Slide 1 Sample Devices for NAIL Thermal Imaging and Nanowire Projects Design and Fabrication Mead Mišić Selim Ünlü Slide 2 Boston University Outline The NAIL and Nanowire…
Chapter 8 Ion Implantation ION IMPLANTATION SYSTEM Ion implanter is a high-voltage accelerator of high-energy impurity ions Major components are: Ion source (gases such as…
Chapter 8 Ion Implantation ION IMPLANTATION SYSTEM Ion implanter is a high-voltage accelerator of high-energy impurity ions Major components are: Ion source (gases such as…