MICROCONTAMINATION CONTROL
retention ratings down to 5 nm, removes difficult contaminants
from specific resists more efficiently than a single membrane.
Utilizing two times the nylon membrane thickness, the nylon
design improves gel retention performance at a 10 nm retention
rating for market-leading contamination control. Each membrane
technology is characterized for optimal performance in the most
common photochemicals and blends in use.
Innovative Design Solutions
Entegris offers innovative design solutions. Impact 8G’s unique
core-fill design increases flow rate and reduces filter priming
time, resulting in a more stable and repeatable production
environment with lower defectivity performance. Impact filters
use Connectology® to quickly and securely connect to the
Impact manifold and IntelliGen® dispense systems. Impact 8G
flushing shell offers a cleaner, more efficient transitional flow-
through solution for photochemical filtration and dispense.
Impact® Point-of-Use Photochemical FiltersRapid changeout filters featuring superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents
Representing a lineage of in-fab production expertise and
customer collaboration, Impact® point-of-use (POU) photo-
chemical filters deliver superior filtration solutions to critical
photolithography processes.
Ultra Cleanliness with the Latest Impact Filter
Designed to meet sub-2× nm technology node requirements,
Impact 8G UCP’s cleaning process optimizes organic levels with
lower particle shedding, metal extractables, and non-volatile
residue (NVR). Conversely, process start-up time is shortened,
and device yields are greatly improved. Impact filters enable fast
filter changeouts, while high surface area and low hold-up
volume reduce chemical usage and exposure to hazardous
chemicals during filter installation and disposal.
Array of Membrane Technologies Maximizing Retention Performance and Chemical Compatibility
Impact filters utilize various membrane technologies to maximize
retention performance. The asymmetric UPE membrane enables
tighter retention performance (down to 3 nm with Impact 8G
series filters) and lower pressure drop than a standard symmetri-
cal UPE membrane. The Impact Duo technology, which com-
bines the UPE membrane with a polyamide or nylon layer at
2
APPLICATIONS—
Filter Series FILTER TYPE APPLICATIONS*
Impact 8G Impact 8G, 8G UCP POU photoresist, ancillary photochemicals and solvent filtration
Impact 8G UCP Impact 8G-L, 8G-L UCP POU photoresist, ancillary photochemicals and solvent filtration
Impact 2 V2 Impact Asymmetric Nylon POU photoresist, ancillary photochemicals and solvent filtration
Impact 2 UPE POU photoresist, ancillary photochemicals and solvent filtration
Impact 2-Duo POU photoresist, ancillary photochemicals and solvent filtration
Impact plus V2 Impact Plus V2 UPE POU photoresist, ancillary photochemicals and solvent filtration
Impact Plus-Duo POU photoresist, ancillary photochemicals and solvent filtration
Impact Plus Nylon POU photoresist, ancillary photochemicals and solvent filtration
Impact SR-LHVD (all Teflon®) Aggressive solvents
Impact Mini Impact Asymmetric Mini POU photoresist, ancillary photochemicals and solvent filtration
Impact HV Impact high viscosity Polyimide process; wafer level packaging; 3-D lithography
*Please contact your Regional Customer Service Center for specific recommendations.
3
FEATURES & BENEFITS—
Ultra cleanliness Impact 8G UCP filters
Designed with an advanced cleaning process for ultra cleanliness
Enhanced cleanliness with lower particle shedding, metal and organic extractables
Impact filters
Superior cleanliness maintained in critical chemical processes
High surface area and low hold-up volume help to reduce chemical usage and limit exposure to hazardous chemicals during installation and disposal
Array of membrane technologies maximizing retention performance
Asymmetric UPE membrane
Tighter retention (down to 3 nm with Impact 8G series filters) and lower pressure drop than a standard symmetrical UPE membrane
Impact Duo membrane
Combines UPE membrane with a polyamide or nylon layer at retention ratings down to 5 nm to remove difficult contaminants from specific resists
Nylon membrane
Optimized gel retention performance at a 10 nm retention rating for market-leading contamination control
Innovative design solutions Impact 8G’s core-fill design
Increases flow rate with low defectivity performance
Reduces filter priming time
Advanced Connectology
Quickly and securely connects Impact filters to Impact manifold and IntelliGen dispense systems
Impact 8G flushing shell
Offers a clean, efficient transitional flow-through solution or photochemical filtration and dispense
4
Impact 8G and 8G UCP Series Filters
SPECIFICATIONS—
Materials Membrane 8G, 8G-L:
Asymmetric UPE, Nylon 6, Duo (UPE/nylon, PCM*)
8G UCP, 8G-L UCP:
UPE (clean resin), DUO (UPE/nylon)
Surface area 8G, 8G UCP:
UPE: 1200 cm2 (1.29 ft2)
Nylon/Duo: 800 cm2 (0.86 ft2)
PCM: 1300 cm2 (1.40 ft2)
8G-L, 8G-L UCP:
UPE: 2400 cm2 (2.58 ft2)
Nylon/Duo: 1600 cm2 (1.72 ft2)
PCM: 2600 cm2 (2.80 ft2)
Supports, core shell HDPE
O-ring Kalrez® perfluoroelastomer (OF)
Retention rating 8G and 8G UCP series 3, 5, 10, 20 nm*
Nylon 6 10, 20 nm
Duo 5, 10 nm
PCM** 10 nm
Maximum operating conditions
Maximum inlet pressure:
0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)
Maximum forward/reverse differential pressure:
0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)
Maximum operating temperature:
40°C (104°F)
Hold up volume Impact 8G: 55 cc
Impact 8G-L: 110 cc
Compatibility*** PGMEA, PGME, NMP, ethyl lactate, MMP, cyclohexanone and other photochemical solvents
Wettability*** Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA and other photochemical solvents.
Fittings (use Impact 2 manifold****)
4 mm/3 mm Flowell™ 60 Type for OF filters
5 mm/3 mm Flowell 60 Type for OF filters
6 mm/4 mm Flowell 60 Type for OF filters
6.35 mm/3.95 mm Flowell 60 Type for OF filters
6.35 mm/4.35 mm Flowell 60 Type for OF/OM filters
6.35 mm/3.95 mm Super Type Pillar® for OF filters
6.35 mm/4.35 mm Super Type Pillar for OF/OM filters
* UPE 20 nm: Standard UPE only ** PCM: Surface-modified hydrophilic UPE *** Please contact your Regional Customer Service Center for specific recommendations. **** See the Impact 2 V2 Filters section for information about the Impact 2 manifold.
5
PERFORMANCE DATA—
DIMENSIONS—
200
150
100
50
0
25
20
15
10
5
0
Impact 8G UPE
Typical Flow Rate (L/min) 1 cP @ 25°C (77°F)
Di�
eren
tial
Pre
ssu
re (k
Pa)
Di�
eren
tial
Pre
ssu
re (p
sid
)3 nm
5 nm8G-L 3 nm
10 nm8G-L 5 nm
8G-L 10 nm
0 4 8 12 16 20Typical Flow Rate (L/min) 1 cP @ 25°C (77°F)
0 4 8 12 16 20
200
150
100
50
0
25
20
15
10
5
0
Impact 8G Nylon and Duo
Di�
eren
tial
Pre
ssu
re (k
Pa)
Di�
eren
tial
Pre
ssu
re (p
sid
)
8G-L 10 nm Duo
8G-L 10 nm Nylon
8G 10 nm Nylon
8G 5 nm Duo
8G 10 nm Duo
35.0 mm(1.38")
10 mm(0.39")
127.0 mm (5.0")
172 mm(6.77")
138 mm(5.43")
45.0 mm(1.77")
94 mm(3.70")
79.0 mm(3.11")
59.5 mm(2.34")
122 mm(4.80")
65 mm (2.56")
Top View − 8G, 8G-L Side View − 8G-L Side View − 8G
82.5 mm (3.25")
49 mm(1.93")
73 mm (2.87")
136 mm(5.35")
88 mm(3.46")
Impact 8G/8G-L, 8G UCP/8G-L UCP
Front View Side View
Impact 8G and Impact 8G UCP with Manifold
6
ORDERING INFORMATION—This information serves as a guide. Please contact your local representative to confirm part numbers..
Impact 8G and 8G UCP Series Filters: part number
A2 C 1
*Cleaning only applies to Impact 8G UCP series filters.
Retention ratingK = 3 nmF = 5 nmT = 10 nmX = 20 nm
MembraneS = AsymmetricC = UPED = DuoN = NylonM = PCM
Cleaning*UCP = Ultraclean
Quantity1 = 1/pack
O-ring0 = OMK = Kalrez
Pleating style0 = StandardM = M-pleat
Configuration0 = StandardL = Long
7
Impact 8G and Impact 2 Flushing Shell
SPECIFICATIONS—
IMPACT 8G FLUSHING SHELL IMPACT 2 FLUSHING SHELL
Hold-up volume 1 mL 9 mL
Resin Ultraclean Standard
Internal surface area 1.4 cm2 (0.22 in2) 33 cm2 (5.12 in2)
Internal Test Results
Durability air pulse test (0-0.6 MPa) >6.0 million cycles 1.5 ~ 2.0 million cycles
Burst pressure 4.6 ~ 5.5 MPa 3.5 ~ 4.2 MPa
Particle shedding ≤20 particles /1 mL (≥0.05 µm H2O after 5 min flush)
—
Metal (10% HCl extract) <2.0 µg/unit (23 metals) —
Organics (reference data) (GC-FID test) 0.01 ~ 0.03 mg/unit 2.7 ~ 3.4 mg/unit
Note: The flushing shell is recommended for short-term use flushing tools and fluid lines; it is NOT recommended for long-term use especially after applying pressure or exposure to solvents.
DIMENSIONS—
ORDERING INFORMATION—
Part Number Description
A2AMC00K1 Impact 8G flushing shell with Kalrez O-ring
A2AMC0001 Impact 8G flushing shell with no O-ring
28 mm(1.10")
8
Impact 2 V2 Filters
SPECIFICATIONS—
Materials Membrane UPE, nylon, Duo (UPE/nylon), PCM
Surface area Asymmetric nylon:
800 cm2 (0.86 ft2)
Asymmetric PCM:
1350 cm2 (1.45 ft2)
Duo, nylon:
800 cm2 (0.86 ft2)
850 cm2 (0.92 ft2)
Supports (upstream, downstream, mold)
HDPE
O-ring Kalrez perfluoroelastomer
Retention rating Nylon 6 10 nm, 20 nm, 0.05 µm
UPE 3 nm – 1 µm
Duo 5, 10, 30 nm
PCM (surface-modified UPE) 20 nm, 0.05 µm
Maximum operating conditions
Maximum inlet pressure:
0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)
Maximum forward/reverse differential pressure:
0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)
Maximum operating temperature:
40°C (104°F)
Hold up volume ≤55 cc
Compatibility* PGMEA, PGME, NMP, ethyl lactate, MMP, and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.
Wettability* Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA, NMP, and other photochemical solvents.
Fittings (use Impact 2 manifold)
4 mm/3 mm Flowell 60 Type for OF filters
5 mm/3 mm Flowell 60 Type for OF filters
6 mm/4 mm Flowell 60 Type for OF filters
6.35 mm/3.95 mm Flowell 60 Type for OF filters
6.35 mm/4.35 mm Flowell 60 Type for OF/OM filters
6.35 mm/3.95 mm Super Type Pillar for OF filters
6.35 mm/4.35 mm Super Type Pillar for OF/OM filters
*Please contact your Regional Customer Service Center for specific recommendations.
9
PERFORMANCE DATA—
1009080706050403020100
0 1 765432 8 9 10
0 1 765432 8 9 10
Impact 2 V2 Asymmetric UPE FiltersD
i�er
enti
al P
ress
ure
(kP
a)
Typical Flow Rate (mL/sec)
35
30
25
20
15
10
5
0
Impact 2 V2 Asymmetric Nylon Filters
Di�
eren
tial
Pre
ssu
re (k
Pa)
Typical Flow Rate (mL/sec)
160
140
120
100
80
60
40
20
0
Impact 2-Duo
Di�
eren
tial
Pre
ssu
re (k
Pa)
Typical Flow Rate (mL/sec)
0 1 765432 8 9 10
50454035302520151050
0 1 2 3 4 5 6 7 8 9 10
20 nm
10 nm
50 nm
Impact 2 V2 PCM Filters
Di�
eren
tial
Pre
ssu
re (k
Pa)
Typical Flow Rate (mL/sec)
20 nm
10 nm
50 nm
5 nm
10 nm
30 nm
5 nm3 nm
10 nm
10
DIMENSIONS—
94 mm(3.70")
79.0 mm(3.11")
35.0 mm(1.38")
10 mm(0.39")
59.5 mm(2.34")
82.5 mm (3.25")
Side View
127.0 mm (5.0")
122 mm(4.80")
172 mm (6.77")
138 mm (5.43")
45.0 mm(1.77")
Impact 2 V2 Filter with Impact 2 Manifold – 6.35 mm Flowell 60 Type
Front View
4
65 mm (2.56")
Top View Side View
49 mm(1.93")
73 mm (2.87")
88 mm(3.46")
Impact 2 V2 Filter with Impact 2 Manifold
11
ORDERING INFORMATION—This information serves as a guide. Please contact your local representative to confirm part numbers.
Impact 2 V2 Filters: part number
A2 2 1
* The M-pleat style only applies to Impact filters with a UPE membrane of up to 30 nm.
Impact 2 manifolds (for Impact 8G, Impact 8G UCP and Impact 2 V2)
Part number Description
A2MX222K1 Impact 2 manifold, Flowell 60, 6.35 mm OD and 3.95 mm ID, Kalrez O-ring (for OM filters)
A2MX22201 Impact 2 manifold, Flowell 60, 6.35 mm OD and 3.95 mm ID, no O-ring (for OF filters)
A2MX222KT Impact 2 manifold, Flowell 60, 6.35 mm OD and 4.35 mm ID, Kalrez O-ring (for OM filters)
A2MX222ET Impact 2 manifold, Flowell 60, 6.35 mm OD and 4.35 mm ID, EPDM O-ring (for OM filters)
A2MX2220T Impact 2 manifold, Flowell 60, 6.35 mm OD and 4.35 mm ID, no O-ring (for OF filters)
A2MX44401A Impact 2 manifold, Flowell 60, 4 mm OD and 3 mm ID, no O-ring (for OF filters)
A2MX55501A Impact 2 manifold, Flowell 60, 5 mm OD and 3 mm ID, no O-ring (for OF filters)
A2MX66601A Impact 2 manifold, Flowell 60, 6 mm OD and 4 mm ID, no O-ring (for OF filters)
A2MP222K1 Impact 2 manifold, Super Type Pillar, 6.35 mm OD and 3.95 mm ID, Kalrez O-ring (for OM filters)
A2MP222KT Impact 2 manifold, Super Type Pillar, 6.35 mm OD and 4.35 mm ID, Kalrez O-ring (for OM filters)
A2MP22201 Impact 2 manifold, Super Type Pillar, 6.35 mm OD and 3.95 mm ID, no O-ring (for OF filters)
A2MP2220T Impact 2 manifold, Super Type Pillar, 6.35 mm OD and 4.35 mm ID, no O-ring (for OF filters)
Retention ratingK = 3 nmF = 5 nmT = 10 nmX = 20 nm
Y = 30 nmZ = 0.05 µmV = 0.1 µm G = 0.2 µm
MembraneA = Thin UPE
(Symmetric)S = AsymmetricD = DuoM = PCMN = Nylon
O-ringO = OMK = KalrezPleating style
0 = StandardM = M-pleat*Open
0 = StandardL = Long
Quantity1 = 1/pack
12
Impact Plus V2, Plus Duo, and Impact SR LHVD Filters
SPECIFICATIONS—
IMPACT PLUS V2 IMPACT PLUS DUO IMPACT SR LHVD
Materials Membrane UPE, nylon, PCM UPE/nylon PTFE
Surface area 10 nm asymmetric 1300 cm2 (1.46 ft2)
850 cm2 (0.92 ft2) 600 cm2 (0.65 ft2)
10 nm, 20 nm 1400 cm2 (1.51 ft2)
20 nm PCM 1400 cm2 (1.51 ft2)
All others 1200 cm2 (1.29 ft2)
Supports and molded components
HDPE —
Supports, core, sleeve, shell
— PFA
O-ring Kalrez perfluoroelastomer
Retention rating Nylon 6 10 nm, 20 nm, 0.05 µm
UPE 3 nm –1 µm
Duo 10, 30 nm
PCM (surface-modified UPE)
20 nm – 0.05 µm
PTFE 20 nm –1 µm
Maximum operating conditions
Maximum inlet pressure
0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) 0.39 MPa (3.9 bar, 56.6 psi) @ 25°C (77°F)
Maximum forward/reverse differential pressure
0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F) 0.29 MPa (2.9 bar, 42 psi) @ 25°C (77°F)
Maximum operating temperature
40°C (104°F) 30°C (86°F)
Hold up volume ≤55 cc ≤45 cc
13
IMPACT PLUS V2 IMPACT PLUS DUO IMPACT SR LHVD
Compatibility* PGMEA, PGME, NMP, ethyl lactate, MMP and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.
All photochemical solvents
Wettability* Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, ECA, NMP and other photochemical solvents.
Prewetting should be considered with higher surface tension solvents such as NMP, cyclohexa-none, GBL, EGMEA ethyl lactate and MMP.
Fittings (uses Impact 2 Manifold)
1⁄4" Flaretek®
*Please contact your Regional Customer Service Center for specific recommendations.
PERFORMANCE DATA—
200
150
100
50
0
25
20
15
10
5
0
Di�
eren
tial
Pre
ssu
re (k
Pa)
Di�
eren
tial
Pre
ssu
re (p
sid
)
50
40
30
20
10
00 4 8 12 16 20
Di�
eren
tial
Pre
ssu
re (k
Pa)
Typical Flow Rate (L/min) — 1 cP @ 25°C (77°F)
Di�
eren
tial
Pre
ssu
re (p
sid
)GPM
60
40
20
10
0
8
7
6
5
4
3
2
1
0
7
6
5
4
3
2
1
00 168 24 32 40
Di�
eren
tial
Pre
ssu
re (k
Pa)
Typical Flow Rate (L/min) — 1 cP @ 25°C (77°F)
Di�
eren
tial P
ress
ure
(psi
d)
0.100 0.20 0.30 0.40 0.50 0.60
20 nm
Impact Plus Duo
Impact Plus V2 UPE
Impact SR LHVD
0.2 µm
0.05 µm
0.1 µm
200
150
100
50
0
25
20
15
10
5
0
0 4 8 12 16 20
Di�
eren
tial
Pre
ssu
re (k
Pa)
Di�
eren
tial
Pre
ssu
re (p
sid
)
Typical Flow Rate (L/min) — 1 cP @ 25°C (77°F)
Impact Plus V2 Asymmetric UPE
3 nm10 nm
30 nm
10 nm
0 4 8 12 16 20Typical Flow Rate (L/min) — 1 cP @ 25°C (77°F)
5 nm
SPECIFICATIONS (CONTINUED)—
14
DIMENSIONS—
21.0 mm(0.83")
21.0 mm(0.83")
Top View Side View
19.0 mm(0.75")
95.5 mm(3.76")
71.9 mm (2.83")
35.8 mm(1.41")
82.5 mm(3.25")
90.0 mm(3.54")
71.0 mm(2.80")
Impact Plus V2, Impact Plus Duo, Impact SR LHVD Filters
190.0 mm (7.48")
140.0 mm(5.51")
190.0 mm(7.48")
52.4 mm(2.06")
40.0 mm(1.57")
76.0 mm(2.99")
6.0 mm (0.24")
115.0 mm (4.53")
Side View with required filter changeout space for filtersSide View
Impact Plus V2, Impact Plus Duo, Impact SR LHVD Filters with Impact ST Manifold
15
Impact ST manifolds
Part Number Description
DZUM 044 C1 Impact ST manifold
DZUM 044 E1 Impact ST manifold, no O-ring
Impact Plus SR LHVD Filters: part number
AT 000
**Flushing shell and 0.05 µm only.
ORDERING INFORMATION—This information serves as a guide. Please contact your local representative to confirm part numbers.
Impact Plus V2 Filters: part number
AP 20 1
* The M-pleat style only applies to Impact filters with a UPE membrane of up to 30 nm.
Retention ratingK = 3 nmF = 5 nmT = 10 nmX = 20 nm
Z = 0.05 µmV = 0.1 µm G = 0.2 µm
MembraneA = Symmetric UPES = Asymmetric UPED = DuoM = PCMN = Nylon
O-ringO = OMK = KalrezPleating style
M = M-pleat*0 = All others
Quantity1 = 1/pack
Pore sizeF0 = Flushing shellTX = 20 nmFZ = 0.05 µmFV = 0.1 µmFG = 0.2 µm
O-ringK1 = Kalrez**01 = No O-ring
16
Impact Mini Filters
SPECIFICATIONS—
Materials Membrane UPE
Surface area 250 cm2 (0.27 ft2)
Supports (upstream, downstream, mold)
HDPE
O-ring Kalrez perfluoroelastomer (on filter)
Retention rating UPE 5 nm – 0.1 µm
Maximum operating conditions
Maximum inlet pressure:
0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)
Maximum forward/reverse differential pressure:
0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)
Maximum operating temperature:
40°C (104°F)
Hold up volume ≤15 cc
Compatibility* PGMEA, PGME, NMP, ethyl lactate, MMP, and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.
Wettability* Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA, NMP, and other photochemical solvents.
Note: The Impact Asymmetric Mini uses a pump (Entegris IntelliGen Mini or IntelliGen ASF) instead of a manifold.*Please contact your Regional Customer Service Center for specific recommendations.
PERFORMANCE DATA—Impact Mini
20 nm
0.05 µm
0.1 µm
1.50
1.25
1.00
0.75
0.50
0.25
0
20
15
10
5
00 5 10
Di�
eren
tial
Pre
ssu
re (b
ar)
Typical Flow Rate (L/min) – 1 cP @ 25°C (77°F)
Di�
eren
tial
Pre
ssu
re (p
sid
)
GPM0 0.10 0.10 0.15
17
DIMENSIONS—
ORDERING INFORMATION—This information serves as a guide. Please contact your local representative to confirm part numbers.
Impact Mini Filters: part number
AM 200K 1
Ø5.69 cm (2.24") 7.29 cm (2.87")
5.56 cm(2.19")
Front View Side View
Note: The top view dimensions of Impact Mini are the same as Impact 2 V2.
Retention ratingX = 20 nmZ = 0.05 µmV = 0.1 µmF = 5 nmT = 10 nm
MembraneA = Symmetric UPES = Asymmetric UPE
Quantity1 = 1/pak
18
Impact HV Filters
SPECIFICATIONS—
Materials Membrane UPE, PTFE
Surface area 3400 cm2 (3.66 ft2)
Supports, core, sleeve HDPE
O-ring Kalrez perfluoroelastomer
Retention rating UPE 0.1 µm, 0.2 µm, 0.5 µm, 1.0 µm
PTFE 0.2 µm, 1.0 µm
Maximum operating conditions
Maximum inlet pressure:
0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)
Maximum forward/reverse differential pressure:
0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)
Maximum operating temperature:
40°C (104°F)
Available manifold connections
Dispense system — IntelliGen HV two-stage dispense system
Standalone (Optimizer ST2 manifold)
Inlet/outlet 1⁄4", 3⁄8", and 1⁄2" Flowell 60
1⁄4", 3⁄8", 1⁄2" and 6 mm tube stubs
Vent/drain 1⁄4" Flowell 60
1⁄4" and 4 mm tube stubs
PERFORMANCE DATA—
120
100
80
60
40
20
00 2 3 4 5 6 7 8 9 101
Di�
eren
tial
Pre
ssu
re (k
Pa)
Typical Flow Rate (L/min)
Impact HV Filters
0.1 µm UPE
0.2 µm PTFE
1.0 µm PTFE
0.2 µm UPE
0.5 µm UPE1.0 µm UPE
www.entegris.com
FOR MORE INFORMATION
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Entegris®, the Entegris Rings Design®, and other product names are trademarks of Entegris, Inc. as listed on entegris.com/trademarks. All third-party product names, logos, and company names are trademarks or registered trademarks of their respective owners. Use of them does not imply any affiliation, sponsorship, or endorsement by the trademark owner.
©2013-2020 Entegris, Inc. | All rights reserved. | Printed in the USA | 4414-7372ENT-0720
DIMENSIONS—
ORDERING INFORMATION—Impact HV filters
Part Number Description
ATAG0LKM1 Impact HV PTFE 0.2 µm OF Kalrez O-ring
ATAA0LKM1 Impact HV PTFE 1.0 µm OF Kalrez O-ring
AWAV0LK1 Impact HV UPE 0.1 µm OF Kalrez O-ring
AWAG0LK1 Impact HV UPE 0.2 µm OF Kalrez O-ring
AWAA0LKM1 Impact HV UPE 1.0 µm OF Kalrez O-ring
AWAH0LKM1 Impact HV UPE 0.5 µm OF Kalrez O-ring
91.0 mm(3.6")
Vent
Outlet
Inlet
105.5 mm(4.2")
Ø159.9 mm(6.3")
Ø89.7 mm(3.5")
Top View
Side View