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Slide 1 Nanoimprint lithography (NIL) Overview. Thermal NIL resists. Residual layer after NIL. NIL for large features (more difficult than small one). Room temperature NIL,…

Slide 1 Nanoimprint lithography (NIL) 1.UV-curable NIL. 2.Resists for UV-NIL. 3.Mold fabrication for thermal and UV-NIL. ECE 730: Fabrication in the nanoscale: principles,…

Slide 1 Nanoimprint lithography (NIL) Overview. Thermal NIL resists. Residual layer after NIL. NIL for large features (more difficult than small one). Room temperature NIL,…