TCO.ppt

Transparent Conducting oxide

Materials Characterization lab

TCO (Transparent Conducting Oxide) (TCO) Electronical Conductivity () ; 103 -1cm-2 Optical Transmittance ; 80 % Band gap ; 3.3 eV , display, display, , A-Si

Free carrier type Oxygen deficiency Electric charge carrier density & Effective mass

TCO (Transparent Conducting Oxide) (TCO)ITO (In2O3:Sn, Sn~10%) IZO (In2O3:Zn, Zn~5%) FTO (SnO2:F) ZnO A-IGZO (In2O3:Ga2O3:ZnO)

TCO (Transparent Conducting Oxide)

TCO (Transparent Conducting Oxide)

TCO (Transparent Conducting Oxide)

TCO (Transparent Conducting Oxide)

TCO (Transparent Conducting Oxide)

TCO (Transparent Conducting Oxide) N-type : P-type :

Dopant 1. N-type , ZnO ; - 4.35eV , Band gap 3.37eV

MgO ; 1.37eV, Band gap 7.8eV carrier 2. P-type Low work function Metal-Oxygen ; , 16(S, Se, Te) (CuAlO2) 3.

TCO (Transparent Conducting Oxide)

TCO (Transparent Conducting Oxide)

Magnetron sputtering PVD(Physical vapor deposition) DC, RF, reactive gas cathode Ar + e-(primary) = Ar+ + e-(primary) + e-(secondary) - target , target

TCO (Transparent Conducting Oxide)

Sputtering

-. -. , step defect coverage -. (adhesion) -. , , , . -. Target , target . -. sputter etching pre-cleaning . -. O2, N2 reactive sputter , .

TCO (Transparent Conducting Oxide)

Sputtering

-. High energy deposition damage damage . -. , UV, (100150) holder .

-. Ar , , bias , .

TCO (Transparent Conducting Oxide)

Sputtering

-.

-. -. target -. -. Background : 110-5110-6 Torr -. Ar : 215mTorr -. Input power : 5001000W -. Reflected power "0" setting -. bias : -50-100W

TCO (Transparent Conducting Oxide)Pulsed laser deposition (PLD)

-. -. UV target -. Laser plume -. millitorr -. -. ~3 epitaxial -. p-type TCO

TCO (Transparent Conducting Oxide)

(Chemical vapor deposition, CVD)

-. -. , , -. (APCVD), (LPCVD), (PECVD), (MOCVD) -. -. ,

TCO (Transparent Conducting Oxide)

(Solution deposition)

-. Sol-gel -. or

-. -. alkoxide -. - : , -. PVD PLD -. , -. , , -.

TCO (Transparent Conducting Oxide) (aerosol spray pyrolysis)

-. -.

-. -. , -. ,

TCO (Transparent Conducting Oxide)

Combination depositon methods

-. -. target -. NiCo2O4 sputter -.

TCO (Transparent Conducting Oxide)