Introduction to MEMS and MEMS Fabrication Gisela Lin, Ph.D. Department of Biomedical Engineering University of California, Irvine ASME BioMEMS Technology Seminar Los Angeles, CA, May 19, 2003 Outline Introduction to MEMS − General description − Application areas − Market analysis IC fabrication techniques MEMS fabrication techniques − Bulk micromachining − Surface micromachining Conclusion
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Introduction to MEMS and MEMS Fabricationcse.secs.oakland.edu/hanna/cse495-595SU06/Lectures/GLin1_Introduction.pdf · Introduction to MEMS and MEMS Fabrication Gisela Lin, Ph.D. Department
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ASME BioMEMS Technology Seminar (PD 437) May 19, 2003
Introduction to MEMS and MEMS Fabrication
Gisela Lin, Ph.D.Department of Biomedical Engineering
University of California, Irvine
ASME BioMEMS Technology SeminarLos Angeles, CA, May 19, 2003
OutlineIntroduction to MEMS−General description−Application areas−Market analysis
IC fabrication techniquesMEMS fabrication techniques−Bulk micromachining−Surface micromachining
Conclusion
ASME BioMEMS Technology Seminar (PD 437) May 19, 2003
What are MEMS? MEMS = Micro Electro Mechanical SystemsUses integrated circuit fabrication techniques to make mechanical as well as electrical components on a single chip.Small size ⇒ 1µm – 1mmTypically a batch fabrication process. 99% of the cost is required to make one, the other million are free!
What is Micromachining?“Micromachining” is the fabrication process by which MEMS are realized – Transistors, electrical components, mechanical structures, …– Differs from standard IC processing in fundamental ways.
Easily extended to produce complex systems– Chips, memory, microprocessor, microactuator arrays, …– Sensors + actuators + fluidics + integrated circuits + …– Micro Systems Technology (MST)
ASME BioMEMS Technology Seminar (PD 437) May 19, 2003
Why MEMS?
50µm wide,3 cm long microchannels(U. Cincinnati)
Bottom line: Save time and money
Portability (small size) Faster resultsSensitivitySurface qualityPrecise position control Low powerReproducibilityReliabilityLow costHigher throughput, parallel processing
Early Micro & Nanotech Vision
Richard P. Feynman1918 – 1988
1965 Physics Nobel Laureate
“There’s Plenty of Room at the Bottom”
December 29, 1959 - Dr. Richard Feynman first pointed out the potential of MEMS-type technology in the above seminal lecture presented to the American Physical Society at the California Institute of Technology (Caltech).
He suggested several revolutionary technologies:− Miniaturized computers− Data storage systems− Electronic components− Tiny robotic machine tools
Lecture transcript available online courtesy of Zyvex Corporation:www.zyvex.com/nanotech/feynman.html
ASME BioMEMS Technology Seminar (PD 437) May 19, 2003
Events Since Then …Feynman’s vision was realized quickly in the semiconductor industry (electronics).
Only in the last 25 years has much effort been devoted to making tiny mechanical parts.
Important early MEMS products:Automotive pressure sensor (Motorola, 1980s)Digital micromirror (Texas Instruments, mid-1990s)Airbag sensor (Analog Devices, 1993)
(Sandia National Labs)
How large are MEMS?1 m1 mm1 µm1 nm
Wafer (10 cm)
Chip (~1 cm)
Virus (~10 nm)
Transistor(~1 µm)
Molecules(~1 nm)
Hair(~100 µm)
Cells (~10 µm)
Most MEMS(1 µm - 1 mm)
ASME BioMEMS Technology Seminar (PD 437) May 19, 2003
Scalability of Micromachining
Individual Components
Entire Systems(Chips, Die)
Produced many at a time (wafers)
What Can MEMS Do?Sense and Act on its Environment!!
- fast: 250,000 RPM go far: >1 mm strong: >1 mN- actuating: by electric, magnetic, thermal, … forces- sensing: acceleration, pressure, flow rate, etc...
NovaSensor (TRW)
Pressure Sensor
Sandia National Labs
ElectrostaticMicroactuator
ASME BioMEMS Technology Seminar (PD 437) May 19, 2003
What Else Can MEMS Do?Re-direct and process lightRe-direct and process fluidsCan be wirelessCombined with VLSI, MEMS can miniaturize entire systems!
Micro-fluidic mixerBSAC
Free-space micro-optical bench (UCLA)
General Application Areas
ASME BioMEMS Technology Seminar (PD 437) May 19, 2003