2010 Metro Area MEMS/NEMS Workshop: … Metro Area MEMS/NEMS Workshop: NanoManufacturing Location ... - Towards An Autonomous MEMS Scale Vibration Energy Harvesting ... Stevens Instiute

2010 Metro Area MEMS/NEMS

Workshop: NanoManufacturing

Location: Babbio Center (B122), Stevens Institute of Technology Date: Monday, July 26, 2010

Micro Electro Mechanical Systems (MEMS) and Nano Electro Mechanical Systems (NEMS) are miniature systems integrating electrical, mechanical, optical, chemical and/or biological components that are fabricated via integrated circuit or other related manufacturing techniques. To realize the full potential of this emerging field, advances in NanoManufacturing across a wide variety of disciplines will be necessary to enable reliable, repeatable, and scalable manufacturing at the nanoscale to facilitate the transfer of research results in nanoscience and nanotechnology to industrial applications. Research in and applications of MEMS/NEMS and their associated Nanomanufacturing technologies will shape the basis for the creation of technologies that will impact diverse areas such as information technology, biomedical technology, energy, transportation, robotics, manufacturing, deep space studies, and national security. The workshop will be held to facilitate communication and collaboration among researchers in the NYC metro area.

Organizing Committee EH Yang, Stevens Institute of Technology [Chair] Ron Besser, Frank Fisher, Chang-Hwan Choi, Yong Shi, David Cappelleri, Kishore Pochiraju (Stevens), Jeffrey Zhan (Rutgers), Winston Soboyejo (Princeton), Boris Khusid (NJIT), Hongwei Sun (UMass-Lowell), Ioana Voiculescu (CCNY), Qiao Lin, Daniel Attinger (Columbia), Brian DeFranco (ARDEC)

Workshop Advisory Group

• Souran Manoochehri, Professor, ME Department, Stevens • Henry Du, Director, CEMS Department, Stevens • Michael Bruno, Dean, Schaefer School of Engineering & Science, Stevens • Christos Christodoulatos, Associate Provost for Academic Entrepreneurship, Stevens • George Korfiatis, Provost and University Vice President, Stevens

Workshop Sponsors

• Charles V. Schaefer, Jr. School of Engineering & Science, Stevens Inst. of Technology

• Stevens Nanotechnology Graduate Program (http:/www.stevens.edu/nano) Workshop website: http://www.stevens.edu/mdl/workshop2010.html

www.stevens.edu/nano

2010 Metro Area MEMS/NEMS

Workshop: NanoManufacturing

Location: Babbio Center (B122), Stevens Institute of Technology Date: Monday, July 26, 2010

Program Schedule

8:00-9:00 am Registration, Poster Setup, and Poster Session Preview 9:00-9:15 am Introduction, Dr. George Korfiatis, Interim President, Stevens Institute of

Technology 9:15-10:45 am Session I (Chair: Prof. Boris Khusid, NJIT)

- A Controllable, Long Shelf Life Micro Battery Architecture Based on Hydrophobic, Lypophobic and Micro-

Fluidic Properties, Victor Lifton, Chief Scientist, mPhase Technologies, Inc.

- Low Voltage Actuation of Droplet upon PPy Reduction and Oxidation, Yao-Tsan Tsai (Stevens)

- On-Chip Microfluidics for Advanced Functionalization and Operation of Microelectrode Arrays, Isabel

Burdallo (NJIT)

- AC Electrokinetics in Microfluidics for Lab-on-a-Chip Applications, Sarah Du (Stevens)

- Label-Free Characterization of Temperature Dependent Biomolecular Binding by MALDI-TOF Mass Spectrometry, Dr. Thai Huu Nguyen (Columbia)

- Nanomanufacturing Using Lean Six Sigma Principles, Dhruv Sakalley (Drexel)

10:45-11:15am Break (Posters available for viewing) 11:15-12:30 pm Session II (Chair: Prof. Frank Fisher, Stevens)

- Wafer-Scale Fabrication of Metallic Nanostructures on Transparent Substrates, Ke Du (Stevens)

- Electrodeless Electro-hydrodynamic Printing of Personalized Unit Dosages, Ezinwa Elele (NJIT)

- The Nanoaquarium: A Platform For in situ Transmission Electron Microscopy of Processes in Liquid Media,

Joseph Grogan (Penn)

- Biologically-Inspired Robotic Microswimmers, U Cheang (Drexel)

- Towards An Autonomous MEMS Scale Vibration Energy Harvesting Device with Self Resonance

Frequency Tunability, Vinod Challa (Stevens)

12:30-1:30 pm Lunch 1:30-2:00 pm Poster Session, Networking 2:00-4:30 pm Keynote Session (Dr. George Hazelrigg, Deputy Director of CMMI, NSF) 4:30-4:45 pm Closing Remarks (Dr. Costas Chassapis, Deputy Dean, School of Eng. &

Science, Stevens) 4:45 pm Poster Session, Networking, Lab Tours Available

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Abstracts for oral presentations

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1.1. A CONTROLLABLE, LONG SHELF LIFE MICRO BATTERY

ARCHITECTURE BASED ON HYDROPHOBIC, LYPOPHOBIC AND

MICRO-FLUIDIC PROPERTIES

Victor Lifton, Steve Simon

mPhase Technologies, Inc.

Contact Information:[email protected]

This talk will describe how our technical team has developed a novel reserve micro battery

architecture based on MEMS processing techniques that mimics one of the observed surface

interactions of superhydrophobic properties in structures such as the lotus leaf’s ability to repel

water, and extends the design to also repel very low surface tension organic liquid

electrolytes. This micro/nano structured MEMS silicon surface can be made tunable using

electrowetting techniques, to design a new class of power storage devices having very long shelf

life capabilities.

Keywords: MEMS, superhydrophobic, superlyophobic, battery, lithium

1.2. LOW VOLTAGE ACTUATION OF DROPLET UPON PPY

REDUCTION AND OXIDATION

Yao-Tsan Tsai, Ning Gao, Chang-Hwan Choi, Eui-Hyeok Yang,

Stevens Institute of Technology!

Contact Information: [email protected]

Conjugated polymers experience a change in their mechanical and electrical properties when

“doped” (i.e., undergo reduction and oxidization reactions). The surface state of polypyrrole

(PPy) can be switched from hydrophilic to hydrophobic due to re-orientation of its surfactant

dopant molecules, dodecylbenzenesulfonate (DBS). A tunable wetting of conjugated polymers is

proposed to be used as a novel interlayer material for manipulating droplets at low voltages (-

0.9V to 0.6V). The shape of an organic fluid droplet can be manipulated on a DBS doped PPy

upon electrochemical reactions. On the contrary to the conventional understanding that large

contact angle change enables droplet manipulation due to the Laplace pressure, the movement of

liquid-liquid contact line dominates the droplet deformation. Marangoni effect, i.e. a surface

tension gradient induced upon PPy redox enables a gradient force on the liquid-solid interface is

proposed to enable the droplet manipulation, which is envisioned to trigger droplet movement at

low voltage for lab-on-a-chip applications.

! ! !

1.3. ON-CHIP MICROFLUIDICS FOR ADVANCED

FUNCTIONALIZATION AND OPERATION OF MICROELECTRODE

ARRAYS

Isabel Burdallo1,2

, Anil Shrirao1, Antoni Baldi

2, Cecilia Jimenez-Jorquera

2, Raquel Perez-

Castillejos1

1ECE, NJIT

2CNM, Spain


We describe the fabrication and use of an on-chip microfluidic structure that provides

individual access to each one of the microelectrodes in an array. The pot ential of having several

sensing elements integrated to a single platform (i.e., array) is oftentimes limited by the inability

to expose each sensing element to a different set of solutions. The microfluidic system that we

present here provides individualized control over the liquid environment of each sensing

elements in the array. As a demonstrator of the synergy of combining microfluidics and arrays of

integrated sensors, we describe the use of a microfluidic system for functionalizing

independently each of the two microelectrodes in an array.

Keywords: microfluidics, hybrid device, microelectrode, microamperometer

1.4. AC ELECTROKINETICS IN MICROFLUIDICS FOR LAB-ON-A-

CHIP APPLICATIONS

Sarah E Du, Souran Manoochehri

Stevens Instiute of Technology


Lab-on-a-Chip (LOC) technologies can be utilized in various laboratory operations and have

shown great potential in chemical, biologic al, clinical, and pharmaceutical applications. A

general operation platform would benefit LOC technologies significantly, allowing the user to

focus on specific application protocols rather than the design and operation of microfluidic

systems. A concept of AC electrokinetically driven microfluidic platform is proposed to serve as

the most fundamental layer for LOC applications which is capable in essential operations

including transport, mixing and separation. The electrokinetic actuation method rivals other

actuation mechanisms such as mechanical systems for its simple fabrication, high degrees of

parallelization and integration, and capabilities of multi-purpose manipulation of microfluids and

micro/nano-particles. A novel design of microgrooved configuration is utilized for AC

electrokinetic transport and pumping of microfluids with different ion concentrations. A hybrid

mixer consisting of both passive geometrical elements and active electric actuation is developed

for efficient mixing in microchannels. Finally, based the experimental observations and

theoretical analysis of coupling effects of viscous drag and dielectrophoresis on particle motions,

a concept of electrohydrodynamic flow mediated dielectrophoretic separator is proposed and

evaluated theoretically and numerically.

! ! !

1.5. LABEL-FREE CHARACTERIZATION OF TEMPERATURE

DEPENDENT BIOMOLECULAR BINDING BY MALDI-TOF MASS

SPECTROMETRY

Thai Huu Nguyen, Renjun Pei, Milan Stojanovic, Qiao Lin

Columbia University


We present a microfluidic approach to characterizing temperature-dependent biomolecular

interactions. Solvated L-arginine vasopressin (AVP) and its immobilized RNA aptamer

(spiegelmer) were allowed to achieve equilibrium binding in a microchip at a series of selected

temperatures. Unbound AVP were collected and analyzed with matrix-assisted laser

desorption/ionization mass spectrometry (MALDI-MS), yielding melting curves that reveal

highly temperature-dependent zones in which affinity binding (36-45 °C) or dissociation (25-

33 °C and 50-65 °C) occurs. Additionally, temperature-dependent binding isotherms, from which

thermodynamic quantities involved in binding, were extracted. The results illustrated a strong

change in heat capacity of interaction for this system, suggesting a considerable thermodyna mic

influence controlling vasopressin-spiegelmer interaction.

!

keywords Label-Free, Aptamer, Reversible Binding, MALDI-TOF MS, Microfluidic

1.6. NANOMANUFACTURING USING LEAN SIX SIGMA PRINCIPLES

Dhruv Sakalley, Michael G. Mauk, Vladimir E. Genis, James Hagarman, Yuri Gogotsi

Drexel University


We are developing experimental designs and protocols to apply Lean Six Sigma Statistical

Process Control (SPC) and Quality Assurance methodologies to bench-scale processes for

making nanomaterials and nanodevices. Under an NSF-sponsored Course Curriculum

Laboratory Improvement (CCLI) grant, nanotechnology experiments have been adapted to

simulate manufacturing processes for which students can apply statistical analysis, Process

Capability and Value-Added Analysis, Quality Function Deployment (QFD), Design of

Experiments (DOE) and Taguchi methods, Robust Parameter and Tolerance Design, and

Response Surface Methodology. The experiments include synthesis of CdSe quantum dots,

template-controlled electrodeposition of magnetic nickel nanowires, organic light-emitting

diodes, and dye-sensitized nanocrystalline TiO2 solar cells. We use digital photography and

image processing to assess materials and device performance, and generate data sets suitable for

Six Sigma methodologies. This laboratory-based course will introduce students to the challenges

of nano-manufacturing, machine vision and image processing as tools for quality assurance, and

Six Sigma approaches to nano-manufacturing. Lean manufacturing principles (e.g., waste

reduction, low-volume, high-mix production) are incorporated into the laboratory.

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2.1. WAFER-SCALE FABRICATION OF METALLIC

NANOSTRUCTURES ON TRANSPARENT SUBSTRATES

Ke Du, Ishan Wathuthanthri, Weidong Mao, Chang-Hwan Choi

Stevens Institute of Technology


In this presentation, we will show our recent progress in fabricating wafer-scale metallic

nanostructures (Ti and Al) on transparent substrates. High aspect ratio photoresist patterns have

been fabricated by using interference lithography and the photoresist patterns can be transferred

onto metal films with transparent substrates (PDMS and glass) by using soft lithography

technique. Metal line patterns, pore patterns and dot patterns can all be fabricated by using the

proposed technique. Compared with other top-down fabrication techniques, the proposed

technique has the advantages as low cost and easiness in fabrication steps. Metal nanostructures

fabricated by this technique could be further used in imprinting lithography, surface enhanced

Raman Scattering (SERS) and other plasmonic applications.

Keywords: Metallic nanostructures, photoresist, interference lithography, soft lithography

2.2. ELECTRODELESS ELECTRO-HYDRODYNAMIC PRINTING OF

PERSONALIZED UNIT DOSAGES

Ezinwa Elele, Yueyang Shen, Boris Khusid

New Jersey Institute of Technology


The need for small scale manufacturing of personalized treatments have been reinforced by

compelling evidence that substantial variability in drug efficacy in individuals depends on their

genetic map. Current pharmaceutical technologies are unable to meet this need since most

process are typically planned to target large population. A favorable and economical method of

small scale manufacturing of tailored therapeutic is found in Drop-on-demand (DOD) printing

which is widely used in graphic arts printing, electronics, biotechnology and micromachining.

However, the diverse physical properties encountered in pharmaceutical formulations poses an

impediment to the use of DOD for manufacturing of personalized treatments. The proposed

electro-hydrodynamic DOD printing method overcomes this critical challenge and uses a short

electrical pulse of an alternating voltage to precisely deposit a customized pendant drop formed

at a nozzle exit onto a porous or non por ous edible substrate. The latitude and ease in the

deposition of drops of different physical properties makes it attractive for small scale

manufacturing of personalized treatment and in other applications where precise deposition of

drops is required.

! ! !

2.3. THE NANOAQUARIUM: A PLATFORM FOR IN SITU

TRANSMISSION ELECTRON MICROSCOPY OF PROCESSES IN

LIQUID MEDIA

Joseph Grogan and Haim H. Bau

Department of Mechanical Engineering and Applied Mechanics

University of Pennsylvania


Transmission electron microscopes (TEMs) and scanning transmission electron microscopes

(STEMs) are among the most powerful nanoscale imaging tools available to the scientific

community today, producing detailed images with resolution in the nanometer or even sub-

nanometer range. These high resolution imaging tools, however, cannot readily be used to

observe dynamical processes occurring in liquid media without addressing two experimental

hurdles: sample thickness and sample evaporation in the high vacuum microscope chamber.

There are many processes, such as colloidal crystal formation, aggregat ion, nanowire growth,

electrochemical deposition, and biological interactions, whose understanding would benefit

greatly from real-time, direct imaging with a TEM/STEM. We have developed a liquid cell

TEM/STEM device, dubbed the nanoaquarium, consisting of a hermetically-sealed, 100 nm tall,

liquid-filled chamber sandwiched between two freestanding, 50 nm thick silicon nitride

membranes. Embedded electrodes are integrated into the device for sensing and actuation. Our

fabrication approach, based on direct wafer bonding, affords thinner cross-sections than in any

previously reported devices and thus enables improved contrast and resolution. Additionally, our

fabrication approach allows for high-yield mass production of devices. Direct observation of

dynamical processes in the nanoaquarium, such as diffusion limited aggregation of gold

nanoparticles, demonstrate useful preliminary results.

! ! !

2.4. BIOLOGICALLY-INSPIRED ROBOTIC MICROSWIMMERS

U Kei Cheang, Dheeraj Roy, Jun Hee Lee, Min Jun Kim

Mechanical Engineering and Mechanics Department, Drexel University


A biomimetic microswimmer has been fabricated and controlled in a low Reynolds number

fluidic environment. The device utilizes flagellar filaments isolated from Salmonella

typhimurium to mimic the naturally occurring propulsion mechanism of bacteria. The

microswimmer included a micro-scale polystyrene bead conjugated to a nano-scale magnetic

bead via a flagellar filament using avidin-biotin linkages. The flagella served two purposes; first,

as a fluidic actuator for device propulsion and, second, as a coupler for the polystyrene beadm

which represents a drug filled vesicle or polymeric encapsulation. The propulsion energy was

supplied by an external rotating magnetic field generated by a set of electromagnetic coils

designed in an approximate Helmholtz configuration. In conjunction with a LabVIEW interface,

a DAQ controller was used to generate an AC current output from the power supply to the

electromagnetic coils and generate a rotating magnetic field. A high-speed camera provided real-

time imaging of the microswimmer motion in a static fluidic environment. Numerical analysis

was performed to develop a simulation of the magnetic control system and the microswimmer

under a simulated magnetic field. The robotic microswimmers exhibited active propulsion in

two-dimensional magnetic fields, which demonstrates the possibility for future biomedical

applications, such as drug delivery.

2.5. TOWARDS AN AUTONOMOUS MEMS SCALE VIBRATION

ENERGY HARVESTING DEVICE WITH RESONANCE FREQUENCY

TUNABILITY

Vinod Challa, M. G. Prasad, Frank T. Fisher

Department of Mechanical Engineering, Stevens Institute of Technology


Vibration energy harvesting seeks to convert kinetic energy existent in mechanical vibrations

to small but useful levels of electrical energy to power wireless sensors and ultra low power

devices. Increases in power density and wide frequency range operability of these devices are

necessary for the future deployment of this technology. In this regard, MEMS scale device

development and frequency tunability is being widely pursued as a means to provide efficient

powering of the devices in a manner easily integrated as an on-chip power source for MEMS

sensors. In this work, an effort towards the development of a MEMS scale vibration energy

harvesting device is presented. Included within the design is resonance frequency tunability,

which allows the device to be tuned to various source frequencies in the tunable bandwidth. Here

magnetic force resonance frequency tuning technique is employed to induce the desired amount

of additional stiffness; the mode of the magnetic force (attractive, repulsive) would allow the

device to be tuned to lower and higher source frequencies with respect to the untuned natural

frequency of the device. Apart from development of a MEMS scale prototype device, ongoing

efforts to incorporate autonomous selftunability will be presented.

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Abstracts for poster sessions

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HEAT AND PRESSURE ASSISTED ELECTROSTATIC DEPOSITION OF

GRAPHENE

Christina Alecci, Joseph Katigbak, Johanna Heureaux, and E.H. Yang



Our research involves anodic bonding-based graphene synthesis. Anodic Bonding is a

industrial process used to chemically bind two surfaces together through intimate contact brought

about by and intense electric field, heat and pressure. Typically, graphene is made by methods

such as mechanical exfoliation, but we are optimizing graphene yields per wafer by using the

anodic bonding method. We are further developing the anodic bonding process to produce

graphene on SiO2 wafers and pyrex by varying the amount of heat, pressure and voltage. The

fabricated samples are scanned using an optical microscope. After all of the graphene pieces are

found, Raman Spectroscopy is used to determine how many graphene flakes are monolayer.

Graphene has immense commercial value. Researchers hope to use graphene in replace of silicon

making flexible electronics, touch screens and sensors.

!

Keywords: anodic bonding, graphene, raman spectroscopy, exfoliation

CHARACTERIZATION OF ENDOTHELIAL CELLS USING

ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY

S. M. Arifuzzaman1, Fei Liu

1, A. N. Nordin

2, D. Spray

3, I. Voiculescu

1

1City College of New York

2Kulliyyah of Engineering IIUM

3Kennedy Center Albert Einstein College of Medicine


Electric cell-substrate impedance sensing (ECIS) is a non-destructive electrical approach to

monitor integrity of cell-cell and cell-substrate adhesion in living cells in vitro and in real time.

The ECIS approach uses cells that are grown on planar gold electrodes fabricated on the surface

of culture wells. The electrical impedance between the electrodes is measured and recorded for a

frequency range as a function of time. As cells grow on the electrodes the insulating properties of

the cells can be detected, since the cells contribute with additional resistance to the circuit. The

impedance incre ases with increasing cell density and reaches equilibrium when the cells are

confluent. The ECIS signal is extremely sensitive to the cell attachment on the electrodes,

chemical, biological and physical challenges. Thus, the ECIS signal can be used as a real time in

vitro bioanalytical measure of the cell behavior. In this paper we report on the electrical

impedance spectroscopy characterization of endothelial cell lines (RFPEC) using commercially

available eight-well cell culture impedance arrays (ECIS-8W1E and 8W10E+). The impedance

measurements were recorded with cell culture medium (without cells) and with endothelial cell

layer in the culture medium over a frequency range from 100 Hz to 64 KHz.

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DESIGN AND CONSTRUCTION OF A COMBUSTION SYNTHESIS

FACILITY FOR NANOPARTICLE GENERATION

Thomas Barkley, Jenna Vastano, Smitesh Bakrania,

Rowan University


This work involves design and construction of a combustion synthesis f acility with the goal

of studying the mechanics of particle formation through combustion as well as producing

nanoparticles for use in other studies and applications. At Rowan, a co-flow diffusion burner was

designed to support stoichiometric methane – air combustion providing high temperature zone

for synthesis. Tetramethyl tin is used as the liquid precursor to form tin dioxide nanoparticles.

The chemical precursor is delivered through a bubbler to the burner using argon as a carrier gas.

Particles are deposited via thermophoresis onto a cooling plate for further analysis or for use in

other applications. Material characterization on the particles is performed using electron

microscopy or x-ray diffraction. The current work describes the construction and the

characterization of the facility. A preliminary investigation on the range of particles the facility is

capable of producing is included. Further studies will involve altering the particle residence time

and combus tion temperature with various flame geometries to achieve better control over

particle morphology and size.

Keywords: Combustion Synthesis, Nanoparticles, Tin Dioxide, Flame, Facility Design

SELF-ACTUATING MICROVALVE FOR INTRAOCULAR PRESSURE

RELIEF

David Barth, Frank T. Fisher, and E.H. Yang



Glaucoma, a major cause of blindness, is treated by lowering the pressure in the anterior

chamber of the eye through drugs, surgery, or implantation of a drainage device. Glaucoma

drainage Devices (GDDs) are effective at lowering intraocular pressure even in severe cases of

glaucoma, but have a number of risks and disadvantages including risk of infection, dangerous

drops in pressure, and progressive failure over time due to scar tissue. A design for a self-

actuated active one-way microvalve is proposed to provide fine control over aqueous humor

outflow while preventing backflow, which can introduce bacteria into the eye, causing severe

infection. The actuation principle is based on a bimorph cantilever beam made of a polymer

substrate and a hydrogel layer that expands under increased hydrostatic pressure, causing the

cantilever to bend. The hydrogel will be a temperature sensitive hydrogel such as PNIPAm, with

its lower critical solution temperature (LCST) tuned to be extremely close to the temperature in

the human eye, so small changes in pressure will alter the LCST and cause significant changes in

the volume of the material.

! ! !

NANOGENERATOR FOR MECHANICAL ENERGY HARVESTING

USING PZT NANOFIBERS

Xi Chen1, Shiyou Xu

1, Nan Yao

2, Yong Shi

1

1Stevens Institute of Technology

2Princeton University


Energy harvesting technologies that are engineered to miniature sizes, while still increasing

the power delivered to wireless electronics, portable devices, stretchable electronics and

implantable bio-sensors are strongly desired. Piezoelectric nano wire and fiber based generators

have potential uses for powering such devices through a conversion of mechanical energy into

electrical energy. However, the piezoelectric voltage constant of the semiconductor piezoelectric

nanowires in the recently reported piezoelectric nanogenerators are lower than that of PZT

nanomaterials. Here we report a piezoelectric nanogenerator based on lead zirconate titanate

(PZT) nanofibers. The PZT nanofibers, with a diameter and length of approximately 60 nm and

500 !m, were aligned on interdigitated electrodes of platinum fine wires and packaged using a

soft polymer on a silicon substrate. The measured output voltage and power under periodic stress

application to the soft polymer was 1.63V and 0.03 !W, respectively.

!

Keywords: lead zirconate titanate (PZT), piezoelectric nanogenerator, nano fiber;

electrospinning; mechanical energy, bio-MEMS

NANOCALORIMETER FOR EVALUATION OF PROTEIN FOLDING

AND LIGAND B

Xiaoming Chen, Ming Lu, Lei Zuo

Stony Brook University


The objective of the project is to enable comprehensive and rapid evaluation of the protein

folding and ligand binding at the early stage of drug discovery by developing a new generation

of nanocalorimeters array in microplate footprint which reduces the protein consumption from 1

ml to 10 !l and decreases the measurement time from hours to minutes. As an initial study, in

this poster we report a fabrication process at BNL clean room and the characterization of a

simplified nanocalorimeter using silicon carbide (SiC) as temperature sensing material. DC

magnetron sputtering is used to prepare the SiC film. The deposition conditions and performance

of SiC were investigated. The results show amorphous silicon carbide is a promising material for

this application.

!

Keywords: Nanocalorimeter, Drug Discovery, Amorphous Silicon Carbide

! ! !

CAGING MICROMANIPULATION FOR AUTOMATED

MICROASSEMBLY OF MEMS COMPONENTS

Michael Fatovic, Utsav Shah, David Cappelleri



An inverted optical microscope is being used as a testbed fo r automated caging

micromanipulation to be used for microassembly of MEMS components. The testing apparatus

consists of an inverted optical microscope, and four micromanipulators that have an incremental

step size of 62.5 nanometers per step. These four micromanipulators will be used to control an

object whose size is in the micro scale. The object will be surrounded, or caged, by the four

micromanipulators which will in turn give full control to the movement of the object to the

micromanipulators. Once the object is in full control it can then be moved, and rotated, about a

calculated path. This path will be calculated in such a way that the object will move to the

desired location in the most efficient path while avoiding obstacles. !

ANTIBODY FUNCTIONALIZED SEGMENTED NANOWIRE FOR CELL

SEPARATION AND DIRECT RAMAN DETECTION

Ning Gao, Hongjun Wang, Eui-Hyeok Yang



In this work, cell separation technique has been explored at first by using antibody-

functionalized Ni nanowires. An antibody (anti-CD31) against mouse endothelial cells (MS1)

was conjugated to the Ni nanowire surface. The measured cytotoxicity was negligible on the CD-

31 antibody-functionalized nanowires by the tetrazolium salt (MTT) assay. The use of

functionalized nanowires for magnetically separating MS1 cells revealed that the cell separation

yield was closely related to cell concentration and the nanowire/cell ratio. Cell separation yield

using functionalized Ni nanowires was compared with that using commercial magnetic beads.

Considering the volume difference of the material used between the beads and nanowires,

antibody-functionalized nanowires showed an obvious advantage in cell separation. The study on

the effect of Ni nanowires on MS1 cells for extended culture confirmed that cell mor phology

remained comparable to control cells with a lower proliferation rate. These results demonstrate

that antibody-functionalized Ni nanowires provide an effective means to separate target cells. In

further work, to implement the direct detection of target cells after cell separation, functionalized

segmented Au-Ni nanowires with SERS hot-spots are used. The part of Ni nanowire will be used

for magnetic separation. The nanoparticle-nanowire structure with Raman hot-spots will provide

SERS signals from target cells.

!

Keywords: Segmented nanowires, cell separation, surface enhanced Raman scattering, detection

! ! !

OPTOFLUIDIC MICRORING RESONATOR SENSORS

Michael Grad, Chee Wei Wong, Daniel Attinger

Columbia University


Optofluidics is an emerging field that combines microfluidics and optics. We present the

integration of nanophotonic waveguiding structures in microchannels for refractive index sensing

purposes. Using deep-UV lithography and plasma etching, microring resonators are fabricated

from Silicon (nSi = 3.6) on Silicon Dioxide (nSiO2 = 1.5) with waveguides 250nm thick and

500nm wide, and ring diameters from 10-40µm. The resonators are embedded at the bottom of

microfluidic channels cast in PDMS with cross sections of 40µmx100µm. Near-IR light is

confined in the waveguides due to total internal reflection caused by the index contrast between

the Silicon, SiO2, and the fluid cladding layer. Changes in the refractive index of the fluid

cladding, i.e. by different fluids, temperatures, concentrations, film thicknesses, or biomolecular

adsorption, will cause measurable shifts to the spectral location of the resonant peak. Two

applications of these sensors are demonstrated. First, steady state measurements of different

concentrations of aqueous salt solutions are performed, showing a sen sitivity of 140

nm/Refractive Index Units (RIU) and detection limit of 3.2x10-5 RIU. Second, transient

measurements of thin liquid films associated with segmented flow in microfluidic channels.

Measurement of sub-micrometer thicknesses is demonstrated with uncertainty ~15nm.

Keywords: microfluidics, optofluidics, microring resonators, refractive index sensing, film

thickness

ATOMIC-SCALE FRICTION CONTROL BY VIBRATION FOR AFM

SYSTEMS

Yi Guo, Zheng Wang, Wenlin Zhang



We propose a feedback control mechanism to reduce the nano-scale friction in t he AFM

sliding system. It is well known that the sliding friction will decrease when a high-frequent

small-scale vibration is properly added to the sliding elements. Using the direct motion

separation technique, we designed a theoretic control law to adjust the vibration parameters (e.g.,

amplitude and frequency), in order to automatically reduce the friction force between the AFM

tip and the substrate. We plan to perform experiments in the AFM system to verify our theoretic

results.

!

Keywords: Friction Control, AFM system, direct motion separation

! ! !

A MICROFLUIDIC AFFINITY COCAINE SENSOR

John P. Hilton, ThaiHuu Nguyen, Renjun Pei, Milan Stojanovic, Qiao Lin

Columbia University


Detection of trace cocaine and other illicit materials is of great importance to law

enforcement. Currently, cocaine detection is commonly accomplished using methods such as gas

chromatography and mass spectroscopy. These methods are cumbersome, requiring a significant

amount of time and complex laboratory facilities. To address these problems, we present a

microfluidic aptasensor for fluorescently based, highly sensitive cocaine detection. The device

exploits sensing surfaces coated with a high-affinity aptamer, which is a single-stranded DNA

oligomer capable of specifically targeting cocaine. Detection of the bound cocaine is

accomplished via a fluorophore-quencher pair that dissociates in the presence of cocaine,

resulting in an increase in fluorescence. Additionally, the device utilizes thermally induced

release of the cocaine and quencher from the aptamer surface to enable convenient device

regeneration and reuse. Our results show that the aptasensor is highly selective to cocaine, with a

detection limit of 100 pM and an eight-orders-of-magnitude dynamic range, and can be

regenerated at modest temperatures (approximately 60°C).

!

Keywords: cocaine, aptamer, microfluidic, sensor, fluorescence

A PERMITTIVITY-BASED MEMS AFFINITY GLUCOSE SENSOR WITH

INTEGRATED TEMPERATURE MEASUREMENTS

Xian Huang1, Siqi Li

2, Jerome Schultz

3, Qian Wang

2, Qiao Lin

1

1Columbia University

2University of South Carolina

3University of California, Riverside


We present a proof-of-concept MEMS affinity sensor that measures the changes in dielectric

properties of poly(acrylamide-ran-3-acrylamidophenylboronic acid) (PAA-ran-PAAPBA)

polymer due to its specific, reversible binding with glucose. This sensor comprises capacitive

electrodes sandwiching a solution of PAA-ran-PAAPBA polymer. Binding with glucose induces

changes in the permittivity of the polymer, which can be measured as changes in capacitance to

allow determination of the glucose concentration. A thin-film temperature sensor is also

integrated within the device to maintain the polymer solution at a constant temperature via

closed-loop control. Testing of the device with varying glucose-sensitive polymer compositions

has shown that the device is capable of detecting glucose at physiologically relevant

concentrations with excellent sensitivi ty and specificity. These results indicate that this MEMS-

based sensor can be practically used for long-term, stable continuous glucose monitoring.

! ! !

MICROFLUIDIC DEVICES FOR STUDYING INTERCELLULAR

COMMUNICATION BETWEEN DORSAL ROOT GANGLIA (DRG)

Neha Jain, Bryan J. Pfister, Raquel Perez-Castillejos

NJIT


We describe an in-vitro system for studying the interaction between dorsal root ganglia in a

controlled microenvironment. DRGs are located in the spinal cord and contain cell bodies of

sensory neurons. The relevance of this study is in its possible application to spinal-cord injuries,

the published incidence rates of which range 28 - 55 million people in the USA. Injuries in the

central nervous system are particularly deleterious to the quality of life of patients due to their

permanence. Here we present a microfluidic device that enables the study of the communication

between two DRGs as a model of the gaps that result from traumatic spinal-cord injuries. Despite

most of the past work have been done using animal models, microfluidic devices provide better

control over the experimental parameters of the study than animal models. The height of the

microchamber was chosen such that the body of the DRG remained trapped in the well and only

the axons branching out of the main body were able to expand into the microchamber. Hence,

this device makes it possible to study the intercellular communication between DRGs by

controlling precisely the distance between them.

Keywords: microfluidics, tissue engineering, cell-cell communication, neural engineering

THIN FILM AND MICRO/NANO INITIATORS INTEGRATED WITH

ENERGETICS

Seongjin Jang, Sarah Du, Daizong Li, Kishore Pochiraju, Souran Manoochehri



We have developed experimental and simulation methods for characterizing the performance

of initiators and characterize electrical and burst performance of thin film and micro/nanowire

initiators. Metal (Cr/Au) thin film bridges with right angle, curved angle, and 45 degree slope

were designed and fabricated on SiO2 substrate by photolithographic patterning. Integration

processes of initiators with energetic materials have been investigated for rapid manufacture

micro devices. Au microwires with 2.5 mm length and 25 µm diameters were ignited using

voltages in the range of 147 ~ 615 V charged using four 68 µF capacitors. We also compared

experimental results with simulation results based on RLC circuit model.

! ! !

DESIGN OF A MICRO-SCALE MAGNETOSTRICTIVE MICROROBOT

Wuming Jing, Xi Chen, Sean Lyttle, Zhenbo Fu, Yong Shi



The talk includes the design, analysis, and performance results for a mobile microrobot that

was designed for competing in the 2010 NIST Mobile Microrobot Challenge. Inspired by a crab-

like microrobot driven by pulsating cardiomyocyte cells, an asymmetrically dimensioned

magnetostrictive thin film bimorph microrobot has been designed. Utilizing the magnetostrictive

principle, different bending and blocking forces occur under the robot\'s feet due to the in-plane

strain generated in the bimorphs by the application of external magnetic fields in the workspace

of the microrobot. The differences in the res ulting frictional forces drive the movement of the

robot body. To calculate and simulate whether the feet of the robot can generate enough force for

locomotion, the design was abstracted and translated into a piezoelectric cantilever FEM model.

The results are consistent with the magnetostrictive theoretical equations. Microrobot fabrication

and test-bed development based on this analysis is shown along with experimental results

validating this approach. Finally, a discussion of the performance results and recommendations

for future improvements are provided.

AMINO ACID SENSING THROUGH ENERGY TRANSFER

MECHANISMS IN DENDRITIC ARRAYS

Joseph Katigbak, Stevens Institute of Technology

Dr. Kenneth Yamaguchi, New Jersey City University


Fluorescence quenching via Forster resonance energy transfer can be used to detect the

presence of certain molecules. FRET is commonly used in proteomic studies. Detec tion of

smaller biomolecules can be done using fluorescence quenching of a donor-acceptor dye pair by

the direct coupling of the biomolecule to the pair. Constructing a dendritic donor-intermediate-

acceptor dye array can greatly improve the sensitivity of biomolecule sensing by the cascade

effect neighboring dyes. Coupling of a biomolecule to the outlying donor dyes reduces the

emission of the donor, which affects the overall spectra of the array. A diheptyl fluorene dye

coupled to a Napthalic dianhydride(NDA) moiety acts as the donor, with the NDI serving as a

point for amino acid attachment. A bay substituted Perylene tetracarboxylic imine (PTCDI) acts

as an intermediate. The core of the array terminated to a modified anthraquinone dye. Stepwise

growth of the array is done to ensure the dendritic arrangement of the molecules. Adding certain

moieties to the donor side can greatly affect the specificity of the array to certain hydrophobic

and hydrophilic molecules.

Keywords: biomolecule, sensing, dye, dendrimers, Forester resonance energy transfer, FRET

! ! !

GRAPHENE NANOCUTTING VIA CVD PROCESS

Youn-Su Kim, Onejae Sul, Vikram Patil, Eui-Hyeok Yang



The discovery of graphene and, consequently, graphene nanoribbons (GNRs) has set a new

dimension for nanoscale carbon science. Because of their fascinating electrical and mechanical

properties, graphene and related materials have been intensively studied. A recently developed

technique for graphene growth via chemical vapor deposition (CVD) showed success in

generating wafer-scale, high-crystalline quality graphene samples. However, the production of

graphene with smooth edges, well-defined shapes, and controlled edge configuration (zigzag or

armchair edged) is still a challenge to realize the graphene devices. Theoretical predictions

indicate that the physical properties and performance of GNRs devices depend on its scale and

edge configuration. Graphene nanoribbons have already been produced using plasma etching,

scanning tunneling microscopy lithography, and atomic force microscopy anodic oxidation.

Recently, Nanocutting of graphene sheets has been realized using nanometer-sized metal

particles with hydrogen gas (catalytic hydrogenation). This nanocutting process can generate

various shapes of graphene pieces. Here, we report a nanocutting technique for CVD grown

graphene with single and few layers to produce crystallographically oriented cuts in contrast to

the same process in exfoliated graphene.

NANOSCALE GRAPHENE AND CARBON NANOTUBE LITHOGRAPHY

USING AN ATOMIC FORCE MICROSCOPE

Kitu Kumar, Onejae Sul, M.G. Prasad, Stefan Strauf, Frank Fisher, E.H. Yang



In this work, nanoscale anodic oxidation lithography using an Atomic Force Microscope

(AFM) is systematically studied on graphene and carbon nanotubes. Trends between the

produced feature size and the corresponding process parameters such as applied voltage, water

meniscus length, tip speed during oxidation (holdtime), and humidity are observed. By

methodically varying these process parameters, we have found the appropriate working ranges to

create features of various sizes based on the oxidation of the carbon structure. Feature sizes down

to 27 nm were obtained. Optimizing the tip speed during linescans was found to be critical in

maintaining the presence of the water meniscus which was found to break above a tip speed of

1.00 µm/s. In addition other factors affecting the reproducibility of the results are addressed in an

endeavor to make the oxidization process more robust and repeatable.

Keywords: Graphene, Carbon Nanotubes, Oxidation Lithography, Atomic Force Microscope

! ! !

TiO2 NANOFIBER-BASED DYE SENSITIZED SOLAR CELL

Jinwei Li, Daizong Li, Yong Shi



Dye sensitized solar cells (DSSCs) are promising photovoltaic devices as they offer

advantages such aslow cost and easy for fabrication et al. The key part of the original DSSC is a

sintered film of nanoparticles which has a large surface area for the absorption of dyes. It has

been reported that boundaries of nanoparticles diminish the efficiency of charge transport in the

nanoparticle network, and lead to charge–carrier recombination. The one dimensional

morphology of the nanofiber is believed to improve electron transport efficiency without

sacrificing the high specific surface area for theadsorption of dyes. In this paper, TiO2 nanofibers

are used to replace TiO2 nanoparticles in the DSSC. The film of nanofibers was synthesized by

electrospinning process and collected on the transparent conductive glass substrate. The

precursor used for the electrospinning of the nanofiber consists of titanium(IV) isopropoxide,

acetate acid, ethanol and poly(vinylpyrrolidone)(PVP). After the electrospinning process,

nanofibers were pretreated at 120°C for 2hours and annealed at 500°C in atmosphere for another

2 hours. Then DSSC with the film of TiO2 nanofibers were assembled and characterized through

electrical measurements.

MICROPLASMA REFORMING OF HYDROCARBONS

Peter J. Lindner, Ron Besser



Portable power sources can be provided to today’s military by reforming high energy density

fuels into hydrogen for compact fuel cells. The overall focus of this research is to understand the

reforming capability of hydrocarbons within a microplasma reactor. To date we have designed,

fabricated and tested our microplasma-reactor devices. These devices have been used in

experiments with inert gases to test their viability as plasma devices, with pure hydrocarbons to

determine characteristics of these gases, and also produced experiments which showed the

reforming process of lighter hydrocarbons such as methane and butane. These MEMS devices

are designed with electrical connections to ignite the plasma and a microchannel to allow for

reactants to flow through. We plan to present experimental results from current microplasma

reforming reactions, which will show results with various compounds, specifically volatile

hydrocarbons. It is expected that these reaction experiments will result in conversion efficiency

data through a combination of gas chromatography and mass spectrometry. By varying reaction

types and operating parameters, we hope to ultimately determine the optimal conditions for the

conversion of larger hydrocarbon fuels, such as JP-8, into a hydrogen-rich stream.

! ! !

MEMS-BASED DETECTION OF THE ATTACHMENT OF SMALL

COLONIES OF CELLS

Fei Liu, S. M. Arrifuzzaman, A. Nordin, Ioana Voiculescu

Mechanical Engineering Department, City College of New York, NY

International Islamic University, Kuala Lumpur, Malaysia

The poster will present the concept and partial fabrication of a MEMS biosensor for real-time

detection of the attachment of small colonies of normal or cancer cells or individual cells. The

biosensing technique used in this research is based on two types of measurements on live cells;

(1) resonant frequency measurements using a shear horizontal surface acoustic wave (SH-SAW)

piezoelectric resonator and (2) electric cell-substrate impedance (ECIS) measurements. The key

strength of this MEMS biosensor is the combination of these two highly successful techniques

through the placement of detecting microelectrodes for ECIS technique on the acoustic path of

the SH-SAW piezoelectric resonator. The ECIS measurements on live cancer and normal cell

lines will monitor the cells’ attachment and viability. The resonant frequency shifts will provide

clear additional information about cell attachment, growth and cell detachment from the

measurement electrodes.

The MEMS biosensor for testing the cell attachment and viability will be based on a MEMS

SH-SAW resonator integrated with ECIS technique. Both techniques, resonant frequency shifts

and ECIS measurements, complement each other in terms of their biological information,

making it doubly advantageous when coupled together in a single MEMS biosensor. In this

project for the first time these techniques will be combined in a biosensor.

The combination of biosensors will be able to simultaneously perform, in real time, two

different types of electric measurements on the same cell: (1) recording the impedance spectra of

a small number of cells and even single cell, that will report on the stiffness and adhesion,

viability and ion channel activity of the cell, and (2) monitoring the resonant frequency of the

resonator that will give information about the progression of cell adhesion, cell growth, cell

viscoelasticity and cell detachment. In this way we will be able to map the whole cell in terms of

stiffness and adhesion. The sensor will be used to study cancer cells.

We consider the SH-SAW piezoelectric resonator because it is better suited for liquid sensing

applications due to the minimal damping of the SAW acoustic wave. The impedance sensor

consists of two metal electrodes: one large common reference electrode and one small working

electrode.

In this poster a simple SH-SAW resonator fabricated on Lithium Niobate piezoelectric

substrate will be presented. The microfabrication steps required for the SH-SAW resonator

along with resonant frequency measurements will be explained. !

! ! !

DYNAMIC CHEMICAL VAPOR SENSING WITH NANOFIBROUS FILM

BASED SURFACE ACOUSTIC WAVE SENSORS

Sai Liu

University of Massachusetts Lowell


We report on the use of electrospun nanofibrous film for surface acoustic wave (SAW)

sensors to enhance its chemical detection capability. Ultrafine (100 - 300 nm) polyethylene oxide

(PEO) fibers with controlled thickness and porosity were electrospun-coated on the surface of a

ST-cut quartz SAW sensor. The nanofibrous film provides a high surface area to volume ratio,

which can not only offer more adsorption sites for vapor molecu les, but also shortens the

diffusion length of vapor molecules into polymer material. Compared to conventional thin film

coating techniques, the nanofiber-coated SAW sensor shows a higher sensitivity and faster

response (shorter adsorption/desorption times). In addition, a theoretical analysis was performed

to understand SAW sensor response with nanofibrous film coating. It is concluded that the

nanofiber film holds a great potential in enhancing SAW sensor performance for trace level

detection of chemical analytes.

!

!

!

NANO-ENGINEERING THE PEMFC CATHODE CATALYST LAYER –

MEMBRANE INTERFACE FOR ELEVATED POWER DENSITY

Ayokunle Omosebi, Robin Crownover, Ronald S. Besser



The Catalyst Layer–Membrane Interface of a proton exchange membrane (PEM) fuel cell

plays a pivotal role in its performance. At this interface, electrons, protons, and gaseous oxidant

meet in a three-phase reaction, whose inefficiency is a primary contributor to fuel cell

performance losses. This project integrates patterning and deposition methods from

nanotechnology with Nafion-based proton exchange membranes to improve the performance of a

fuel cell. In the integration process, a departure is made from the conventional flat structure of

the Catalyst Layer – Membrane Interface to a three-dimensional interface which will enhance the

contact area by 10X. This will result in the better conductance of the membrane and will permit

the reduction of the thickness of the catalyst layer at a given loading. The combined effect of the

enhancement will ameliorate the kinetic, ohmic, and concentration polarizations common to the

flat struct ure Catalyst Layer – Membrane Interface. In addition to performance losses, the

emergence of the PEM fuel cells as a dominant technology is also limited by cost, as the price of

loading precious metal catalysts is high. Therefore, this project will demonstrate the feasibility of

using increased interfacial area to significantly reduce catalyst loading and performance losses.

!

Keywords: Nafion, PEMFC, nanopatterning

! ! !

BENCHTOP FABRICATION OF MICROFLUIDIC DEVICES BY SOFT-

LITHOGRAPHIC REPLICATION OF PATTERNED TAPE

Anil B. Shrirao, Raquel Perez-Castillejos

ECE, NJIT


We describe a method to fabricate microfluidic devices using only bench-top materials and

tools (adhesive tape, scalpel, 65°C oven, glass slides, and PDMS). We base our developments on

soft lithography. But access to photolithography is often limited in non-engineering-focused

settings—e.g., biologically-oriented research institutions or teaching-intensive colleges and high

schools. Non-photolithographic techniques exist. Compared to those techniques, ours is the very

simplest way to fabricate PDMS devices, as it uses bench-top materials and tools only. First we

attach one (or more) tape layer to a glass slide and pattern the tape with a blade following the

lines of the design, removed the extra tape, and replicated the master in PDMS. The tape

thickness (~ 60 !m) sets the height of the microchannels. Larger heights result from stacking

several tape layers. For maximum simplicity, we used a scalpel to pattern the tape with features

larger than 0.25 mm—laser cutters or robotic blades could be used for higher precision. We have

replicated the same tape master up to 50 times and did not show signs of wear. We demonstrate

the use of the technology for microfluidics and very-thick electrodes made with molten solder.

PHOTONIC THIN FILM DEVICE INTEGRATION AND ITS

APPLICATION

Fuchuan Song, Jing Xiao, Sang-Woo Seo

City College of New York


By using a thin film device format, wh ich is optimized in its host-substrate, integration of

photonic thin film devices onto silicon substrate does not interfere with a post layer-by-layer

process and provides the best performance of both III-V semiconductor based photonic devices

and silicon based electronics. We demonstrated that array of thin film photodetectors can be

efficiently self-aligned and integrated onto designed integration areas using a fluidic self-

assembly assisted heterogeneous integration. This would lead a way for wafer-scale integration

of various photonic devices to realize advanced photonic integrated system. Also, the first

demonstration of a lab-on-a chip detecting system consisting of microfluidic channels and a thin

film GaAs PD heterogeneously integrated onto a SiO2-Si substrate is reported. Using a flow

focusing geometry, we obtained fluorescent drop formations in the liquid-oil system as a

function of flow rate ratios of a biphasic flow. The proposed three-dimensional integration

structure allows sophisticated signal processing and bio/chemical analysis in a chip scale using

the integration of microfluidics, photonics, and electronics on a single substrate.

! ! !

NANOBIMORPH SYSTEMS BASED ON NANOWIRES AND

NANOTUBES FOR SUB-MICRON SCALE ACTUATION AND FORCE

GENERATION

Onejae Sul, Seongjin Jang, Eui-Hyeok Yang



Bimorph actuators have long history in the development and applications in many fields. In

recent years, as the nano-science and technology evolves, the requirements for the manipulation

of sub-micron scale objects or for applying tiny force on other objects using a nano-bimorph has

increased in fields such as biomaterials, artificial muscles, nanorobots, and nanoantennas. We

have developed several kinds of nano-bimorph systems, e.g., aluminum-multiwalled carbon

nanotube, aluminum-nickel, and nickel-polypyrrole bimorphs. Typically a thin film of metal was

deposited using pulsed laser deposition or thermal evaporation on top of a nanotube or nanowire.

These bimorphs were actuated by thermal mismatches of the paired materials, and the

characterization of such systems found that their tip deflections and the force generated at the

tips agree the predictions of the bimorph deflection theory. Their thermal deflection amplitudes

were repeatable over multiple thermal cycles, and the force measurement was done by lateral

force microscopy technique, with the range of the forces generated from 1 nN to 1 !N.

Keywords: Bimorph, lateral force microscopy, pulsed laser deposition, nanoactuator

SELF-ASSEMBLY OF NANOWIRES AT THREE-PHASE CONTACT

LINES ON SUPERHYDROPHOBIC SURFACES !

Yao-Tsan Tsai, Wei Xu, Eui-Hyeok Yang, Chang-Hwan Choi



This work reports on a novel self-assembly method of nanowires using a superhydrophobic

surface as a template. Well-defined superhydrophobic structures on a template surface can

configure three-phase (liquid-solid-gas) contact lines at the structures’ tips and direct the site-

specific self-assembly of nanowires when the colloidal droplet of nanowires recedes in

evaporation. A uniformly dispersed nanowire suspension was dispensed and evaporated on the

superhydrophobic template surface at normal room conditions. The results show that nanowires

are mostly deposited on the structural tips because the air layer retained between the hydrophobic

surface structures prevent the liquid meniscus from reaching to the bottom trenches during

evaporation. The assembly rate on each tip and the alignment tendency along the surface pattern

vary depending on the template surface parameters and the nanowires colloidal states, requiring

further systematic studies on the effects. It is envisioned that well-tailored superhydrophobic

surfaces can serve as a novel template for highly-ordered and site-specific self-assembly of

functional nanomaterials in simple drying processes, significantly enhancing the capability to

realize future nanomaterial-based devices and systems.

! ! !

Fabrication and Characterization of Thermoelectric Oxide La1!xSrxCoO3

(x~0.05) Nanofibers

Weihe Xu, Yong Shi, Hamid Hadim



The P-type perovskite oxides La1W 22;xSrxCoO3 (x=0, 0.1) is a promising complex oxide

thermoelectric material. It is expected that its thermoelectric properties will be significantly

increased by making it into the nanofibers. In this paper, the La1"xSrxCoO3 (x~0.05) nanofibers

were prepared by the electrospinning process were reported. The precursor used for the

electrospinning of the nanofibers consists of La(NO3)3•6H2O, Co(NO3)3•6H2O, Sr(NO3)2 as

well as PVP for controlling the viscosity. After the electrospinning process, the nanofibers were

pretreated at 150°C, then annealed at 630°C in atmosphere. Various substrates such as aluminum

foil, silicon and quartz wafers were used to collect and anneal the nanofibers. It was found that

the nanofibers adhered well on the aluminum foil and silicon wafers. X-ray diffraction (XRD)

and scanning electron microscopy (SEM) have been conducted to characterize these

thermoelectric nanofibers. The XRD results showed that the nanofibers collect ed and annealed

on aluminum foil and silicon wafers exhibited the same crystal structures as that of the bulk

materials of the same composition. The SEM pictures unveiled the surface morphology of the

nanofibers obtained under different conditions. Thermoelectric performance and the Seebeck

coefficient of the nanofibers are to be measured.

!

Keywords: MEMS, Nano, Thermoelectric, Seebeck Coefficient

Christina Alecci Cetin Cetinkaya

Mechanical Engineering Mechanical and Aeronautical Engineering

Stevens Institute of Technology Clarkson University

[email protected] [email protected]

S. M. Arifuzzaman Vinod Challa

Mechanical Eng. Mechanical Engineering

CCNY Stevens Institute of Technology


Smitesh Bakrania Costas Chassapis

Mechanical Engineering Mechanical Engineering

Rowan University Stevens Institute of Technology


David Barth U Cheang

Mechanical Engineering Mechanical Engineering and Mechanics

Stevens Institute of Technology Drexel University


Milan Begliarbekov I-En Chen

Physics and Engineering Physics Mechanical Engineering

Stevens Institute of Technology Stevens Institute of Technology


Isabel Burdallo Qi Chen

ECE Mechanical Engineering

NJIT Stevens Institute of Technology


Chengyu Cao Xi Chen


University of Connecticut Stevens Institute of Technology


David Cappelleri Chang-Hwan Choi




List of Participants

Brian DeFranco Ning Gao

Precision Munitions Mechanical Engineering

US Army RDECOM-ARDEC Stevens Institute of Technology


Ke Du Kartik Goyal

Mechanical Engineering Biomedical Engineering/Mechanical Engineering

Stevens Institute of Technology Carnegie Mellon University


Sarah Du Michael Grad


Stevens Institute of Technology Columbia University


Ezinwa Elele Joseph Grogan

Chemical Enginnering Mechanical Engineering and Applied Mechanics

NJIT University of Pennsylvania


Michael Fatovic Greg Hader

Mechanical Engineering US Army RDECOM-ARDEC

Stevens Institute of Technology [email protected]

[email protected]

Frank Fisher Robert Hart

Mechanical Engineering University of Pennsylvania


[email protected]

Jack Franklin John Hilton

University of Pennsylvania Mechanical Engineering

[email protected] Columbia University

[email protected]

Richard Galos Xian Huang


Stevens Institute of Technology Columbia University


Neha Jain Jinwei Li

Biomedical Engineering Mechanical Engineering

NJIT Stevens Institute of Technology


Seongjin Jang Sibi Li




Wuming Jing Victor Lifton

Mechanical Engineering mPhase Technologies, Inc.


[email protected]

Joseph Katigbak Peter Lindner

Mechanical Engineering Chemical Eng. and Material Science



Boris Khusid Fei Liu

Chemical, Biological & Pharmaceutical Eng. Mechanical Engineering

NJIT CCNY


Minjun Kim Sai Liu


Drexel University U Mass Lowell


Youn-Su Kim Stephanie Longo

Mechanical Engineering Precision Munitions

Stevens Institute of Technology US Army RDECOM-ARDEC


Kitu Kumar Souran Manoochehri




Preethi Moorthy Catherine Rice

Mechanical Engineering MET Tech, Inc.


[email protected]

Thai Huu Nguyen Mahmut Selman Sakar

Mechanical Engineering Electrical and Systems Engineering

Columbia University Uni. of Pennsylvania

[email protected] [email protected],edu

Ayokunle Omosebi Dhruv Sakalley

Chemical Engineering and Material Science Applied Engg Tech

Stevens Institute of Technology Drexel University


Nirmal Patel Lawrence Sasso

Mechanical Engineering Biomedical Engineering

Stevens Institute of Technology Rutgers University


Altida Patimetha Sang-Woo Seo

Chemical Engineering and Material Science Electrical Engineering

Stevens Institute of Technology CCNY


Kishore Pochiraju Yueyang Shen

Mechanical Engineering Chemical Engineering

Stevens Institute of Technology NJIT


Marehalli Prasad Yong Shi




Chunmei Qiu Anil Shrirao

Chemcial Engineering ECE

Columbia University NJIT


Steve Simon Jenna Vastano

mPhase Technologies, Inc. Mechanical Engineering

[email protected] Rowan University

[email protected]

Fuchuan Song Xingwei Wang

Electrical Eng. Electrical and Computer Engineering

CCNY Uni. of Massachusetts Lowell


Onejae Sul Kirk Witzel

Mechanical Engineering Picatinny Arsenal


[email protected]

Hongwei Sun Jing Xiao

Mechanical Engineering Electrical Eng.

University of Massachusetts Lowell CCNY


Siva Thangam Wei Xu




Jason Thompson Weihe Xu

Mechanical Engineering and Applied Mechanics Mechanical Engineering

Uni. of Pennsylvania Stevens Institute of Technology


Yifan Tong EH Yang




Yao-Tsan Tsai Guitao Zhang




Wenlin Zhang Lei Zuo

Electrical and Computer Engineering Mechanical Engineering

Stevens Institute of Technology Stony Brook University


! ! !

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2010 Metro Area MEMS/NEMS Workshop: … Metro Area MEMS/NEMS Workshop: NanoManufacturing Location ... - Towards An Autonomous MEMS Scale Vibration Energy Harvesting ... Stevens Instiute

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