Documents Ch12(1)

Chapter 12p Physical Vapor Deposition (PVD) PVD methods: Evaporation – condensation of metal vapor in high vacuum to deposit a thin film on a wafer; unable tohigh vacuum…

Documents Preparation of films and their growth (a) Vacuum evaporation (b) Magnetron sputtering (c) Laser...

Preparation of films and their growth (a) Vacuum evaporation (b) Magnetron sputtering (c) Laser abrasion (d) Molecular beam epitaxy (e) Self-assembled monolayer E.Bauer,…