Compositional and morphological characterizations by SIMS, RBS and AFM Paolo Mazzoldi, N. Argiolas, G. Battaglin, C. Sada Physics Department G.Galilei,

Compositional and morphological characterizations by SIMS, RBS and AFM

Paolo Mazzoldi, N. Argiolas, G. Battaglin, C. Sada Physics Department “G.Galilei”, University of Padova

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19 Paris, 2006

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

I II

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Sample A

SIM

S Y

ield

(C

ount

s/s)

Depth (nm)

O Al Si Cr

SIMS Analysis

Sample A

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

SIMS analysis pointed out that:

1. The sample is made of two layer deposited on the substrate, the total thickness being (152±6)nm (estimation made by referring to the FWHM of Si signal.

2. The first layer has a thickness of (107±3)nm, while the second layer has a thickness of (45±6)nm. Important: the depth is strongly affected by the surface roughness.

3. The first layer contains a significant content of Al, O and presence of Fe, Ni, Co. It presents a segregation peak of Cr at the interface with the second layer, whose composition is dominated by Cr and oxygen. At the interface with the substrate a segregation of Cr is observed.

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

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Sample B

SIM

S Y

ield

(C

ount

s/s)

Depth (nm)

O Al Si Cr

SIMS Analysis

Sample B

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

SIMS analysis pointed out that:

1. The sample is made of two layer deposited on the substrate, the total thickness being (151±6)nm (estimation made by referring to the FWHM of Si signal.

2. The first layer has a thickness of (107±3)nm, while the second layer has a thickness of (44±6)nm. Important: the depth is strongly affected by the surface roughness.

3. The first layer contains a significant content of Al, O and presence of Fe, Ni, Co. It presents a segregation peak of Cr at the interface with the second layer, whose composition is dominated by Cr and oxygen. At the interface with the substrate a segregation of Cr is observed.

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

RBS analysis

Sample A

Compound AaBb where

1° layerAl = 2.00O = 3.10

2° layerCr = 1.00O = 0.10

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

Sample B

Compound AaBb where

1° layerAl = 2.00O = 4.16

2° layerCr = 1.00O = 1.20

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

AFM analysis and profilometer scans

Characterization of the ruler (Fig.1 sample A, position 1)

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Ruler

Hei

ght (

A)

Position (m)

The estimation of the total length of 20 markers is: 185.9 0.4 m.

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

SAMPLE B

Quality of the etched edges, height of the structure

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

Description Mean value (m) (m) m (m)

Sharp edge steepness 0.280 0.60 0.020

Total height of the structure 0.189 0.006 0.002

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

SAMPLE A

Mapping of the test structure in sample A (fig.2, position 2)

The scans of the deep groove evidenced an accumulation at the groove borders. The height Hg and the width Wg of the deep groove with respect to the flat surface (i.e. not considering these accumulations) was quantified: Hg=(0.190.01)m, Wg=(0.960.02)m respectively, the error being given by the maximum semi-dispersion.

INFM e Dipartimento di Fisica “G.Galilei”, Università degli Studi di Padova, Via Marzolo 8, 35100 Padova

TC19

The scans of the wall evidenced that the height Hw and the width Ww of the wall was respectively: Hw=(0.1950.007)m, Ww=(2.450.01)m respectively, the error being given by the maximum semi-dispersion.