PHASED: a Faster, Smarter & More Affordable Analysis Device - Update Ulrich.bonne@honeywell.com U.Bonne, J.Detry, R.Higashi, K.Newstrom-Peitso, H.Pham,

PHASED: a Faster, Smarter & More Affordable Analysis Device - UpdatePHASED: a Faster, Smarter & More Affordable Analysis Device - Update

Ulrich.bonne@honeywell.com

U.Bonne, J.Detry, R.Higashi, K.Newstrom-Peitso, H.Pham, T.Rezachek and S.Swanson

Honeywell Labs, Plymouth, MN 55441, USAulrich.bonne@honeywell.com

Definition: PHASED (= Phased Heater Array Structure for Enhanced Detection) presently integrates multi-stage pre-concentration, separation, flow sensing and detection of gas components on one chip.

Project Objectives: Develop and demonstrate the operation of a PHASED sensor, via: - Thermophysical analysis and simulations - Design and assemble a setup to check out the individual components - Design and fabricate a preliminary version of PHASED, with PCB electronics - Design and fabricate an integrated version of PHASED-on-a-chip

Acknowledgment: This work is supported by ORNL/DoE

PHASED: Micro Gas Analyzer SystemPHASED: Micro Gas Analyzer SystemPhased Heater Array Structure for Enhanced Detection

Ulrich.bonne@honeywell.com

Goal: Sensitivity <10 ppb, < 3 sec, ~ 1 in.3, < 1 J/analysis, wireless output.

Multi-Stage Pre-concentrationMulti-Stage Pre-concentration

To

Separator

Multi-stage release of analyte increases its concentration:

~100-fold with 1st stage

~100 x n-fold after n stages

Cross section of PHASED structure

Side Views of PHASED structure and Operation

PHASED: Physical Principle of Multi-Stage Pre-Concentr.PHASED: Physical Principle of Multi-Stage Pre-Concentr.

robert.higashi@honeywell.com

Phased Heater Array Structure for Enhanced Detection

Schematic Views of the Phased Heater Array with Individual Heaters, H1, Hn,….Hn-1, Hn, and a Thermal Conductivity Sensor, TC

PHASED: Operation, Structure, Envisioned outputOperation, Structure, Envisioned outputPHASED: Operation, Structure, Envisioned outputOperation, Structure, Envisioned output

ulrich.bonne@honeywell.com

Thermal Modeling of PHASED (cont’d.)Thermal Modeling of PHASED (cont’d.)

Ulrich.bonne@honeywell.com

Thermal Modeling of PHASED (cont’d.)Thermal Modeling of PHASED (cont’d.)

Ulrich.bonne@honeywell.com

Thermal Modeling of PHASED (cont’d.)Thermal Modeling of PHASED (cont’d.)

burgess.johnson@honeywell.com

• Simulations predicted: Speed, Separation, Flow control and # of PreConc.Elements•1st gen. PHASED chips fabricated• Stat. film material survives 200-250ºC in air Patterning demonstrated and

Specific surface area ~800 m2/g unaffected• Heater FET switch chips fabricated • 1st gen. electronic circuit designed & built• Millisecond desorption response time feasible

PHASED: Technical ProgressPHASED: Technical Progress

=600

PHASED: TC Detector Response Time PHASED: TC Detector Response Time

Ulrich.Bonne@Honeywell.com

PHASED TC Capability TC Sensor Length: 0.03 cm Gas Velocity: 100 cm/s Response Time: < 1 ms

PHASED Output: (tR 100 ms)

Resolution, t½~ tR/R 3 ms

Top View of Honeywell Microbridge Flow or TC Sensor

Thermal Modeling of PHASED (cont’d)Thermal Modeling of PHASED (cont’d)

Ulrich.bonne@honeywell.com

PHASED: Flow ControlPHASED: Flow Control

Ulrich.bonne@honeywell.com

PHASED LayoutPHASED Layout

Proposed layout of 20-Element Concentrator.

Die: 7.3 x 8 mm

PHASED LayoutPHASED Layout

20 Elements

100 mm Wafer

Honeywell Confidential and Proprietary

robert.higashi@honeywell.com

robert.higashi@honeywell.com

20-Element Pre-Concentrator, Diff. TC, 20-Element SeparatorIntegrated Version of PHASED, Showing Sensors, Concentrator and Separator.

PHASED: Progress with Chip FabricationPHASED: Progress with Chip Fabrication

PHASED: Progress with Chip FabricationPHASED: Progress with Chip Fabrication

Ulrich.bonne@honeywell.com

PHASED: PCB w/Chip-PCBs

Performance Modeling of PHASED Performance Modeling of PHASED

Ulrich.bonne@honeywell.com

Performance Modeling of PHASED (cont’d.)Performance Modeling of PHASED (cont’d.)

Ulrich.bonne@honeywell.com

Predicted Output for Air Sample AnalysisPredicted Output for Air Sample Analysis

Gas Chromatograph: Outputs of C1-C3 in HeGas Chromatograph: Outputs of C1-C3 in He

k’ = (tR - to) / to

PHASED: Simulated Outputs for C1-C3 Gases in AirPHASED: Simulated Outputs for C1-C3 Gases in Air

Ulrich.bonne@honeywell.com

PHASED: Simulated Outputs for C1-C3 Gases in AirPHASED: Simulated Outputs for C1-C3 Gases in Air

Ulrich.bonne@honeywell.com

Status of PHASED as of Jan. ‘2003 Status of PHASED as of Jan. ‘2003

Ulrich.bonne@honeywell.com

Conclusions: • Demonstrated: PHASED-I MEMS fabrication and flow control; operational demonstration is next • Operational feasibility risk reduction: Simulations, Materials, Fabrication: 1,000-10,000:1-concentration gain, 15:1-Resolution, 3-sec, 10-ppb • Resolution: Adjust gas velocity for max. (=min. plate height) • Min. Time: Minimize film thickness w/o starving the capillary’s gasvolume

MEMS Enablers Thin-film stationary phase enhances resolution and shortens analysis time Thin-film substrate reduces power MEMS enables integration GC components, multi-stage pre-con. & electr. injection Compatibility with NeSSI

Challenges Most power is consumed by column temperature ramping

Selectivity & peak ID; then pump and valve

PHASED Flow CalibrationPHASED Flow Calibration