1,2, J.Norem1 J.Elam3, M.Pellin4,…
Atomic Layer deposition ALD Thin Film Materials LDRD review 2009 NuFact09 1 ALD of III-V semiconductors and other structure/materials What have been done: -GaN -AlN -AlGaN…