Documents Nanoimprint lithography (NIL)

Slide 1 Nanoimprint lithography (NIL) Overview. Thermal NIL resists. Residual layer after NIL. NIL for large features (more difficult than small one). Room temperature NIL,…

Documents Nanoimprint lithography (NIL)

Slide 1 Nanoimprint lithography (NIL) Overview. Thermal NIL resists. Residual layer after NIL. NIL for large features (more difficult than small one). Room temperature NIL,…

Documents Nanoimprint lithography (NIL)

Slide 1 Nanoimprint lithography (NIL) Overview. Thermal NIL resists. Residual layer after NIL. NIL for large features (more difficult than small one). Room temperature NIL,…

Documents Nanoimprint lithography (NIL)

Slide 1 Nanoimprint lithography (NIL) Overview. Thermal NIL resists. Residual layer after NIL. NIL for large features (more difficult than small one). Room temperature NIL,…