Wafer Robot Electric Gripper RS406 Specification ... · Wafer Robot Specification Specification External Dimensions / Motion Range External Dimensions / Motion Range Features * Cycle

FeaturesFeatures

SpecificationSpecification

RS406

SCARA SCARA

Robot Type RS406-600

Degree of Freedom 4

PayloadRated

kg2

Maximum 6

Reach mm 600

Joint Range

J1 deg ±130

J2 deg ±150

J3 mm 200

J4 deg ±360

Standard Cycle Time* sec 0.39

Repeatability

J1+J2 mm ±0.02

J3 mm ±0.01

J4 deg ±0.01

Z-Axis Shaft Diameter mm 20

J3(Z-Axis)Push Force N 100

Allowable Initial

Moment

Ratedkg-m2 0.01

Maximum 0.12

I/O Channels7 output point / 8 input point

User Tubing Ø4×2,Ø6×2

Weight kg 17(Not Included controller)

Electric GripperElectric Gripper

XEG-16 XEG-32 XEG-64 XEG-C1

Industrial Robot

High SpeedHigh Precision

Multifunctional IntegrationEcology First

Humanistic Technology

Industrial Robot

©2014 FORM C99DE01-1404 (PRINTED IN TAIWAN)

HIWIN TECHNOLOGIES CORP.No. 7, Jingke Road, Taichung Precision Machinery Park,Taichung 40852, TaiwanTel :[email protected]

Mega-Fabs Motion Systemswww.mega-fabs.com

HIWIN SCHWEIZwww.hiwin.ch

HIWIN KOREAwww.hiwin.kr

HIWIN s.r.o. www.hiwin.cz

HIWIN FRANCEwww.hiwin.fr

HIWIN SINGAPOREwww.hiwin.sg

HIWIN Srlwww.hiwin.it

HIWIN USAwww.hiwin.com

HIWIN JAPANwww.hiwin.co.jp

HIWIN GmbH www.hiwin.de

Subsidiaries & R&D Centers

● Uses the closed-loop control of a stepper motor combined with an encoder.

● The gripping transmission is a single axis robot that utilizes a ballscrew.

● Adjustable gripping force, position, velocity and acceleration.

● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.

● Uses the closed-loop control of a stepper motor combined with an encoder.

● The gripping transmission is a single axis robot that utilizes a ballscrew.

● Adjustable gripping force, position, velocity and acceleration.

● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.

● SCARA[Selective Compliance Assembly

Robot Arm]● SCARA provides an excellent solution

for rapid motion in the horizontal plane

for pick and place and assembly

applications. Widely used in the plastic,

automobile, electronic pharmaceutical

and food industries.

● Mounting Position：Floor or Wall

● SCARA[Selective Compliance Assembly

Robot Arm]● SCARA provides an excellent solution

for rapid motion in the horizontal plane

for pick and place and assembly

applications. Widely used in the plastic,

automobile, electronic pharmaceutical

and food industries.

● Mounting Position：Floor or Wall

　 XEG-16 16 5~50 ± 0.01 1~60 0.34

　 XEG-32 32 15~150 ± 0.01 1~80 0.63

　 XEG-64 64 90~450 ± 0.01 1~100 1.85

ModelStroke/

both sidesGripper

Force RepeatabilityOpening/

closing speed Weight

XEG-C1 DC24V±10% 3A MAX 0.14

ControllerModel Power Supply (V) Total Current (A) Weight (kg)

(mm) (N) (mm) (mm/s) (kg)

RS406

Wafer RobotWafer Robot

SpecificationSpecification

SpecificationSpecification

External Dimensions / Motion RangeExternal Dimensions / Motion Range

External Dimensions / Motion RangeExternal Dimensions / Motion Range

FeaturesFeatures

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

● Product Description: According to customer needs to provide the robot with the key components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)

● Applications include: Automatic wafer transfer and positioning.

FeaturesFeatures● Product Description: According to customer needs to provide the robot with the key

components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)

● Applications include: Automatic wafer transfer and positioning.

Stroke 500mm

Velocity

Stroke

Velocity

250mm/s

Turning Range 0 ~゚340゜

Angular Velocity 360 /゚s

420mm

900mm/s

Approx. 48kg

ISO Class 2 (ISO 14644)

60,000hrs

290x290mm2

± 0.02mm

0.5Kgf

RS-232,I/O

-40kPa ~ -55kPa, Ø6

Single-Phase AC110V/AC220V

Z-Axis

T-Axis

R-Axis

Power Supply

MTBF

Cleanliness

Weight

Top Mount Plate

Operating Tempature

Repeatability

Payload Capacity

Control interfaces

Vacuum Require

10~40 C゚

20

139 19

6

176

146

23.5

198

110

78 1572

8

□264

500

(Z-S

trok

e)

ExhaustDirection

70 45.5

110 440 (R-Stroke)(Rotational Range)

182

550

258

135135

340°

20°Dead Zone

55°

Wafer min:2"

Wafer max:8" Wafer min:2"

Wafer max:8"

Min Rotational Diameter:Ø510

200

40

570

(Z S

TRO

KE

200m

m)

233.

5

472.

8

680

B DETAIL

B DETAIL

10

Ø20

1530

R20

2-M3x0.5P

MaxØ14 Through Hole

R660J1+J2 Rotational Range R600

130°

150°

J2 Rotational Range R325

220

245

R162.6

130°

150°

483.91

A DETAIL

168

B

B

15045

15

915

0

B-B SECTION

8

19

4-Ø

9

600

325275

660

60

A DETAIL

Degrees of freedom

Nominal load capacity

6

5kg

710mm (Point P)

±165°

+85°~-125°

+185°~-55°

±190°

±115°

±360°

±0.02mm

0.5s

40kg

RCA605

floor, ceiling and wall-mounted

● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.

● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.

FeaturesFeatures

FeaturesFeatures

SpecificationSpecification SpecificationSpecification SpecificationSpecification

RD401RD401RA605RA605

Articulated RobotArticulated Robot Delta RobotDelta RobotRD403RD403

Delta RobotDelta RobotRK401RK401

47h7

28h7

4-M3X0.5PX6.5DP BCD 20

12H7

3012

519

5

View A

632

100

50

Ø320

Ø420

2514

046

7

A

B

120°

View B

Ø800

BCD 760

7.5°

Ø720

Ø16

J1

J2

J3

J4

J5

J6

4-M5 Screw, Depth 6

45°Ø5H7, Depth 7

Ø20H7, Depth 3

P.C.D Ø31.5

Intersection

Mechanical Interface DetailVIEW A

180

180

210

210

107

107

4-Ø11 Installation hole

Installation Dimension DetailVIEW B

818

220

120

Front View

125°

85°

R340

71030

648

1055

160

309239

201

71

R680

115°

Point P

434

281

33886

Motion space at point P

Side ViewB

R242

R340

107°

138°

R34

0

40

115°R710

Motion space at point P

Point P

Top View

A

165°

165°

R272

47h7

28h7

4-M3X0.5PX6.5DP BCD 20

12H7 30

125 19

5

View A

Ø1000

BCD 1040

Ø1080

View B

7.5°

120°

Ø18

4032

7

1057

300

200

690

A

Ø750

Ø1300

B

External Dimensions / Motion RangeExternal Dimensions / Motion Range

External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

Mot

ion

Ran

ge

Maximum reach radius

Position repeatability

Cycle time*

Weight

Controller

Installation

4

1kg

420mm

150mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.05mm

0.3s

80kg

RCD401

ceiling mount

4

3kg

1300mm

500mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.1mm

0.3s

165kg

RCD403

ceiling mount

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

FeaturesFeatures

SpecificationSpecification

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

FeaturesFeatures

● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.

● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.

Movable Parallel RobotMovable Parallel Robot

Ø868

Ø560

120°

47h728h7

4-M3X0.5PX6.5DP BCD 20

12H7

3012

519

5

View A

1175

.115

9.43

800

440.

46

A

4

1kg

560mm

670mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.05mm

0.3s

50kg

RCK401

floor, ceiling

(without controller)

Degrees of freedom

Nominal load capacity

6

5kg

710mm (Point P)

±165°

+85°~-125°

+185°~-55°

±190°

±115°

±360°

±0.02mm

0.5s

40kg

RCA605

floor, ceiling and wall-mounted

● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.

● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.

FeaturesFeatures

FeaturesFeatures

SpecificationSpecification SpecificationSpecification SpecificationSpecification

RD401RD401RA605RA605

Articulated RobotArticulated Robot Delta RobotDelta RobotRD403RD403

Delta RobotDelta RobotRK401RK401

47h7

28h7

4-M3X0.5PX6.5DP BCD 20

12H7

3012

519

5

View A

632

100

50

Ø320

Ø420

2514

046

7

A

B

120°

View B

Ø800

BCD 760

7.5°

Ø720

Ø16

J1

J2

J3

J4

J5

J6

4-M5 Screw, Depth 6

45°Ø5H7, Depth 7

Ø20H7, Depth 3

P.C.D Ø31.5

Intersection

Mechanical Interface DetailVIEW A

180

180

210

210

107

107

4-Ø11 Installation hole

Installation Dimension DetailVIEW B

818

220

120

Front View

125°

85°

R340

71030

648

1055

160

309239

201

71

R680

115°

Point P

434

281

33886

Motion space at point P

Side ViewB

R242

R340107°

138°

R34

0

40

115°R710

Motion space at point P

Point P

Top View

A

165°

165°

R272

47h7

28h7

4-M3X0.5PX6.5DP BCD 20

12H7 30

125 19

5

View A

Ø1000

BCD 1040

Ø1080

View B

7.5°

120°

Ø18

4032

7

1057

300

200

690

A

Ø750

Ø1300

B

External Dimensions / Motion RangeExternal Dimensions / Motion Range

External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

Mot

ion

Ran

ge

Maximum reach radius

Position repeatability

Cycle time*

Weight

Controller

Installation

4

1kg

420mm

150mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.05mm

0.3s

80kg

RCD401

ceiling mount

4

3kg

1300mm

500mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.1mm

0.3s

165kg

RCD403

ceiling mount

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

FeaturesFeatures

SpecificationSpecification

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

FeaturesFeatures

● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.

● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.

Movable Parallel RobotMovable Parallel Robot

Ø868

Ø560

120°

47h728h7

4-M3X0.5PX6.5DP BCD 20

12H7

3012

519

5

View A

1175

.115

9.43

800

440.

46

A

4

1kg

560mm

670mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.05mm

0.3s

50kg

RCK401

floor, ceiling

(without controller)

Degrees of freedom

Nominal load capacity

6

5kg

710mm (Point P)

±165°

+85°~-125°

+185°~-55°

±190°

±115°

±360°

±0.02mm

0.5s

40kg

RCA605

floor, ceiling and wall-mounted

● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.

● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.

FeaturesFeatures

FeaturesFeatures

SpecificationSpecification SpecificationSpecification SpecificationSpecification

RD401RD401RA605RA605

Articulated RobotArticulated Robot Delta RobotDelta RobotRD403RD403

Delta RobotDelta RobotRK401RK401

47h7

28h7

4-M3X0.5PX6.5DP BCD 20

12H7

3012

519

5

View A

632

100

50

Ø320

Ø420

2514

046

7

A

B

120°

View B

Ø800

BCD 760

7.5°

Ø720

Ø16

J1

J2

J3

J4

J5

J6

4-M5 Screw, Depth 6

45°Ø5H7, Depth 7

Ø20H7, Depth 3

P.C.D Ø31.5

Intersection

Mechanical Interface DetailVIEW A

180

180

210

210

107

107

4-Ø11 Installation hole

Installation Dimension DetailVIEW B

818

220

120

Front View

125°

85°

R340

71030

648

1055

160

309239

201

71

R680

115°

Point P

434

281

33886

Motion space at point P

Side ViewB

R242

R340

107°

138°

R34

0

40

115°R710

Motion space at point P

Point P

Top View

A

165°

165°

R272

47h7

28h7

4-M3X0.5PX6.5DP BCD 20

12H7 30

125 19

5

View A

Ø1000

BCD 1040

Ø1080

View B

7.5°

120°

Ø18

4032

7

1057

300

200

690

A

Ø750

Ø1300

B

External Dimensions / Motion RangeExternal Dimensions / Motion Range

External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

Mot

ion

Ran

ge

Maximum reach radius

Position repeatability

Cycle time*

Weight

Controller

Installation

4

1kg

420mm

150mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.05mm

0.3s

80kg

RCD401

ceiling mount

4

3kg

1300mm

500mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.1mm

0.3s

165kg

RCD403

ceiling mount

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

FeaturesFeatures

SpecificationSpecification

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

FeaturesFeatures

● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.

● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.

Movable Parallel RobotMovable Parallel Robot

Ø868

Ø560

120°

47h728h7

4-M3X0.5PX6.5DP BCD 20

12H7

3012

519

5

View A

1175

.115

9.43

800

440.

46

A

4

1kg

560mm

670mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.05mm

0.3s

50kg

RCK401

floor, ceiling

(without controller)

Degrees of freedom

Nominal load capacity

6

5kg

710mm (Point P)

±165°

+85°~-125°

+185°~-55°

±190°

±115°

±360°

±0.02mm

0.5s

40kg

RCA605

floor, ceiling and wall-mounted

● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.

● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.

FeaturesFeatures

FeaturesFeatures

SpecificationSpecification SpecificationSpecification SpecificationSpecification

RD401RD401RA605RA605

Articulated RobotArticulated Robot Delta RobotDelta RobotRD403RD403

Delta RobotDelta RobotRK401RK401

47h7

28h7

4-M3X0.5PX6.5DP BCD 20

12H7

3012

519

5

View A

632

100

50

Ø320

Ø420

2514

046

7

A

B

120°

View B

Ø800

BCD 760

7.5°

Ø720

Ø16

J1

J2

J3

J4

J5

J6

4-M5 Screw, Depth 6

45°Ø5H7, Depth 7

Ø20H7, Depth 3

P.C.D Ø31.5

Intersection

Mechanical Interface DetailVIEW A

180

180

210

210

107

107

4-Ø11 Installation hole

Installation Dimension DetailVIEW B

818

220

120

Front View

125°

85°

R340

71030

648

1055

160

309239

201

71

R680

115°

Point P

434

281

33886

Motion space at point P

Side ViewB

R242

R340

107°

138°

R34

0

40

115°R710

Motion space at point P

Point P

Top View

A

165°

165°

R272

47h7

28h7

4-M3X0.5PX6.5DP BCD 20

12H7 30

125 19

5

View A

Ø1000

BCD 1040

Ø1080

View B

7.5°

120°

Ø18

4032

7

1057

300

200

690

A

Ø750

Ø1300

B

External Dimensions / Motion RangeExternal Dimensions / Motion Range

External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range External Dimensions / Motion RangeExternal Dimensions / Motion Range

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

Mot

ion

Ran

ge

Maximum reach radius

Position repeatability

Cycle time*

Weight

Controller

Installation

4

1kg

420mm

150mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.05mm

0.3s

80kg

RCD401

ceiling mount

4

3kg

1300mm

500mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.1mm

0.3s

165kg

RCD403

ceiling mount

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

● A 4-axis parallel robot utilizing a parallel linkage mechanism to perform extremely

high speed motions with stability and high accuracy.● Applications include: pick-and-place, assembly, alignment and packaging.

FeaturesFeatures

SpecificationSpecification

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

FeaturesFeatures

● A compact and agile 6-axis jointed-arm robot for precise assembly, part transfer and workpiece loading/unloading.

● Applications include: pick-and-place, handling, assembly, deburring, grinding and polishing.

Movable Parallel RobotMovable Parallel Robot

Ø868

Ø560

120°

47h728h7

4-M3X0.5PX6.5DP BCD 20

12H7

3012

519

5

View A

1175

.115

9.43

800

440.

46

A

4

1kg

560mm

670mm

Mot

ion

Ran

ge

Horizontal stroke

Vertical stroke

Degrees of freedom

Nominal load capacity

Position repeatability

Cycle time*

Weight

Controller

Installation

±0.05mm

0.3s

50kg

RCK401

floor, ceiling

(without controller)

FeaturesFeatures

SpecificationSpecification

RS406

SCARA SCARA

Robot Type RS406-600

Degree of Freedom 4

PayloadRated

kg2

Maximum 6

Reach mm 600

Joint Range

J1 deg ±130

J2 deg ±150

J3 mm 200

J4 deg ±360

Standard Cycle Time* sec 0.39

Repeatability

J1+J2 mm ±0.02

J3 mm ±0.01

J4 deg ±0.01

Z-Axis Shaft Diameter mm 20

J3(Z-Axis)Push Force N 100

Allowable Initial

Moment

Ratedkg-m2 0.01

Maximum 0.12

I/O Channels7 output point / 8 input point

User Tubing Ø4×2,Ø6×2

Weight kg 17(Not Included controller)

Electric GripperElectric Gripper

XEG-16 XEG-32 XEG-64 XEG-C1

Industrial Robot

High SpeedHigh Precision

Multifunctional IntegrationEcology First

Humanistic Technology

Industrial Robot

©2014 FORM C99DE01-1404 (PRINTED IN TAIWAN)

HIWIN TECHNOLOGIES CORP.No. 7, Jingke Road, Taichung Precision Machinery Park,Taichung 40852, TaiwanTel :[email protected]

Mega-Fabs Motion Systemswww.mega-fabs.com

HIWIN SCHWEIZwww.hiwin.ch

HIWIN KOREAwww.hiwin.kr

HIWIN s.r.o. www.hiwin.cz

HIWIN FRANCEwww.hiwin.fr

HIWIN SINGAPOREwww.hiwin.sg

HIWIN Srlwww.hiwin.it

HIWIN USAwww.hiwin.com

HIWIN JAPANwww.hiwin.co.jp

HIWIN GmbH www.hiwin.de

Subsidiaries & R&D Centers

● Uses the closed-loop control of a stepper motor combined with an encoder.

● The gripping transmission is a single axis robot that utilizes a ballscrew.

● Adjustable gripping force, position, velocity and acceleration.

● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.

● Uses the closed-loop control of a stepper motor combined with an encoder.

● The gripping transmission is a single axis robot that utilizes a ballscrew.

● Adjustable gripping force, position, velocity and acceleration.

● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.

● SCARA[Selective Compliance Assembly

Robot Arm]● SCARA provides an excellent solution

for rapid motion in the horizontal plane

for pick and place and assembly

applications. Widely used in the plastic,

automobile, electronic pharmaceutical

and food industries.

● Mounting Position：Floor or Wall

● SCARA[Selective Compliance Assembly

Robot Arm]● SCARA provides an excellent solution

for rapid motion in the horizontal plane

for pick and place and assembly

applications. Widely used in the plastic,

automobile, electronic pharmaceutical

and food industries.

● Mounting Position：Floor or Wall

　 XEG-16 16 5~50 ± 0.01 1~60 0.34

　 XEG-32 32 15~150 ± 0.01 1~80 0.63

　 XEG-64 64 90~450 ± 0.01 1~100 1.85

ModelStroke/

both sidesGripper

Force RepeatabilityOpening/

closing speed Weight

XEG-C1 DC24V±10% 3A MAX 0.14

ControllerModel Power Supply (V) Total Current (A) Weight (kg)

(mm) (N) (mm) (mm/s) (kg)

RS406

Wafer RobotWafer Robot

SpecificationSpecification

SpecificationSpecification

External Dimensions / Motion RangeExternal Dimensions / Motion Range

External Dimensions / Motion RangeExternal Dimensions / Motion Range

FeaturesFeatures

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

● Product Description: According to customer needs to provide the robot with the key components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)

● Applications include: Automatic wafer transfer and positioning.

FeaturesFeatures● Product Description: According to customer needs to provide the robot with the key

components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)

● Applications include: Automatic wafer transfer and positioning.

Stroke 500mm

Velocity

Stroke

Velocity

250mm/s

Turning Range 0 ~゚340゜

Angular Velocity 360 /゚s

420mm

900mm/s

Approx. 48kg

ISO Class 2 (ISO 14644)

60,000hrs

290x290mm2

± 0.02mm

0.5Kgf

RS-232,I/O

-40kPa ~ -55kPa, Ø6

Single-Phase AC110V/AC220V

Z-Axis

T-Axis

R-Axis

Power Supply

MTBF

Cleanliness

Weight

Top Mount Plate

Operating Tempature

Repeatability

Payload Capacity

Control interfaces

Vacuum Require

10~40 C゚

20

139 19

6

176

146

23.5

198

110

78 1572

8

□264

500

(Z-S

trok

e)

ExhaustDirection

70 45.5

110 440 (R-Stroke)(Rotational Range)

182

550

258

135135

340°

20°Dead Zone

55°

Wafer min:2"

Wafer max:8" Wafer min:2"

Wafer max:8"

Min Rotational Diameter:Ø510

200

40

570

(Z S

TRO

KE

200m

m)

233.

5

472.

8

680

B DETAIL

B DETAIL

10

Ø20

1530

R20

2-M3x0.5P

MaxØ14 Through Hole

R660J1+J2 Rotational Range R600

130°

150°

J2 Rotational Range R325

220

245

R162.6

130°

150°

483.91

A DETAIL

168

B

B

15045

15

915

0

B-B SECTION

8

19

4-Ø

9

600

325275

660

60

A DETAIL

FeaturesFeatures

SpecificationSpecification

RS406

SCARA SCARA

Robot Type RS406-600

Degree of Freedom 4

PayloadRated

kg2

Maximum 6

Reach mm 600

Joint Range

J1 deg ±130

J2 deg ±150

J3 mm 200

J4 deg ±360

Standard Cycle Time* sec 0.39

Repeatability

J1+J2 mm ±0.02

J3 mm ±0.01

J4 deg ±0.01

Z-Axis Shaft Diameter mm 20

J3(Z-Axis)Push Force N 100

Allowable Initial

Moment

Ratedkg-m2 0.01

Maximum 0.12

I/O Channels7 output point / 8 input point

User Tubing Ø4×2,Ø6×2

Weight kg 17(Not Included controller)

Electric GripperElectric Gripper

XEG-16 XEG-32 XEG-64 XEG-C1

Industrial Robot

High SpeedHigh Precision

Multifunctional IntegrationEcology First

Humanistic Technology

Industrial Robot

©2014 FORM C99DE01-1404 (PRINTED IN TAIWAN)

HIWIN TECHNOLOGIES CORP.No. 7, Jingke Road, Taichung Precision Machinery Park,Taichung 40852, TaiwanTel :[email protected]

Mega-Fabs Motion Systemswww.mega-fabs.com

HIWIN SCHWEIZwww.hiwin.ch

HIWIN KOREAwww.hiwin.kr

HIWIN s.r.o. www.hiwin.cz

HIWIN FRANCEwww.hiwin.fr

HIWIN SINGAPOREwww.hiwin.sg

HIWIN Srlwww.hiwin.it

HIWIN USAwww.hiwin.com

HIWIN JAPANwww.hiwin.co.jp

HIWIN GmbH www.hiwin.de

Subsidiaries & R&D Centers

● Uses the closed-loop control of a stepper motor combined with an encoder.

● The gripping transmission is a single axis robot that utilizes a ballscrew.

● Adjustable gripping force, position, velocity and acceleration.

● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.

● Uses the closed-loop control of a stepper motor combined with an encoder.

● The gripping transmission is a single axis robot that utilizes a ballscrew.

● Adjustable gripping force, position, velocity and acceleration.

● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.

● SCARA[Selective Compliance Assembly

Robot Arm]● SCARA provides an excellent solution

for rapid motion in the horizontal plane

for pick and place and assembly

applications. Widely used in the plastic,

automobile, electronic pharmaceutical

and food industries.

● Mounting Position：Floor or Wall

● SCARA[Selective Compliance Assembly

Robot Arm]● SCARA provides an excellent solution

for rapid motion in the horizontal plane

for pick and place and assembly

applications. Widely used in the plastic,

automobile, electronic pharmaceutical

and food industries.

● Mounting Position：Floor or Wall

　 XEG-16 16 5~50 ± 0.01 1~60 0.34

　 XEG-32 32 15~150 ± 0.01 1~80 0.63

　 XEG-64 64 90~450 ± 0.01 1~100 1.85

ModelStroke/

both sidesGripper

Force RepeatabilityOpening/

closing speed Weight

XEG-C1 DC24V±10% 3A MAX 0.14

ControllerModel Power Supply (V) Total Current (A) Weight (kg)

(mm) (N) (mm) (mm/s) (kg)

RS406

Wafer RobotWafer Robot

SpecificationSpecification

SpecificationSpecification

External Dimensions / Motion RangeExternal Dimensions / Motion Range

External Dimensions / Motion RangeExternal Dimensions / Motion Range

FeaturesFeatures

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

● Product Description: According to customer needs to provide the robot with the key components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)

● Applications include: Automatic wafer transfer and positioning.

FeaturesFeatures● Product Description: According to customer needs to provide the robot with the key

components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)

● Applications include: Automatic wafer transfer and positioning.

Stroke 500mm

Velocity

Stroke

Velocity

250mm/s

Turning Range 0 ~゚340゜

Angular Velocity 360 /゚s

420mm

900mm/s

Approx. 48kg

ISO Class 2 (ISO 14644)

60,000hrs

290x290mm2

± 0.02mm

0.5Kgf

RS-232,I/O

-40kPa ~ -55kPa, Ø6

Single-Phase AC110V/AC220V

Z-Axis

T-Axis

R-Axis

Power Supply

MTBF

Cleanliness

Weight

Top Mount Plate

Operating Tempature

Repeatability

Payload Capacity

Control interfaces

Vacuum Require

10~40 C゚

20

139 19

6

176

146

23.5

198

110

78 1572

8

□264

500

(Z-S

trok

e)

ExhaustDirection

70 45.5

110 440 (R-Stroke)(Rotational Range)

182

550

258

135135

340°

20°Dead Zone

55°

Wafer min:2"

Wafer max:8" Wafer min:2"

Wafer max:8"

Min Rotational Diameter:Ø510

200

40

570

(Z S

TRO

KE

200m

m)

233.

5

472.

8

680

B DETAIL

B DETAIL

10

Ø20

1530

R20

2-M3x0.5P

MaxØ14 Through Hole

R660J1+J2 Rotational Range R600

130°

150°

J2 Rotational Range R325

220

245

R162.6

130°

150°

483.91

A DETAIL

168

B

B

15045

15

915

0

B-B SECTION

8

19

4-Ø

9

600

325275

660

60

A DETAIL

FeaturesFeatures

SpecificationSpecification

RS406

SCARA SCARA

Robot Type RS406-600

Degree of Freedom 4

PayloadRated

kg2

Maximum 6

Reach mm 600

Joint Range

J1 deg ±130

J2 deg ±150

J3 mm 200

J4 deg ±360

Standard Cycle Time* sec 0.39

Repeatability

J1+J2 mm ±0.02

J3 mm ±0.01

J4 deg ±0.01

Z-Axis Shaft Diameter mm 20

J3(Z-Axis)Push Force N 100

Allowable Initial

Moment

Ratedkg-m2 0.01

Maximum 0.12

I/O Channels7 output point / 8 input point

User Tubing Ø4×2,Ø6×2

Weight kg 17(Not Included controller)

Electric GripperElectric Gripper

XEG-16 XEG-32 XEG-64 XEG-C1

Industrial Robot

High SpeedHigh Precision

Multifunctional IntegrationEcology First

Humanistic Technology

Industrial Robot

©2014 FORM C99DE01-1404 (PRINTED IN TAIWAN)

HIWIN TECHNOLOGIES CORP.No. 7, Jingke Road, Taichung Precision Machinery Park,Taichung 40852, TaiwanTel :[email protected]

Mega-Fabs Motion Systemswww.mega-fabs.com

HIWIN SCHWEIZwww.hiwin.ch

HIWIN KOREAwww.hiwin.kr

HIWIN s.r.o. www.hiwin.cz

HIWIN FRANCEwww.hiwin.fr

HIWIN SINGAPOREwww.hiwin.sg

HIWIN Srlwww.hiwin.it

HIWIN USAwww.hiwin.com

HIWIN JAPANwww.hiwin.co.jp

HIWIN GmbH www.hiwin.de

Subsidiaries & R&D Centers

● Uses the closed-loop control of a stepper motor combined with an encoder.

● The gripping transmission is a single axis robot that utilizes a ballscrew.

● Adjustable gripping force, position, velocity and acceleration.

● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.

● Uses the closed-loop control of a stepper motor combined with an encoder.

● The gripping transmission is a single axis robot that utilizes a ballscrew.

● Adjustable gripping force, position, velocity and acceleration.

● The gripper's compact size offers high speed, accuracy, stiffness and efficiency.

● SCARA[Selective Compliance Assembly

Robot Arm]● SCARA provides an excellent solution

for rapid motion in the horizontal plane

for pick and place and assembly

applications. Widely used in the plastic,

automobile, electronic pharmaceutical

and food industries.

● Mounting Position：Floor or Wall

● SCARA[Selective Compliance Assembly

Robot Arm]● SCARA provides an excellent solution

for rapid motion in the horizontal plane

for pick and place and assembly

applications. Widely used in the plastic,

automobile, electronic pharmaceutical

and food industries.

● Mounting Position：Floor or Wall

　 XEG-16 16 5~50 ± 0.01 1~60 0.34

　 XEG-32 32 15~150 ± 0.01 1~80 0.63

　 XEG-64 64 90~450 ± 0.01 1~100 1.85

ModelStroke/

both sidesGripper

Force RepeatabilityOpening/

closing speed Weight

XEG-C1 DC24V±10% 3A MAX 0.14

ControllerModel Power Supply (V) Total Current (A) Weight (kg)

(mm) (N) (mm) (mm/s) (kg)

RS406

Wafer RobotWafer Robot

SpecificationSpecification

SpecificationSpecification

External Dimensions / Motion RangeExternal Dimensions / Motion Range

External Dimensions / Motion RangeExternal Dimensions / Motion Range

FeaturesFeatures

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

* Cycle time is based on a reciprocating movement over a vertical distance of 25 mm and a horizontal distance of 300 mm. Actual cycle time will depend on operating conditions.

● Product Description: According to customer needs to provide the robot with the key components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)

● Applications include: Automatic wafer transfer and positioning.

FeaturesFeatures● Product Description: According to customer needs to provide the robot with the key

components of the customized. (Eg, linear guideways, ball screw, Toque motor, AC servo motor, controller ... etc.)

● Applications include: Automatic wafer transfer and positioning.

Stroke 500mm

Velocity

Stroke

Velocity

250mm/s

Turning Range 0 ~゚340゜

Angular Velocity 360 /゚s

420mm

900mm/s

Approx. 48kg

ISO Class 2 (ISO 14644)

60,000hrs

290x290mm2

± 0.02mm

0.5Kgf

RS-232,I/O

-40kPa ~ -55kPa, Ø6

Single-Phase AC110V/AC220V

Z-Axis

T-Axis

R-Axis

Power Supply

MTBF

Cleanliness

Weight

Top Mount Plate

Operating Tempature

Repeatability

Payload Capacity

Control interfaces

Vacuum Require

10~40 C゚

20

139 19

6

176

146

23.5

198

110

78 1572

8

□264

500

(Z-S

trok

e)

ExhaustDirection

70 45.5

110 440 (R-Stroke)(Rotational Range)

182

550

258

135135

340°

20°Dead Zone

55°

Wafer min:2"

Wafer max:8" Wafer min:2"

Wafer max:8"

Min Rotational Diameter:Ø510

200

40

570

(Z S

TRO

KE

200m

m)

233.

5

472.

8

680

B DETAIL

B DETAIL

10

Ø20

1530

R20

2-M3x0.5P

MaxØ14 Through Hole

R660J1+J2 Rotational Range R600

130°

150°

J2 Rotational Range R325

220

245

R162.6

130°

150°

483.91

A DETAIL

168

B

B

15045

15

915

0

B-B SECTION

8

19

4-Ø

9

600

325275

660

60

A DETAIL