[1.3] Display 제조기술 Overview 1 TFT-LCD 제조중심
[1.3] Display 제조기술 Overview
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TFT-LCD 제조중심
300 ㎛
Common Electrod One Pixel
Data Line
Pixel Electrod
Gate Line
)
) Color Filter Substrate
TFT Substrate
TFT-LCD Panel 구조
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TFT Panel
Color Filter
Panel
R G B R G B
R G B R G B
R G B R G B
TFT LCD 제조 Process
① TFT Panel & CF Panel 제조
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TFT Panel
Color Filter
Panel
액정주입
Assembly
R G B R G B
R G B R G B
R G B R G B
TFT LCD 제조 Process
① 액정주입
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TFT LCD 제조 Process
③ PCB Attach
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④ TFT-LCD Module 공정 (Panel + PCB + Backlight + Frame)
BLU
Top Chassis
Backlight
LCD Module 6
Aging Electric Test Visual Test
⑤ Module Test
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1. LCD module consists of
TFT- Color filter - LC - Module(ic, PCB, Back light unit) assembly
2. TFT- LCD : semiconductor process + LC + module assembly
+ visual inspection
3. Material cost is very high > 60%
4. Assembly of PCB/Back light unit takes a large business
portion and occupies heavy material cost
The Nature of LCD Manufacturing Business
Uniqueness of LCD business
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반도체와 조립業의 성격을 보유
FPD 산업의 특성
기술측면 :이질적인 기술의 복합체
High Investment(FAB)
재료비 비중 60%
반도체 특징 조립업 특징
액정기술
반도체 기술
광학기술
Integration Technology
사업측면 : 양 사업의 특성을 모두 보유
Color Filter 액정 TFT
Lamp
■ Why we name ‘TFT’?
1.0. Introduction to a-Si TFT (Thin Film Transistor)
MOSFET vs (Metal Oxide Semiconductor Field Effect Transistor)
TFT (Thin Film Transistor)
Glass substrate P-type Si substrate
Gate insulator Gate Source Drain
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Yield=89.7%(35/39) Yield=96.2%(100/104)
Net Die: 39 Net Die: 104
Productivity of c-Si Semiconductor
Net Die: 224
Yield=96.8%(217/224)
Chip Shrink Larger Wafer
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Yield=50%
4 panel/glass
Yield=66.7%
6 panel/glass
Yield=83.3%
12 panel/glass
Productivity of TFT-LCD
Larger
Glass
Larger
Glass
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Manufacturing Cost Analysis
Total Manufacturing Cost = Materials cost
+
Equipment Depreciation
+
Labor
+
Expense
Total
Cost
Total
mfg.
Cost
Over head
Expense Labor
Depreciation
Material cost
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Module Cost Analysis (Material cost)
Total Module Cost = Materials cost > 60%
- Glass (3%)
- CF (15%)
- polarizer (2%)
- LC (2%)
- Back light (13%)
- Driver ic (15%)
+
fabrication cost (~ 30%)
Material cost
Glass
3% CF
17%
Pol
2%
LC
2%
Back light
13%
Driver
15%
PCB
2%
misc material
14%
Fabricaion cost
32%
[Source : ED Research 97]
Base 14.1 XGA
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Lamp Reflector
Lamp PCB
(Source)
Top Chassis
LCD Panel
Plastic Mold Frame
PCB
(Gate)
Gate TCP
(Flat Type)
Source TCP
(Bent Type)
BEF Diffuser LGP Reflector Sheet
Assembly structure of a TFT-LCD Module
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제조 (Manufacturing) vs 공정 (Process)
What is Display Manufacturing Technology?
• 제조기술 : 효율성, Speed, 수율, Cost, 라인 operation, Input Output 관리 개념을
포함하는 포괄적인 개념.
What is Display Process Technology?
• Thin Film Process, 미세 Pattern 공정을 통해서 Architecture를 결정하고
Panel 및 Module을 만드는 과정. (공정 + 검사기술)
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Panel Cost Down Approach
- Larger Glass Size
- Glass area utilization
- Improve Cost of Ownership
Shorten TAT (Turn Around Time)
Shorten Transportation distance
- Process Simplification
TFT Process reduction (7 5 4 mask step)
Automation : LC & Module line
- Reduce number of parts
- Material reduction
Spin coating slit coating
Recycling
Productivity
Cost saving
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Ex1) Mother Glass Size vs productivity
1 3
1.45 3.6
11.45
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Gen1
Gen 3 Gen 3.5
Gen 4
Gen 2
Gen 5
Gen 1 Gen 2 Gen 3 Gen 3.5 Gen 4 (Gen 5)
300x400 370x470 550x650 600x720 730x920 1000X1200 680x880 1100x1250 main product 10.4” 12.1”/15” 14.1” 14.1”/17” 15”/17” (x4) (x6) /(x4) (x6) (x9) / (x6) (x15)/(x12)
5.6
5.0
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Device
15.0 XGA
15.0 SXGA+
17.0 SXGA
730 x 920
68.4%
71.5%
87.7%
19.0 UXGA 65.3%
13.3 XGA
14.1 SXGA+
78.4%
86.9%
21.3 UXGA 89.3%
Substrate Utilization Rate in 730x920 Ex2)
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1.3.2. TFT-LCD 제조 Process Flow
Fab
Shipping Module Assembly
Test
Module Test Final Inspection
Repair
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LCD Fab 설비
LCD Clean Room
Glass handling Robot Arm
Glass 세정장비 Wet Stripper 장비
PECVD
Glass handling Robot Arm
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Clean Room
• Clean Room Class
TFT-LCD Fab environment
- Class 1000 ~ 1,000 particles/ft3 (0.5 um or larger)
* 머리카락 직경 ~ 100um
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① Fab 공정
TFT & CF Panel Fabrication
R G B R G B
R G B R G B
R G B R G B
② Panel Test & Repair
Timing Control ASIC
Panel Test Repair
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TFT Panel
Color Filter
Panel
액정주입
Assembly
R G B R G B
R G B R G B
R G B R G B
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③ 액정공정
④ Package (Attach Driver ic’s and PCB to Panel)
Timing Control ASIC
LVDS
Column Driver
ic
Control PCB
TFT/CF Panel
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Chassis
CCFL
LGP Reflector Diffuser Prism Sheets(BEF) PCF
Polarizer
C/F Glass
TFT Glass
⑤ TFT-LCD Module 공정 (Panel + PCB + Backlight + Frame)
BLU
Top Chassis
Backlight
LCD Module 31
Aging Electric Test Visual Test
⑥ Module Test
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Test & Inspection
Array Test - Cell test - Module Test - Final Test
Array test
Visual Inspection
Module test
Aging Test
Final Inspection st
TFT/CF panel defect detection by Optical & Electro-optical method
After LC fill; before drive ic attach
After drive ic & PCB attached; inspect w/ real driving circuit
Reliability & screening at high Temp. Accel. Test
Final test to check cosmetic & screen uniformity etc.
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Yield and It’s Effect on Loss
Cum Yield = Y(panel) x Y(LC) x Y (Module)
Array test
Module test
Final Test
Visual Inspection
-TFT panel
- CF panel
- TFT/CF/LC filled
- Assembled panel+ic+PCB+BL
- Assembled panel+ic+PCB+BL
Early detection of defects
& rejection of Panel
is cost saving way
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LCD 제조 경쟁력
• 생산성 (Mother Glass size 효율성)
• Cost (제조원가)
• 제조 Speed
• 수율
• 공정 단순화 (6 mask - 5Mask - 4 mask 공정)
• 재료선정 (배선 Metal line selection, Cu, Al..)
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2200
1250 1850
Gen-6
2X
3X
Gen-5 1100
1500
32”
32” 32”
32” 32”
32”
32”
32”
1870
40”
40”
40”
40”
Gen-7
40” 40”
40”
40”
- 가장 효율적인 Glass Size 선택
- 공정단순화 기술 집중
- 가장 효율적인 Glass Size 선택
- 공정단순화 기술 집중
LCD 의 생산성과 Mother Glass size
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삼성 Crystal Valley (아산 1단지)
Gen.10 LCD Plant
Sharp Sakai G10 Plant
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