1 ARTURO A. AYÓN 14506 Snip Street Cell (210) 854-8925 San Antonio, TX 78248 Work (210) 458-7245 Citizenship: United States [email protected]_____________________________________________________________________________________________ PROFESSIONAL EMPLOYMENT HISTORY University of Texas at San Antonio 2003 – Present Founding Director, MEMS Research Laboratory (2004 – Present) Directing research activities in a variety of MEMS and NEMS projects including high-efficiency photovoltaics, micro-rockets, drug eluting bio-absorbable stents, field emission with carbon nanotubes, power generation from wearable fabrics, hyperlenses, metamaterials, chemical sensors on a robotic platform, microactuators for radar applications and printable electronics, among others. Intellectual property generation and the fabrication and characterization of laboratory prototypes are strongly emphasized. The examples include the following devices: (i.) Roof Load Sensor (see: http://www.roofmonitor.com/), to monitor, quantify and display in real time roof loads on strip malls and dwellings due to rain, hail or snow accumulation. This product was offered to the public in November, 2014, (ii.) Chemical Sensor on a Robotic Platform otherwise known as a Lab-on-a-Robot, to monitor and identify chemical compounds in aqueous and air media. This device was awarded by NASA an STTR phase I in 2012 and an STTR Phase II in 2013 to HJ Science and Technology, Inc., of Santa Clara, California, (iii.) Wireless Baby Vitals Monitor to detect, quantify and display in real time breathing and pulse rates of babies and infants. This device won 1 st place in the $100K Student Technology Venture Competition in 2008. (iv.) Self-Contained Continuous Positive Airway Pressure Mask for sleep apnea disorders. This device also won 1 st place in the $100K Student Technology Venture Competition in 2014. University of Sonora, México 2014 – Present External Professor Graduate Nanotechnology Program Physics Department Collaborating with the Graduate Nanotechnology Program in the Physics Department by imparting formal courses, workshops, seminars and directing or co-directing M.S. and Ph.D. thesis. The activities include hosting graduate students in the MEMS Laboratory in San Antonio to perform research activities associated with their respective thesis work. University of Texas at San Antonio 2007 – 2009 Associate Vice President for Research Development Appointed Vice President of Research Development to promote interdisciplinary research collaborations and facilitate the research proposal submission. Visited and briefed federal agencies and national laboratories (ARO, DARPA, NSF, USDA, DOE, ONR, Oak Ridge) to disseminate UTSA research capabilities, laboratory facilities and faculty interests, and identify funding opportunities; subsequently, organized seminars with representatives from the aforementioned federal funding agencies to actively promote interactions with faculty and researchers. Participated in the streamlining of electronic research proposal submission. Participated in the definition of guidelines for limited-submission research proposals. Responsible for reviewing and updating the guidelines for establishing research Centers and Institutes at UTSA, assessing their required financial support, conducting formal reviews of all organized research units, defining and issuing standardized performance report, coordinating the reporting timelines with the deans and the directors of the centers and institute, staffing an external review committee, specifying the review criteria and preparing individual feedback reports indicating the strengths and weaknesses of each research unit and a recommendation for its future.
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ARTURO A. AYÓN · Established MEMS program at Sony San Antonio. Structured MEMS business development plan including personnel, revenue projections, profit margins, marketing policies
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1
ARTURO A. AYÓN 14506 Snip Street Cell (210) 854-8925
D. Strickland, J. Helffrich, R. Kotha and A. Ayón,
Design of a Mid Infrared Hyperlens,
5th International Congress on Advanced Electromagnetic Materials in Microwaves and Optics,
Barcelona, Spain,
October 10-15, 2011.
Joseph Barrios, Ramakrishna Kotha, Arturo Ayon,
The Fabrication of Metallic Nano Wires Using Electroplating,
XX International Materials Research Congress,
Cancun, Mexico
August 14-19, 2011.
R. Kotha, D. Strickland and A. Ayon,
Multi-dimensional silver nanowires grown in anodic Al2O3 membranes by electroless deposition,
XX International Materials Research Congress,
Cancun, Mexico,
August 14-19, 2011.
D. Strickland, R. Kotha and A. Ayon,
Impedance Matching a Nanostructured Subdiffraction Imaging Lens,
XX International Materials Research Congress,
Cancun, Mexico,
August 14-19, 2011.
Ramakrishna Kotha, Joseph Barrios, and Arturo A Ayon,
Nanowire Fabrication in Porous Alumina Templates Using Electroless Deposition and
Electroplating,
3rd International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems,
Crete Island, Greece, p. 6,
June 26-29, 2011.
Dylan Ginn and Arturo A. Ayon,
Modeling a Monolithic Silicon Carbide Pintle Rocket Injector,
2011 Mathematics and Engineering International Conference,
Honolulu, Hawaii,
June 13-15, 2011.
Ramakrishna Kotha, Diana Strickland, and Arturo A Ayon,
Characterization of Silver nanowire growth in Porous Aluminum Oxide Templates produced employing
Sulphuric Acid, Oxalic Acid and phosphoric Acids, 2011 Mathematics and Engineering International Conference,
Honolulu, Hawaii,
June 13-15, 2011.
18
David Elam, Anastasiia Nemashkalo, Yuri Strzhemechny, Chonglin Chen, Arturo Ayon and
Andrey Chabanov,
Structural and photoluminescence properties of ALD zinc oxide thin films,
2011 Mathematics and Engineering International Conference,
Honolulu, Hawaii,
June 13-15, 2011.
Arturo A. Ayon,
Introduction to Micro and Nanotechnology Workshop,
MEMS Research Laboratory,
San Antonio, TX,
May 30- June 3, 2011.
R. Hackworth, J. Moreira, R. Kotha, R. Maxwell and A. A. Ayon,
Piezoelectric Charging for Smart Fabric Applications,
DTIP 2011, pp. 138-141,
Aix en Provence, France
May 11-13, 2011.
G. Collins, E. Silva, M. Liu, C. Ma, A. Chabanov, A. A. Ayon, and C. L. Chen,
Integration Ferroelectric BaTiO3 on Metallic Ni Tapes for Energy Generation,
DTIP 2011, pp. 72-74,
Aix en Provence, France
May 11-13, 2011.
D. Elam, R. Kotha, A. Ayon, C. Chen and A. Chabanov,
Potential stress mechanisms in ZnO thin films deposited by ALD,
DTIP 2011, pp. 185-186,
Aix en Provence, France
May 11-13, 2011.
R. Hackworth, J. Moreira, R. Kotha, R. Maxwell and A. Ayon,
Piezolectric Charging for Smart Fabric Applications,
2010 Fall Meeting of the Texas Section of the American Physical Society,
San Antonio, TX
October 22-23, 2010.
J. Barrios, M. Cabral, E. Carrilho, C. Garcia and A. Ayon,
Application of Carbon Nanotubes as Working Electrodes for Cyclic Voltammetry & Impedance
Spectroscopy,
2010 Fall Meeting of the Texas Section of the American Physical Society,
San Antonio, TX
October 22-23, 2010.
D. Elam, R. Kotha, A. Ayon and A. Chabanov,
Residual stress in zinc oxide thin films deposited by atomic layer deposition,
2010 Fall Meeting of the Texas Section of the American Physical Society,
San Antonio, TX
October 22-23, 2010.
C. L. do Lago, C. Neves, E. Tavares, G. Minoru, M. Fagundes, T. Garcia, A. A. Ayon and C. D. Garcia,
Integration of Microchips, Capillary Electrophoresis, and Electrochemical Detection with
Robotic Platforms to Perform Remote Chemical Analysis,
17th International Symposium on Capillary Electroseparation Techniques (ITP 2010),
Baltimore, Maryland,
August 29-September 1, 2010.
19
Ramakrishna Kotha, David Elam, Chonglin Chen, Andrey Chabanov, Arturo A Ayon,
Atomic Layer Deposited (ALD) Zinc Oxide Film Characterization for NEMS and MEMS,
DTIP 2010, Proceedings pp. 185-189,
Seville, Spain,
May 5-7, 2010.
R. Moreira, D. Elam, R. Kotha, and A. Ayon
Utilization of Atomic-Layer-Deposition in the Microfabrication and Testing of Dye-Sensitized-Solar-Cells DTIP 2010, Proceedings pp. 182-184,
Seville, Spain,
May 5-7, 2010.
G. Collins, D. Elam, R. Hackworth, R. Kotha, J. Pusateri, A. Ayon, A. Chabanov and C. Chen,
Utilization of Pulsed Laser Deposition (PLD) to produce Low-Temperature Barium Titanate (BTO)
films on Flexible Fabrics.
DTIP 2010, Proceedings pp. 301-304,
Seville, Spain,
May 5-7, 2010.
D. Elam, R. Kotha, R. Hackworth, A. Ayon, C. Chen and A. Chabanov,
Influence of deposition temperature of ZnO thin films for self powered wearable fabrics using ALD
DTIP 2010, Proceedings pp. 305-308,
Seville, Spain,
May 5-7, 2010.
R. Kotha, D. Elam, A. Chabanov and A. A. Ayon,
Phase Shifting Microwave Structure employing Atomic Layer Deposited (ALD) and Ferroelectric Films
on Flexible Substrates, DTIP 2010, Proceedings pp. 232-234,
Seville, Spain,
May 5-7, 2010.
Invited Presentation,
A. A. Ayon, C. Chen, A. Chabanov, D. Elam, R. Kotha, J. Hoy, G. Collins and R. Hackworth
Microstructure Evolution of Atomic Layer Deposited Zinc-Oxide Films,
Symposium on Nanotechnology in Active Materials, pp. 3452-3460,
Honolulu, Hawaii,
March 14-17, 2010
G. Collins, D. Elam, R. Hackworth, R. Kotha, J. Pusateri, A. Ayon, A. Chabanov and C. Chen,
Pulsed Laser Deposition (PLD) Employed in the Fabrication of Low temperature Barium Titanate
(BTO) films on Carbon Fibers,
20th International Conference on Electronics, Communications and Computers,
Cholula, Mexico,
February 22-24, 2010
D. Elam, R. Kotha, R. Hackworth, A. Ayon, C. Chen and A. Chabanov,
Temperature Dependence of ZnO Thin Film Growth and its Application to Self-Powered Fabrics
20th International Conference on Electronics, Communications and Computers,
Cholula, Mexico,
February 22-24, 2010.
20
G. Collins, D. Elam, R. Hackworth, R. Kotha, J. Pusateri, A. Ayon, A. Chabanov and C. Chen,
Low Temperature Fabrication of Barium Titanate (BTO) Films on Carbon Fiber Employing Pulsed
Laser Deposition (PLD),
NanoMex’09,
Ensenada, Mexico,
November 10-11, 2009
R. Kotha, R. Moreira, D. Elam, J. Hoy, H. Ji, C. Garcia, A. Chabanov, CL. Chen, A.A. Ayon,
Characterization of ZnO and Al2O3 Atomic Layer Deposited (ALD) films for Nanoscale Applications,
2009 Villa Conference on Complex Oxide Heterostructures,
Saint Thomas, Virgin Islands,
September 13-18, 2009.
R. Kotha, C. Garcia and A. Ayon,
Characterization of Atomic Layer Deposited (ALD) Al2O3 and ZnO films for nano and micro
Applications,
2009 Nanotech Conference,
Houston, TX,
May 3-7, 2009.
D. C. Valdez, C. Berg, P. Bergeron, M. F. Mora, C. D. Garcia and A. A. Ayon,
Wireless Control of Microchip Capillary Electrophoresis with a Mobile Platform,
Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, pp. 150-152,
Rome, Italy,
April 1-3, 2009.
J. Ficklen, J. Weaver, C. Chen and A. A. Ayon,
High Permittivity Ferroelectric Actuators for Radar Applications,
Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, pp. 412-414,
Rome, Italy,
April, 2009.
Maria F. Mora, Jessica Felhofer, Gabrielle Guy, Carla Giacomelli, Arturo Ayon, and Carlos D. Garcia,
Robots, Chips, and Nanomaterials: Novel Strategies for the Analysis of Biologically Active Compounds, Congreso Internacional de Quimica,
Monterrey, Mexico,
March, 2009.
C. D. Garcia, M. F. Mora, J. Felhofer, G. Guy, C. Giacomelli, J. Wehmeyer, R. Bizios and A. A. Ayon,
Smaller is Better: A Tale about Surfaces and Microfluidics,
XVII Simpósio Brasileiro de Eletroquímica e Eletroanalítica,
Fortaleza, Brasil,
February, 2009.
Carlos D. Garcia, Maria F. Mora, Jessica Felhofer, Gabrielle Guy, Carlos A. Neves, and Arturo Ayon,
Microfluidics and Nanostructured Surfaces,
Latin American Capillary Electrophoresis Meeting
Puerto Vallarta, Mexico,
December, 2008.
C. Neves, A. Ayon and C. Garcia,
LOAR2: A newly designed Integrated System for Remote Chemical Sensing,
Latin American Capillary Electrophoresis Meeting
Puerto Vallarta, Mexico,
December, 2008.
21
D. C. Valdez, C. Berg, P. Bergeron, M. F. Mora, C. D. Garcia, and A. A. Ayon
Wireless Control of Microchip Capillary Electrophoresis with Electrochemical Detection,
Third International Workshop on Multianalyte Biosensing Devices,
Athens, Greece,
September 18-19, 2008.
M. F. Mora, R. Hackworth, R. Kotha, C. E. Giacomelli, C. D. Garcia and A. Ayon,
Combining Surfaces, Enzymes and Microfluidic Structures,
Third International Workshop on Multianalyte Biosensing Devices,
Athens, Greece,
September 18-19, 2008.
Ross Hackworth, Ramakrishna Kotha, Carlos D. Garcia and Arturo A. Ayon,
Enhanced Electrochemical Responses of Glassy Carbon and Gold Electrodes Modified with Gold
Nanoparticles,
34th International Conference on Micro and Nano Engineering, p. 300,
Athens, Greece,
September 15-18, 2008
M. F. Mora, J. Felhofer, G. Guy, J. Wehmeyer, R. Bizios, A. Ayon, and Carlos D. Garcia,
Analysis of Biologically relevant compounds using Microchips, Capillary Electrophoresis and
Biosensors,
50th Annual Rocky Mountain Conference on Analytical Chemistry
Breckenridge, Colorado
July 27-31, 2008.
Arturo A. Ayon,
Nanotechnology: Challenges and opportunities,
Third Nanotechnology Conference,
Lagos de Moreno, Mexico
July 28-30, 2008
C. Garcia, L. Blanes, M. F. Mora, C.L. do Lago and A. Ayon,
Lab-on-a-Chip Biosensor for Glucose Based on a Packed Immobilized Enzyme Reactor,
59th Pittsburgh Conference on Analytical Chemistry and Applied Spectroscopy
New Orleans, Louisiana,
March 1-7, 2008
Maria F. Mora, Jessica Felhofer, Arturo Ayon and Carlos D. Garcia.,
What we can do to improve the Analysis of Phenolic compounds by Microchip Capillary
Electrophoresis?,
Microfluidics and Nanofluidics Conference 2008,
Cancun, Mexico,
February 21-24, 2008.
C. Berg, D. C. Valdez, P. Bergeron, M. F. Mora, C. D. Garcia, and A. Ayon,
Microfluidics Chip with a Reciprocating MEMS Micropumpfor Gaseous Sample Diffusion, Wirelessly
Controlled and Integrated on a Robotic Platform: LAB-ON-A-ROBOT,
Microfluidics and Nanofluidics Conference 2008,
Cancun, Mexico,
February 21-24, 2008.
22
Maria F. Mora, Jessica Felhofer, Karen Scida, Arturo Ayon, Carla Giacomelli, and Carlos D. Garcia,
What can we do to improve the analysis of Phenolic Compounds by Capillary Electrophoresis?
LACE 2007,
Santiago de Chile, Chile,
December 2-5, 2007.
C. Garcia, L. Blanes, M. Mora, C. do Lago and A. Ayon,
Development of Lab-on-a-Chip Biosensor for Glucose Based on a Packed Immobilized Enzyme Reactor,
34th Conference of the Federation of Analytical Chemistry and Spectroscopy Societies (FACSS),
Memphis, Tennessee,
October 14-18, 2007
Madhavi Adusumilli, Arturo Ayon, Paul Cotae,
Wireless Sensor Networks for Health Monitoring,
Wireless Hive Networks Symposium,
Austin, Texas,
August 8, 2007.
M. Adusumilli, A. A. Ayon and P. Cotae,
Continuous Health Monitoring using Wearable Bio-Sensors,
Symposium for Space Applications of Wireless and RFID,
IEEE Galveston Bay Section, Houston, TX May 8-9, 2007.
Mani G, Johnson DM, Marton D, Dougherty V, Feldman M, Patel D, Ayon A, Agrawal CM,
Immobilization of Therapeutics on Metal Surfaces Using Self-Assembled Monolayers,
Transactions of the 32nd Annual Meeting of the Society for Biomaterials, Vol. # 30, Abstract # 4,
Chicago, Illinois,
April 18-21, 2007.
Mani G, Johnson DM, Marton D, Dougherty V, Feldman M, Patel D, Ayon A, Agrawal CM, Stability of Self-Assembled Monolayers on Titanium for Biomedical Applications,
Transactions of the 32nd Annual Meeting of the Society for Biomaterials, Vol. # 30, Abstract # 758,
Chicago, Illinois,
April 18-21, 2007.
Arturo A. Ayon,
Power MEMS: Challenges and Opportunities,
Université Catholique de Louvain
Microelectronics Laboratory (DICE)
Louvain la Neuve, Belgium
March 28, 2007.
Keynote Speaker,
Arturo A. Ayon,
Revolutions in Materials,
Annual Iberoamerican Research and Development Summit
Albuquerque, New Mexico
March 19-21, 2007.
23
Arturo A. Ayon,
MEMS Technology: an Overview
Université Catholique de Louvain, Microelectronics Laboratory (DICE)
Louvain la Neuve, Belgium
September 19, 2006.
R. Kotha and A. A. Ayon,
Modeling of CMOS Compatible MEMS Actuators for Wireless Communications,
2006 Solid State Sensor and Actuator Workshop,
Hilton Head, North Carolina,
June 4-8, 2006.
Arturo A. Ayon,
Influence of Fringe Capacitance on RF-MEMS Devices,
U.S. Army Research Laboratory - RF Micro Devices Branch,
Adelphi, Maryland,
May 31, 2006.
Arturo A. Ayon,
Tailoring Boundary Conditions on MEMS Actuators,
U.S. Army Research Laboratory - Materials and Ceramics Laboratory,
Aberdeen Proving Ground, Maryland
May 30, 2006.
Transactions of the 31st Annual Meeting of the Society for Biomaterials,
Biomaterials 2006 Annual Meeting and Exposition,
Pittsburgh, Pennsylvania,
April 26-29, 2006.
(1.) G. Mani, D. M. Johnson, D. Marton, A. Mahapatro, M. Feldman, D. Patel, A. Ayon, and C.
M. Agrawal,
Stability of Therapeutic Self Assembled Monolayers during Drug loading and in-vitro
Drug Delivery,
Vol. # 29, Abstract # 327,
(2.) A. A. Ayon, C. M. Agrawal, K. Chava, M. D. Feldman, D. M. Johnson and D. Patel,
Utilization of Nanoporous Titanium Dioxide Films on Drug-Eluting Stents,
Vol. # 29, Abstract # 331,
(3.) A. A. Ayon, C. M. Agrawal, M. Cantu, M. D. Feldman, D. M. Johnson, D. Marton, D. Patel
and E. Shi,
Characterization of Nanoporous Titanium Dioxide Films for Biomedical Applications,
Vol. # 29, Abstract # 329,
(4.) G. Mani, D. M. Johnson, D. Marton, A. Mahapatro, M. Feldman, D. Patel, A. Ayon, and C.
M. Agrawal,
Drug Elution Using Therapeutic Self Assembled Monolayers,
Vol. # 29, Abstract # 307,
(5.) A. Mahapatro, D. M. Johnson, D. N. Patel, M. D. Feldman, A. A. Ayon and C. M. Agrawal,
Oxidative and In-vitro Stability of Alkanethiol Self Assembled Monolayers on
316L Stainless Steel,
Vol. # 29, Abstract # 94,
(6.) A. Mahapatro, D. M. Johnson, D. N. Patel, M. D. Feldman, A. A. Ayon, C. M. Agrawal,
Nanosized Therapeutic Self Assembled Monolayers (T-SAMs) on 316L Stainless Steel,
Vol. # 29, Abstract # 306,
24
K. Chava, A. A. Ayon, C. M. Agrawal, K., M. D. Feldman, D. M. Johnson and D. Patel,
Utilization of Mesoporous Metal Oxide Films on Medical Implants,
IEEE Region 5 Conference,
San Antonio, Texas
April 7-8, 2006.
M. Cantu , A. A. Ayon, C. M. Agrawal, M. D. Feldman, D. M. Johnson, D. Marton, D. Patel and E. Shi,
Characterization of Mesoporous Metal Oxide Films for Medical Implants IEEE Region 5 Conference,
San Antonio, Texas
April 7-8, 2006.
R. Kotha and A. A. Ayon,
Advanced MEMS Actuators for Wireless Communications,
IEEE R5 Conference,
San Antonio, Texas,
April 7-8, 2006.
A. Mahapatro, D. M. Johnson, G. Mani, D. N. Patel, M. D. Feldman, A. A. Ayon and C. M. Agrawal,
Preparation and Characterization of Functional Self Assembled Monolayers) on 316L stainless steel,
230th ACS National Meeting,
Washington, D.C.,
August 28th-September 1st, 2005.
Arturo A. Ayon,
MEMS Technology Transition: from Research to Commercialization,
2005 Nanobiotech Summit,
San Marcos, Texas,
April 1, 2005.
Arturo A. Ayon,
MEMS Technology: an Overview,
2nd Iberoamerican Conference,
Veracruz, Mexico,
March 7-8, 2005.
A. A. Ayon,
MEMS Technology: an Overview
BioMEMS International Symposium
Monterrey, Mexico,
March 5-6, 2005.
Arturo A. Ayon,
An introduction to MEMS devices and the new MEMS laboratory at UTSA,
Trinity University,
San Antonio, Texas,
February 17, 2005.
Arturo A. Ayon,
MEMS and NEMS Technology Applications: Challenges and Opportunities,
Brooks-City Base,
San Antonio, Texas,
June 17, 2004.
25
Arturo A. Ayon,
MEMS: An Overview,
Instituto Tecnologico de Piedras Negras,
Piedras Negras, Mexico,
April 28, 2004.
Arturo A. Ayon,
Including a Manufacturing Partner in your MEMS Business Model,
Wireless Integrated Microsystems Laboratory,
University of Michigan,
Ann Arbor, Michigan,
April 1, 2003.
Arturo A. Ayon,
Panelist, Trends in Technology,
Technology Advocates of San Antonio Conference,
San Antonio, Texas,
March 19, 2003.
Arturo A. Ayon,
Bulk MicroMachining and Wafer Bonding: Enabling Technologies for MEMS and NEMS,
Workshop sponsored by the US-Mexico Foundation for Science,
San Antonio, Texas,
March 13-14, 2003.
Arturo A. Ayon,
Micro and Nano Electromechanical Systems Tutorial,
Fall Meeting of the Materials Research Society,
Symposium on NEMS, MEMS and Molecular Machines,
Boston, Massachusetts,
December 2-6, 2002.
Arturo A. Ayon,
Panelist, New Directions in Sensing: Where will MEMS Sensors take us?
Commercialization of Micro and Nano Systems Conference (COMS’02),
Ypsilanti, Michigan,
September 8-12, 2002.
Arturo A. Ayon,
Multilayered Structures for MEMS Applications,
NASA Electronics Parts and Packaging Program,
Johnson Space Center,
Houston, Texas
April 30, 2002.
X. Zhang, A. Mehra, A. A. Ayón and I. Waitz,
Development of Polysilicon Igniters and Temperature Sensors for a Micro Gas Turbine Engine
MEMS’02, pp. 280-283,
Las Vegas, Nevada,
January 20-24, 2002.
A. A. Ayón, X. Zhang, K. Turner, D. Choi, B. Miller, S. Nagle and S. M. Spearing,
Low Temperature Silicon Wafer Bonding for MEMS Applications,
MEMS’02, pp. 407-410,
Las Vegas, Nevada,
January 20-24, 2002.
26
N. Miki, X. Zhang, R. Khanna, A. A. Ayón, D. Ward, and S. M. Spearing,
A Study of Multi-Stack Silicon-Direct Wafer Bonding for MEMS Manufacturing,
MEMS’02, pp. 411-414,
Las Vegas, Nevada,
January 20-24, 2002.
Arturo A. Ayon,
MEMS Technology Applications in the Consumer Market: Challenges and Opportunities,
Sony Research Forum,
Tokyo, Japan,
December 14, 2001.
Arturo A. Ayon,
MEMS Tutorial,
Symposium on Materials Science of MicroElectroMechanical Systems IV (MEMS),
Fall Meeting of the Materials Research Society,
Boston, Massachusetts,
November 26 – November 28, 2001.
X. Zhang, A. Mehra, A. A. Ayón and I. Waitz
Development of Polysilicon Materials for Igniters and Temperature Sensors in a Micro Gas Turbine
Engine,
Fall Meeting of the Materials Research Society,
Boston, Massachusetts,
November 26 - December 1, 2001.
Arturo A. Ayon,
Multilayered Structures for MEMS Applications
Karta Technologies,
San Antonio, Texas,
November 1, 2001.
A. A. Ayón,
Multilayered Ceramics Structures for Power MEMS Applications.
Gordon Research Conference,
Solid State Studies in Ceramics,
Meridien, New Hampshire,
August 12-17, 2001.
S. Sullivan, X. Zhang, A. A. Ayón and J. G. Brisson,
Demonstration of a Microscale Heat Exchanger for a Silicon Micro Gas Turbine Engine,
Transducers’01, Eurosensors XV, pp. 1606-1609,
Munich, Germany,
June 10-14, 2001.
Arturo A. Ayon,
Deep Reactive Ion Etching and Wafer Bonding for MEMS applications.
SRI International
Menlo Park, California,
May 11, 2001.
Deep Reactive Ion Etching for MEMS applications.
Northern California Chapter of the American Vacuum Society,
Plasma Etch Users Group,
Santa Clara, California,
May 10, 2001.
27
Deep Reactive Ion Etching and Wafer Bonding for MEMS applications.
Center for Applied Microtechnology,
Department of Electrical Engineering, University of Washington,
Seattle, Washington,
February 15, 2001.
MEMS Tutorial
Symposium on Materials Science of MicroElectroMechanical Systems III (MEMS),
Fall Meeting of the Materials Research Society,
Boston, Massachusetts,
November 26 – December 1, 2000.
K. T. Turner, A. A. Ayón, D. Choi, B. Miller and S. M. Spearing,
Characterization of Silicon Fusion Bonds Using Four-Point Bend Specimen,
Fall Meeting of the Materials Research Society,
Boston, Massachusetts,
November 26 – December 1, 2000.
Materials Science of Microelectromechanical Systems (MEMS) Devices,
Volume 657, pp. EE 6.3.1 - EE 6.3.6, 2001.
A. A. Ayón, J. Protz, R. Khanna, X. Zhang and A. Epstein,
Application of Deep Silicon Etching and Wafer Bonding in the MicroManufacturing of
Turbochargers and Micro Gas Turbine Engines,
47th International Symposium of the American Vacuum Society,
Boston, Massachusetts,
October 2-6, 2000.
A. P. London, A. H. Epstein, A. A. Ayón, S. M. Spearing, T. Harrison and J. L. Kerrebrock,
A Microfabricated High Pressure Bipropellant Rocket Engine,
14th European Conference on Solid-State Transducers (Eurosensors XIV), pp. 367-368,
Copenhagen, Denmark,
August 27-30, 2000.
A. A. Ayón, X. Zhang and R. Khanna,
Ultra Deep Anisotropic Silicon Trenches Using Deep Reactive Ion Etching (DRIE),
Technical Digest of 2000 Solid State Sensors and Actuator Workshop, pp. 339 - 342,
Hilton Head, South Carolina,
June 2000.
X. Zhang, K.-S. Chen, R. Ghodssi, A. A. Ayón and S. M. Spearing,
Residual Stress Characterization of Thick PECVD TEOS Film for Power MEMS Applications,
Technical Digest of 2000 Solid State Sensors and Actuator Workshop, pp. 316 - 319,
Hilton Head, South Carolina,
June 2000.
A. A. Ayón, D.-Z. Chen, R. A. Braff, R. Khanna, H. H. Sawin and M. A. Schmidt,
A novel Integrated Process Using Fluorocarbon Films Deposited with a Deep Reactive Ion Etching
(DRIE) tool,
Fall Meeting of the Materials Research Society,
Boston, Massachusetts,
November 29 - December 3, 1999,
Materials Science of Microelectromechanical Systems (MEMS) Devices II,
Volume 605, pp. 141-147, 2000.
28
K. Ishihara, C.-F. Yung, A. A. Ayón and M. A. Schmidt,
An Inertial Sensor Technology using DRIE and Wafer Bonding with Enhanced Interconnect Capability,
Proceedings of Transducers’99, pp. 254 – 257,
Sendai, Japan,
June 1999.
R. Ghodssi, L. G. Frechette, S. Nagle, X. Zhang, A. A. Ayon, S. D. Senturia and M. A. Schmidt,
Thick Buried oxide in Silicon (TBOS): An Integrated Fabrication Technology for Multi-Stack Wafer
Bonded MEMS Processes,
Proceedings of Transducers’99, pp. 1456 – 1459,
Sendai, Japan,
June 1999.
A. A. Ayón, A. Epstein, L. Frechette, S. Nagle and M. A. Schmidt,
Tailoring and Controlling Etch Directionality in a Deep Reactive Ion Etching Tool,
Proceedings of Transducers’99, pp. 854 - 857,
Sendai, Japan,
June 1999.
C.-C. Lin, A. A. Ayón, R. Ghodssi, D.-Z. Chen, S. Jacobson, K. Breuer, A. Epstein and M. A. Schmidt,
Fabrication and Characterization of a Micro Turbine/Bearing Rig,
IEEE International MEMS’99, pp. 529-533,
Orlando, Florida,
January 17-21, 1999.
K. A. Lohner, K.-S. Chen, A. A. Ayón and S. M. Spearing,