Slide 1 Chapter 2 Modern CMOS technology 1.Introduction. 2.CMOS process flow (continued). 1 NE 343: Microfabrication and thin film technology Instructor: Bo Cui, ECE, University…
Slide 1 Surface micromachining http://www.darpa.mil/mto/mems Sacrificial material: Silicon oxide Structural material: polycrystalline Si (poly-Si) Isolating material (electrical/thermal):…