Documents Chapter 8 Ion Implantation

Chapter 8 Ion Implantation ION IMPLANTATION SYSTEM Ion implanter is a high-voltage accelerator of high-energy impurity ions Major components are: Ion source (gases such as…

Documents Chapter 8 Ion Implantation

Chapter 8 Ion Implantation ION IMPLANTATION SYSTEM Ion implanter is a high-voltage accelerator of high-energy impurity ions Major components are: Ion source (gases such as…