반반반 반반반 반반반 반반반반 반반반반 반반반 진진진진(진) 진진진진 반반반반 진진진 진진진진진 진진진진 진진진 진진진 진진진진 진진진 진진진진 진진진 진진진진 진진진진 진진진진 진진진진진진 진진진진 진진진 진진진진(electropolishing) 진 진진진 진진진진. 진진진진진진 진진 진진진진진 진진진 진진진진 진진진진 진진진진 진 진진진진진 진진진진 진진 진진진 진진진진 진진진진 진진진 진진진 진진진진진진 진진진진 진진 진 진진. 진진진 진진진 진진진진진 진진진진진 진진진 진진진 진진진진진 진진진진 진진진 진진진진 진진 진진. 반반반반반반반 반반반 진진 진진진진진 진진진 진진진 진진 진진진진 진진진진 진진진진 진진진진진 진진 진진 진 진진진진진 진진진진. 진진진진진 진진진진 진진진 진진. 1)진진진진진진 진진진 진진진진진(Rmax) 2. 0μm 진진진 진진진 진진진진진진 진진진진진(Rmax) 0.7μm 진진진 진진진진진 진진진 진진진진진 진 HIGH POWER 진 진진진진진진 진진진진진 진진진진진진진 진진진진 진진 Na 진진진진진 진진진진. 2)LOW POWER 진 진진진 진진진진진 진진진진 진진진진 진진진진 진진진진 진진진진진 진진진 진진진진진 진진진진진 진진진진 진진진진진 진진진진진 진진진진. 3)진(진)진진 진진진 진진진진 진진진 진진 PIT(진진)진 진진진진.
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()
(electropolishing) . . .
. .
1) (Rmax) 2. 0m (Rmax) 0.7m HIGH POWER Na .
2)LOW POWER .
3)() PIT() .
4) () .
. PIT .
POWDER . Rmax, Ra ., .
GAS .- (Scanning Electron Microscopy, SEM) .- .- AES(Auger Electron Spectroscopy) ESCA(Electron Spectroscopy for Chemical Analysis) .- .- .
, , , , , . , FITTING . (STS316L) , , (AFM, Abrasive Flow Machining) . , , . (PITTING) . 4 CLEAN ROOM(CLASS 100) , .
D. I WATER SYSTEM FLOW CHART . D. I WATER DEIONIZED WATER . (FILTER), (STERILIZER), POLISHER 25 RESISTIVITY 18., 5. . 18. D. I WATER 2 (FILTER), (STERILIZER), POLISHER .
18, 5 D. I WATER , 4 , 1 RO 18, 2 RO 18, 3 , 4 .
CLEAN ROOM SPEC. 0.5 CLASS 100 .
D. I WATER (5 & 18)
4
,
GAS
GAS GAS GAS . (ULTRA CLEAN) GAS WAFER .
FITTING, TUBE , GAS , GAS (ULTRA CLEAN) . .
- GAS , .
.
1) , , ,
2)
3)
4) Cr .
GAS GAS , (ULTRA CLEAN) GAS .
1) INBOARD LEAKAGE FREE GAS , METAL SEAL , .
2) PARTICLEPARTICLE 10% 0.013 PATTERN . PATTERN PARTICLE , (PURGE) PARTICLE .
(EP) (PURGE) (PURGE) .
3) DEAD SPACE
DEAD SPACE , (: /BELLOWS SEAL), PURGE GAS , PURGE , PARTICLE , DEAD SPACE GAS . DEAD SPACE COMPONENT , DEAD SPACE .
DEAD SPACE DEAD SPACE DEAD VOLUME 1.3cc 0.01cc .
/ PURGE
DEAD SPACE
4) OUTGAS
OUTGAS PROCESS GAS , GAS . .
.
OUT GAS . , , . .
(BAILBY LAYER) , OUT GAS .
OUT GAS , .
INCLUDEPICTURE "http://www.ei.co.kr/mech/m9903/special/s2-7-2.gif" \* MERGEFORMATINET
INCLUDEPICTURE "http://www.ei.co.kr/mech/m9903/special/s2-6-2.gif" \* MERGEFORMATINET ( )
INCLUDEPICTURE "http://www.ei.co.kr/mech/m9903/special/s2-8-2.gif" \* MERGEFORMATINET Stainless
TEST
GAS .
1. SUPER CLEAN STAINLESS STEEL2. PROCESS GAS / / 3. PARTICLE / / PITTING 4. / 5. GAS / 6. - VCR /
.
(C) AUSTENITE AUSTENITE Cr , . , , . (Si) FERRITE . TOUGHNESS , .(Mn) S, Se RED-SHORTNESS . AUSTENITE Ni 50% N STAINLESS STEEL N .
(P) (), AUSTENITE . (S) , Mn, Te, Mo . (Cu) AUSTENITE ION , .
(Ni) AUSTENITE AUSTENITE STAINLESS STEEL , . (Cr) FERRITE STAINLESS STEEL 12% , .
(Mo) (NORMALIZING) , , CREEP , ION . (Al) FERRITE Ni . 13Cr-STAINLESS STEEL FERRITE , .
(N) AUSTENITE AUSTENITE STAINLESS STEEL , , TOUGHNESS . (O) , , TOUGHNESS .(H) Ni STAINLESS STEEL PINHOLE . () .
(C), (Si), (Mn), (P), (S), (Al) .
, , , AF(EF), (AOD), (VOD), (VIM), Electro Slag (ESR), ARC (VAR), (VCR) .
, (VCR)- ARC (VAR) (VIM)- ARC (VAR) . . VCR-VAR , , AF , 20015torr O2+Ar (VCR) . LF(Ladle Furnace) (S) , Casting, ARC (VAR) (C), (O), (H) .
VIM-VAR (VIM) . (C), (N), (O) (VIM) ARC (VAR) (C), (O), (H) .
. VCR-VAR, VCR-VAR (STS316L) , (STS316L) . (Mn) (MnS), Mn FUME , , VCR-VAR 0.28 VIM-VAR 0.02 . (Ni), (Cr), (Mo) .
(STS316L) , VCR/VAR, AOD, JIS-G3214 . JIS-G3214 100 , VCR/VAR, AOD , VCR/VAR C, Si, Mn, P, S . AOD VCR/VAR , AOD , VCR/VAR . VIM-VAR VCR-VAR VIM-VAR , VCR-VAR 25% .
S : NORMAL STS316L -- SINGLE MELTING() --------- AODP : PRIMET ----------- DOUBLE MELTING(/) --- VCR +VARU : PRIMET - ULM ---- DOUBLE MELTING(/ Mn) - VIM +VAR
/ BA(Bright Annealing) SP Rmax 2.5 . EP(Electropolishing) SPU , Rmax 0.7 . SEP(Super Electropolishing) EP , , , Rmax 0.4 .
Stainless Steel /
/
LevelSpec.RmaxRaB ARmax ave. 2.5Ra ave. 10inchE PRmax ave. 0.7Ra ave. 5inchSEPRmax ave. 0.4Ra ave. 3inch
(+)(ppb)(-)(ppb)NH4+N/DCl-N/DNa+N/DNO3-N/DK+N/DSO42-N/DCa2+N/DPO43-N/DMg2+N/D
TEST
PROCESS
STS316L
STS316L VCR/VAR
COST
, , , , CHEMICAL , CHEMICAL . LAMP / , , . (Rmax) STYLUS LOT 3PCS 1/1PCS , Rmax . 200ml 1 . LOT 10PCS . (SEM) 300, 500, 2000 .
PARTICLE, PITTING, . CHEMICAL AUGER CHEMICAL, (Cr RICH) . CHEMICAL ESCA CHEMICAL , (Cr2O3) .
(SEM)
, . . SEM , , PIT .
ION
CAP 1Hr , 50ml . ION NH4+, Na+, K+, Ca2+, Mg2+ Cl-, NO3-, SO42-, PO43- . ION , GAS FITTING .
AES
, SPUTTER 1, SPUTTER 2, SPUTTER 3, 10 DEPTH PROFILE AES . O, C Fe, Cr, Ni, Si PEAK . , ( ) .
10 , , Cr OXIDE 40 .
(CCl4) ( 3.4 C-H ) ppm SAMPLE 100ml 120 0.1ppm .
AES
:ELBOW FeCrNiOCSi53129611sputter 12025550--sputter 2602515---sputter 3632611---
SAMPLEHC (ppm)3/8TEE (3EA)< 0.1 # : < 0.1 ppm OK
(SMOOTHNESS) , BA, EP, SEP , .- B A : PRECISION NC-MACHINING + SUPER CLEANING- E P : ELECTROPOLISHING + SUPER CLEANING( ; Rmax 0.7)- SEP : ELECTROPOLISHING + SUPER CLEANING( ; Rmax 0.4)FITTING EP Ra 0.029 (Rmax 0.5), SEP Ra 0.014 (Rmax 0.17), TUBE EP Ra 0.046 (Rmax 0.43) .
, , , , , , , , , , , , , . FITTING, 90ELBOW, DOUBLE FITTING, TUBE, VALVE /, , , .
SEM
AES SPUTTER
DEPTH PROFILE
FITTING
DOUBLE FITTING
VALT
TUBE
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