www.nano.org.t r Report HAHID ALI itute of Materials Science and Nanotechnology onal Nanotechnology Research Center ent University, Ankara 06800
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Dec 23, 2015
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BY SHAHID ALI
Institute of Materials Science and NanotechnologyNational Nanotechnology Research CenterBilkent University, Ankara 06800
w w w . n a n o . o r g . t r 204/19/2023
BInN (26 supercycles) Rms=8.691nm
w w w . n a n o . o r g . t r 304/19/2023
BInN (0.3B) Rms=6.563nm
w w w . n a n o . o r g . t r 404/19/2023
w w w . n a n o . o r g . t r 504/19/2023
BST17 (Rms=760.433 Pm)
w w w . n a n o . o r g . t r 604/19/2023
BST 17 Annealed Rms= 1.688nm
w w w . n a n o . o r g . t r 704/19/2023
BST 4 (Rms=1.028 nm)
w w w . n a n o . o r g . t r 804/19/2023
BInN (26 supercycles) Rms=8.691nm
w w w . n a n o . o r g . t r 904/19/2023
BInN (0.3B) Rms=6.563nm
w w w . n a n o . o r g . t r 1004/19/2023
BInN 0.5 Rms= 2.852
w w w . n a n o . o r g . t r 1104/19/2023
BGaN 3B RMS=3.517nm
w w w . n a n o . o r g . t r 1204/19/2023
BGaN 0.3B Rms=4.683nm
w w w . n a n o . o r g . t r 1304/19/2023
BGaN 10B Rms= 751.221 pm
w w w . n a n o . o r g . t r 1404/19/2023
w w w . n a n o . o r g . t r 1504/19/2023
BST 4 Annealed Rms=1.93 nm
w w w . n a n o . o r g . t r 1604/19/2023
BST 8 As deposited Rms=0.317 nm
w w w . n a n o . o r g . t r 1704/19/2023
BST 4 As deposited Rms=0.162 nm
w w w . n a n o . o r g . t r 1804/19/2023
BST 17 As deposited Rms=1.88 nm
w w w . n a n o . o r g . t r 1904/19/2023
BST 17 Annealed Rms=1.71 nm
w w w . n a n o . o r g . t r 2004/19/2023
w w w . n a n o . o r g . t r 2104/19/2023
w w w . n a n o . o r g . t r 2204/19/2023
w w w . n a n o . o r g . t r 2304/19/2023
w w w . n a n o . o r g . t r 2404/19/2023
w w w . n a n o . o r g . t r 2504/19/2023
w w w . n a n o . o r g . t r 2604/19/2023
w w w . n a n o . o r g . t r 2704/19/2023
w w w . n a n o . o r g . t r 2804/19/2023
w w w . n a n o . o r g . t r 2904/19/2023
ResultsSample Afm Mode Rms(roughness
BInN (26 supercycles)
Non-contact
8.691 nm
BInN (0.3B) Non- contact
6.563 nm
BInN (0.5) Non-contact
2.852 nm
BST 4 (Annealed)
// 1. 93 nm
BST 17 (Annealed)
// 1.688 nm
BST 17 (As deposited)
// 760.433 pm
w w w . n a n o . o r g . t r 3004/19/2023
ResultsBGaN 3B // 3.517 nm
BGaN 0.3 B // 4.683 nm
BGaN 10B // 751.221 nm
BST 8 As deposited // 0.317 nm
Bst 4 As deposited // 0.162 nm
Bst 17 as deposited // 1.88 nm
STO 15 As deposited
// 120.831 pm
STO 15 Annealed // 2.748 nm
Sto 14 annealed // 1.524 nm
Sto 14 As deposited // 156. 102 nm
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