MICROCONTAMINATION CONTROL retention ratings down to 5 nm, removes difficult contaminants from specific resists more efficiently than a single membrane. Utilizing two times the nylon membrane thickness, the nylon design improves gel retention performance at a 10 nm retention rating for market-leading contamination control. Each membrane technology is characterized for optimal performance in the most common photochemicals and blends in use. Innovative Design Solutions Entegris offers innovative design solutions. Impact 8G’s unique core-fill design increases flow rate and reduces filter priming time, resulting in a more stable and repeatable production environment with lower defectivity performance. Impact filters use Connectology ® to quickly and securely connect to the Impact manifold and IntelliGen ® dispense systems. Impact 8G flushing shell offers a cleaner, more efficient transitional flow- through solution for photochemical filtration and dispense. Impact ® Point-of-Use Photochemical Filters Rapid changeout filters featuring superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents Representing a lineage of in-fab production expertise and customer collaboration, Impact ® point-of-use (POU) photo- chemical filters deliver superior filtration solutions to critical photolithography processes. Ultra Cleanliness with the Latest Impact Filter Designed to meet sub-2× nm technology node requirements, Impact 8G UCP’s cleaning process optimizes organic levels with lower particle shedding, metal extractables, and non-volatile residue (NVR). Conversely, process start-up time is shortened, and device yields are greatly improved. Impact filters enable fast filter changeouts, while high surface area and low hold-up volume reduce chemical usage and exposure to hazardous chemicals during filter installation and disposal. Array of Membrane Technologies Maximizing Retention Performance and Chemical Compatibility Impact filters utilize various membrane technologies to maximize retention performance. The asymmetric UPE membrane enables tighter retention performance (down to 3 nm with Impact 8G series filters) and lower pressure drop than a standard symmetri- cal UPE membrane. The Impact Duo technology, which com- bines the UPE membrane with a polyamide or nylon layer at
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MICROCONTAMINATION CONTROL Impact Point-of-Use … · 2 APPLICATIONS — Filter Series FILTER TYPE APPLICATIONS* Impact 8G Impact 8G, 8G UCP POU photoresist, ancillary photochemicals
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MICROCONTAMINATION CONTROL
retention ratings down to 5 nm, removes difficult contaminants
from specific resists more efficiently than a single membrane.
Utilizing two times the nylon membrane thickness, the nylon
design improves gel retention performance at a 10 nm retention
rating for market-leading contamination control. Each membrane
technology is characterized for optimal performance in the most
core-fill design increases flow rate and reduces filter priming
time, resulting in a more stable and repeatable production
environment with lower defectivity performance. Impact filters
use Connectology® to quickly and securely connect to the
Impact manifold and IntelliGen® dispense systems. Impact 8G
flushing shell offers a cleaner, more efficient transitional flow-
through solution for photochemical filtration and dispense.
Impact® Point-of-Use Photochemical FiltersRapid changeout filters featuring superior retention performance for ultra-clean, point-of-use filtration of photoresist and photochemical solvents
Representing a lineage of in-fab production expertise and
Increases flow rate with low defectivity performance
Reduces filter priming time
Advanced Connectology
Quickly and securely connects Impact filters to Impact manifold and IntelliGen dispense systems
Impact 8G flushing shell
Offers a clean, efficient transitional flow-through solution or photochemical filtration and dispense
4
Impact 8G and 8G UCP Series Filters
SPECIFICATIONS—
Materials Membrane 8G, 8G-L:
Asymmetric UPE, Nylon 6, Duo (UPE/nylon, PCM*)
8G UCP, 8G-L UCP:
UPE (clean resin), DUO (UPE/nylon)
Surface area 8G, 8G UCP:
UPE: 1200 cm2 (1.29 ft2)
Nylon/Duo: 800 cm2 (0.86 ft2)
PCM: 1300 cm2 (1.40 ft2)
8G-L, 8G-L UCP:
UPE: 2400 cm2 (2.58 ft2)
Nylon/Duo: 1600 cm2 (1.72 ft2)
PCM: 2600 cm2 (2.80 ft2)
Supports, core shell HDPE
O-ring Kalrez® perfluoroelastomer (OF)
Retention rating 8G and 8G UCP series 3, 5, 10, 20 nm*
Nylon 6 10, 20 nm
Duo 5, 10 nm
PCM** 10 nm
Maximum operating conditions
Maximum inlet pressure:
0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)
Maximum forward/reverse differential pressure:
0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)
Maximum operating temperature:
40°C (104°F)
Hold up volume Impact 8G: 55 cc
Impact 8G-L: 110 cc
Compatibility*** PGMEA, PGME, NMP, ethyl lactate, MMP, cyclohexanone and other photochemical solvents
Wettability*** Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA and other photochemical solvents.
Fittings (use Impact 2 manifold****)
4 mm/3 mm Flowell™ 60 Type for OF filters
5 mm/3 mm Flowell 60 Type for OF filters
6 mm/4 mm Flowell 60 Type for OF filters
6.35 mm/3.95 mm Flowell 60 Type for OF filters
6.35 mm/4.35 mm Flowell 60 Type for OF/OM filters
6.35 mm/3.95 mm Super Type Pillar® for OF filters
6.35 mm/4.35 mm Super Type Pillar for OF/OM filters
* UPE 20 nm: Standard UPE only ** PCM: Surface-modified hydrophilic UPE *** Please contact your Regional Customer Service Center for specific recommendations. **** See the Impact 2 V2 Filters section for information about the Impact 2 manifold.
Note: The flushing shell is recommended for short-term use flushing tools and fluid lines; it is NOT recommended for long-term use especially after applying pressure or exposure to solvents.
DIMENSIONS—
ORDERING INFORMATION—
Part Number Description
A2AMC00K1 Impact 8G flushing shell with Kalrez O-ring
A2AMC0001 Impact 8G flushing shell with no O-ring
28 mm(1.10")
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Impact 2 V2 Filters
SPECIFICATIONS—
Materials Membrane UPE, nylon, Duo (UPE/nylon), PCM
Surface area Asymmetric nylon:
800 cm2 (0.86 ft2)
Asymmetric PCM:
1350 cm2 (1.45 ft2)
Duo, nylon:
800 cm2 (0.86 ft2)
850 cm2 (0.92 ft2)
Supports (upstream, downstream, mold)
HDPE
O-ring Kalrez perfluoroelastomer
Retention rating Nylon 6 10 nm, 20 nm, 0.05 µm
UPE 3 nm – 1 µm
Duo 5, 10, 30 nm
PCM (surface-modified UPE) 20 nm, 0.05 µm
Maximum operating conditions
Maximum inlet pressure:
0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)
Maximum forward/reverse differential pressure:
0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)
Maximum operating temperature:
40°C (104°F)
Hold up volume ≤55 cc
Compatibility* PGMEA, PGME, NMP, ethyl lactate, MMP, and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.
Wettability* Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA, NMP, and other photochemical solvents.
Fittings (use Impact 2 manifold)
4 mm/3 mm Flowell 60 Type for OF filters
5 mm/3 mm Flowell 60 Type for OF filters
6 mm/4 mm Flowell 60 Type for OF filters
6.35 mm/3.95 mm Flowell 60 Type for OF filters
6.35 mm/4.35 mm Flowell 60 Type for OF/OM filters
6.35 mm/3.95 mm Super Type Pillar for OF filters
6.35 mm/4.35 mm Super Type Pillar for OF/OM filters
*Please contact your Regional Customer Service Center for specific recommendations.
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PERFORMANCE DATA—
1009080706050403020100
0 1 765432 8 9 10
0 1 765432 8 9 10
Impact 2 V2 Asymmetric UPE FiltersD
i�er
enti
al P
ress
ure
(kP
a)
Typical Flow Rate (mL/sec)
35
30
25
20
15
10
5
0
Impact 2 V2 Asymmetric Nylon Filters
Di�
eren
tial
Pre
ssu
re (k
Pa)
Typical Flow Rate (mL/sec)
160
140
120
100
80
60
40
20
0
Impact 2-Duo
Di�
eren
tial
Pre
ssu
re (k
Pa)
Typical Flow Rate (mL/sec)
0 1 765432 8 9 10
50454035302520151050
0 1 2 3 4 5 6 7 8 9 10
20 nm
10 nm
50 nm
Impact 2 V2 PCM Filters
Di�
eren
tial
Pre
ssu
re (k
Pa)
Typical Flow Rate (mL/sec)
20 nm
10 nm
50 nm
5 nm
10 nm
30 nm
5 nm3 nm
10 nm
10
DIMENSIONS—
94 mm(3.70")
79.0 mm(3.11")
35.0 mm(1.38")
10 mm(0.39")
59.5 mm(2.34")
82.5 mm (3.25")
Side View
127.0 mm (5.0")
122 mm(4.80")
172 mm (6.77")
138 mm (5.43")
45.0 mm(1.77")
Impact 2 V2 Filter with Impact 2 Manifold – 6.35 mm Flowell 60 Type
Front View
4
65 mm (2.56")
Top View Side View
49 mm(1.93")
73 mm (2.87")
88 mm(3.46")
Impact 2 V2 Filter with Impact 2 Manifold
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ORDERING INFORMATION—This information serves as a guide. Please contact your local representative to confirm part numbers.
Impact 2 V2 Filters: part number
A2 2 1
* The M-pleat style only applies to Impact filters with a UPE membrane of up to 30 nm.
Compatibility* PGMEA, PGME, NMP, ethyl lactate, MMP, and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.
Wettability* Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA, NMP, and other photochemical solvents.
Note: The Impact Asymmetric Mini uses a pump (Entegris IntelliGen Mini or IntelliGen ASF) instead of a manifold.*Please contact your Regional Customer Service Center for specific recommendations.
PERFORMANCE DATA—Impact Mini
20 nm
0.05 µm
0.1 µm
1.50
1.25
1.00
0.75
0.50
0.25
0
20
15
10
5
00 5 10
Di�
eren
tial
Pre
ssu
re (b
ar)
Typical Flow Rate (L/min) – 1 cP @ 25°C (77°F)
Di�
eren
tial
Pre
ssu
re (p
sid
)
GPM0 0.10 0.10 0.15
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DIMENSIONS—
ORDERING INFORMATION—This information serves as a guide. Please contact your local representative to confirm part numbers.
Impact Mini Filters: part number
AM 200K 1
Ø5.69 cm (2.24") 7.29 cm (2.87")
5.56 cm(2.19")
Front View Side View
Note: The top view dimensions of Impact Mini are the same as Impact 2 V2.
Dispense system — IntelliGen HV two-stage dispense system
Standalone (Optimizer ST2 manifold)
Inlet/outlet 1⁄4", 3⁄8", and 1⁄2" Flowell 60
1⁄4", 3⁄8", 1⁄2" and 6 mm tube stubs
Vent/drain 1⁄4" Flowell 60
1⁄4" and 4 mm tube stubs
PERFORMANCE DATA—
120
100
80
60
40
20
00 2 3 4 5 6 7 8 9 101
Di�
eren
tial
Pre
ssu
re (k
Pa)
Typical Flow Rate (L/min)
Impact HV Filters
0.1 µm UPE
0.2 µm PTFE
1.0 µm PTFE
0.2 µm UPE
0.5 µm UPE1.0 µm UPE
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FOR MORE INFORMATION
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