Tag: nanoimprint lithography

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generation lithography

Documents Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma)......

Slide 1 Extreme UV (EUV) lithography Overview, why EUV lithography? EUV source (hot and dense plasma). Optics (reflection mirrors). Mask (absorber on mirrors). Resist (sensitivity,…

Documents DIRECT ELECTRON-BEAM WRITING WITH HIGH ASPECT RATIO FOR FABRICATING ION-BEAM LITHOGRAPHY MASK

DIRECT ELECTRON-BEAM WRITING WITH HIGH ASPECT RATIO FOR FABRICATING ION-BEAM LITHOGRAPHY MASK 2002. 04. 20. Byeonug-Nam Lee, Yong-Hoon Cho Department of Physics, Chungbuk…

Documents Extreme UV (EUV) lithography

Slide 1 Extreme UV (EUV) lithography Overview, why EUV lithography? EUV source (hot and dense plasma). Optics (reflection mirrors). Mask (absorber on mirrors). Resist (sensitivity,…

Documents Extreme UV (EUV) lithography

Slide 1 Extreme UV (EUV) lithography Overview, why EUV lithography? EUV source (hot and dense plasma). Optics (reflection mirrors). Mask (absorber on mirrors). Resist (sensitivity,…

Documents Nanoimprint lithography (NIL)

Slide 1 Nanoimprint lithography (NIL) Overview. Thermal NIL resists. Residual layer after NIL. NIL for large features (more difficult than small one). Room temperature NIL,…

Documents InTech Nano Imprint Lithography

23 Nanoimprint Lithography 2State 1School of Mechanical Engineering, Shandong University, Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University…

Documents Nanoimprint lithography (NIL)

Slide 1 Nanoimprint lithography (NIL) Overview. Thermal NIL resists. Residual layer after NIL. NIL for large features (more difficult than small one). Room temperature NIL,…