PHASED: a Faster, Smarter & More Affordable Analysis Device - Update [email protected]U.Bonne, J.Detry, R.Higashi, K.Newstrom-Peitso, H.Pham, T.Rezachek and S.Swanson Honeywell Labs, Plymouth, MN 55441, USA [email protected]Definition: PHASED (= Phased Heater Array Structure for Enhanced Detection) presently integrates multi-stage pre-concentration, separation, flow sensing and detection of gas components on one chip. Project Objectives: Develop and demonstrate the operation of a PHASED sensor, via: - Thermophysical analysis and simulations - Design and assemble a setup to check out the individual components - Design and fabricate a preliminary version of PHASED, with PCB electronics - Design and fabricate an integrated version of PHASED- on-a-chip
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PHASED: a Faster, Smarter & More Affordable Analysis Device - Update [email protected] U.Bonne, J.Detry, R.Higashi, K.Newstrom-Peitso, H.Pham,
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PHASED: a Faster, Smarter & More Affordable Analysis Device - UpdatePHASED: a Faster, Smarter & More Affordable Analysis Device - Update
Definition: PHASED (= Phased Heater Array Structure for Enhanced Detection) presently integrates multi-stage pre-concentration, separation, flow sensing and detection of gas components on one chip.
Project Objectives: Develop and demonstrate the operation of a PHASED sensor, via: - Thermophysical analysis and simulations - Design and assemble a setup to check out the individual components - Design and fabricate a preliminary version of PHASED, with PCB electronics - Design and fabricate an integrated version of PHASED-on-a-chip
Acknowledgment: This work is supported by ORNL/DoE
PHASED: Micro Gas Analyzer SystemPHASED: Micro Gas Analyzer SystemPhased Heater Array Structure for Enhanced Detection
• Simulations predicted: Speed, Separation, Flow control and # of PreConc.Elements•1st gen. PHASED chips fabricated• Stat. film material survives 200-250ºC in air Patterning demonstrated and
Specific surface area ~800 m2/g unaffected• Heater FET switch chips fabricated • 1st gen. electronic circuit designed & built• Millisecond desorption response time feasible