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Slide 1 Diffusion in multicomponent solids Anton Van der Ven Department of Materials Science and Engineering University of Michigan Ann Arbor, MI Slide 2 Coarse graining…

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Documents Diffusion #1 ECE/ChE 4752: Microelectronics Processing Laboratory Gary S. May January 29, 2004.

Slide 1 Diffusion #1 ECE/ChE 4752: Microelectronics Processing Laboratory Gary S. May January 29, 2004 Slide 2 Outline  Introduction Apparatus & Chemistry Apparatus…