MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy
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© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 1
ROCHESTER INSTITUTE OF TECHNOLOGYMICROELECTRONIC ENGINEERING
MEMS Industry Overview
Dr. Lynn FullerWebpage: http://people.rit.edu/lffeee
Microelectronic EngineeringRochester Institute of Technology
82 Lomb Memorial DriveRochester, NY 14623-5604
Tel (585) 475-2035Email: Lynn.Fuller@rit.edu
Program webpage: http://www.microe.rit.edu
9-1-2012 MEMS_Industry.ppt
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 2
OUTLINE
MEMS MarketTop 30 MEMS ManufacturersMEMS FoundariesThe TechnologyMEMS DevicesApplications for MEMSReferences
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 3
MEMS INDUSTRY OVERVIEW
MEMs Market Size (US$ billions)1995 2005
Pressure 1.5 2.5Inertial Sensors 0.45 0.8Fluidic controls 0.01 0.1Data Storage 1.0Displays 1.0Biochips 0.2Communications 0.01 1.0Other 0.03 0.1Total 2.0 6.7
Many new areas are developing and this mix will changedramatically Source: Micromachines Devices R&DMagazine, Vol.1,No.2, Oct 1996, chart May 2001
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 4
“MEMS Market Trends”, Chang Liu
MEMS TOP 30 MANUFACTURERS - 2006
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 5
FOUNDRIES
“MEMS Market Trends”, Chang Liu
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 6
SINGLE CRYSTAL SILICON
Thickness
10 µm
Wafer
Diameter
75 mm
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 7
GEARS AND ACTUATORS
100 µm
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 8
MICRO LITHOGRAPHIC TECHNOLOGY
Structures as small as 0.1 µm
Thickness as small as 5 nm
Electronics on chip with MEMS
Inexpensive (<$1)
Arrays of sensors as easy as one sensor
Chips with up to a few Billion devices available today
Mature technology
ADVANTAGES
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 9
MEMS DEVICES
AccelerometersGyroscopesMicrophonesPressure SensorsMEMS SwitchesMirrorsGas Flow SensorsEnergy HarvestingSpectrometersTemperature SensorsViscosity SensorsChemical Sensors
MicrobolometersRF MEMSMOEMSMicro Fuel CellsBio MEMS
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 10
DEVICE FORECAST
“MEMS Market Trends”, Chang Liu
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 11
SMART PHONE
i-phone – 9 Axis of Freedom
“MEMS Market Trends”, Chang Liu
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 12
INK JET PRINT HEADS
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 13
DIGITAL MIRROR LIGHT PROJECTION
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 14
MIRRORS
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 15
COMMERCIAL MICROPHONES
Akustica
Analog Devices
Boesch
Emkay Sisonic
Futurlec
Infineon
Knowles
Motorola
STMicroelectronics
TI
Others
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 16
AKU1126 MICROPHONE
1mm x 1mm
MEMS Chip
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 17
IEEE JOURNAL PUBLICATION AND USPTO PATENTS
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 18
ON-LINE JOURNALS
March 2012
MEMS JOURNAL
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 19
UNIVERSITY CONSORTIUMS
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 20
YOLE CONSULTING REPORTS
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 21
YOLE INDUSTRY REPORTS
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 22
REFERENCES
1. “Journal of Microelectromechanical Systems”, Joint IEEE/ASME Publication.
2. “MEMS Market Trends”, Chang Liu, Foundation of MEMS, www.MEMSCentral.com , Dec 1, 2011
3. From www.chipworks.com, Apple Uses Nine Degrees-of-Freedom Sensing in the iPhone 4 contributed by St.J. Dixon-Warren, MEMS Sector Analyst
4. Yole Development, www.Yole.fr
© September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 23
HOMEWORK – INDUSTRY OVERVIEW
1. How big is the MEMS industry in sales in billions of dollars per year? How big is the entire semiconductor industry in billions of dollars per year?
2. What companies make MEMS in New York State?3. What MEMS sensors do you have in your smart phone? Can you
access the sensor output signals using a free (or almost free) app? Provide details about the type of phone and the app.
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