Materials Characterization lab Materials Characterization lab Transparent Conducting oxide Transparent Conducting oxide
TCO.ppt
Nov 07, 2014
transparent conducting oxides
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Transparent Conducting oxide
Materials Characterization lab
TCO (Transparent Conducting Oxide) (TCO) Electronical Conductivity () ; 103 -1cm-2 Optical Transmittance ; 80 % Band gap ; 3.3 eV , display, display, , A-Si
Free carrier type Oxygen deficiency Electric charge carrier density & Effective mass
TCO (Transparent Conducting Oxide) (TCO)ITO (In2O3:Sn, Sn~10%) IZO (In2O3:Zn, Zn~5%) FTO (SnO2:F) ZnO A-IGZO (In2O3:Ga2O3:ZnO)
TCO (Transparent Conducting Oxide)
TCO (Transparent Conducting Oxide)
TCO (Transparent Conducting Oxide)
TCO (Transparent Conducting Oxide)
TCO (Transparent Conducting Oxide)
TCO (Transparent Conducting Oxide) N-type : P-type :
Dopant 1. N-type , ZnO ; - 4.35eV , Band gap 3.37eV
MgO ; 1.37eV, Band gap 7.8eV carrier 2. P-type Low work function Metal-Oxygen ; , 16(S, Se, Te) (CuAlO2) 3.
TCO (Transparent Conducting Oxide)
TCO (Transparent Conducting Oxide)
Magnetron sputtering PVD(Physical vapor deposition) DC, RF, reactive gas cathode Ar + e-(primary) = Ar+ + e-(primary) + e-(secondary) - target , target
TCO (Transparent Conducting Oxide)
Sputtering
-. -. , step defect coverage -. (adhesion) -. , , , . -. Target , target . -. sputter etching pre-cleaning . -. O2, N2 reactive sputter , .
TCO (Transparent Conducting Oxide)
Sputtering
-. High energy deposition damage damage . -. , UV, (100150) holder .
-. Ar , , bias , .
TCO (Transparent Conducting Oxide)
Sputtering
-.
-. -. target -. -. Background : 110-5110-6 Torr -. Ar : 215mTorr -. Input power : 5001000W -. Reflected power "0" setting -. bias : -50-100W
TCO (Transparent Conducting Oxide)Pulsed laser deposition (PLD)
-. -. UV target -. Laser plume -. millitorr -. -. ~3 epitaxial -. p-type TCO
TCO (Transparent Conducting Oxide)
(Chemical vapor deposition, CVD)
-. -. , , -. (APCVD), (LPCVD), (PECVD), (MOCVD) -. -. ,
TCO (Transparent Conducting Oxide)
(Solution deposition)
-. Sol-gel -. or
-. -. alkoxide -. - : , -. PVD PLD -. , -. , , -.
TCO (Transparent Conducting Oxide) (aerosol spray pyrolysis)
-. -.
-. -. , -. ,
TCO (Transparent Conducting Oxide)
Combination depositon methods
-. -. target -. NiCo2O4 sputter -.
TCO (Transparent Conducting Oxide)