9-1 Chapter 9 Metrology Methods for Ion Implantation Process Controls Michael Current Current Scientific, San Jose, CA USA [email protected] New metrology tools have been…
Slide 1 ECE 7366 Advanced Process Integration Set 8: Junctions and Contacts Dr. Wanda Wosik Text Book: B. El-Karek, “Silicon Devices and Process Integration” 1 Leakage…
Recent measurements on atomic-scale dopant wires in Si Transport in atomic-scale doped silicon nanowires Bent Weber1, S. Mahapatra1,2, W, Clarke1, M. Y. Simmons1,2 1) School…