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MEMS Industry Overview - RIT - People · PDF fileMEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors

Apr 12, 2018

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  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 1

    ROCHESTER INSTITUTE OF TECHNOLOGYMICROELECTRONIC ENGINEERING

    MEMS Industry Overview

    Dr. Lynn FullerWebpage: http://people.rit.edu/lffeee

    Microelectronic EngineeringRochester Institute of Technology

    82 Lomb Memorial DriveRochester, NY 14623-5604

    Tel (585) 475-2035Email: [email protected]

    Program webpage: http://www.microe.rit.edu

    9-1-2012 MEMS_Industry.ppt

    http://people.rit.edu/lffeeemailto:[email protected]://www.microe.rit.edu/

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 2

    OUTLINE

    MEMS MarketTop 30 MEMS ManufacturersMEMS FoundariesThe TechnologyMEMS DevicesApplications for MEMSReferences

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 3

    MEMS INDUSTRY OVERVIEW

    MEMs Market Size (US$ billions)1995 2005

    Pressure 1.5 2.5Inertial Sensors 0.45 0.8Fluidic controls 0.01 0.1Data Storage 1.0Displays 1.0Biochips 0.2Communications 0.01 1.0Other 0.03 0.1Total 2.0 6.7

    Many new areas are developing and this mix will changedramatically Source: Micromachines Devices R&DMagazine, Vol.1,No.2, Oct 1996, chart May 2001

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 4

    MEMS Market Trends, Chang Liu

    MEMS TOP 30 MANUFACTURERS - 2006

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 5

    FOUNDRIES

    MEMS Market Trends, Chang Liu

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 6

    SINGLE CRYSTAL SILICON

    Thickness

    10 m

    Wafer

    Diameter

    75 mm

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 7

    GEARS AND ACTUATORS

    100 m

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 8

    MICRO LITHOGRAPHIC TECHNOLOGY

    Structures as small as 0.1 m

    Thickness as small as 5 nm

    Electronics on chip with MEMS

    Inexpensive (

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 9

    MEMS DEVICES

    AccelerometersGyroscopesMicrophonesPressure SensorsMEMS SwitchesMirrorsGas Flow SensorsEnergy HarvestingSpectrometersTemperature SensorsViscosity SensorsChemical Sensors

    MicrobolometersRF MEMSMOEMSMicro Fuel CellsBio MEMS

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 10

    DEVICE FORECAST

    MEMS Market Trends, Chang Liu

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 11

    SMART PHONE

    i-phone 9 Axis of Freedom

    MEMS Market Trends, Chang Liu

    Accelerometer_iPhone4.pdfAccelerometer_iPhone4.pdfAccelerometer_iPhone4.pdfAccelerometer_iPhone4.pdfAccelerometer_iPhone4.pdfAccelerometer_iPhone4.pdf

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 12

    INK JET PRINT HEADS

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 13

    DIGITAL MIRROR LIGHT PROJECTION

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 14

    MIRRORS

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 15

    COMMERCIAL MICROPHONES

    Akustica

    Analog Devices

    Boesch

    Emkay Sisonic

    Futurlec

    Infineon

    Knowles

    Motorola

    STMicroelectronics

    TI

    Others

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 16

    AKU1126 MICROPHONE

    1mm x 1mm

    MEMS Chip

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 17

    IEEE JOURNAL PUBLICATION AND USPTO PATENTS

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 18

    ON-LINE JOURNALS

    March 2012

    MEMS JOURNAL

    mems_journal.pdf

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 19

    UNIVERSITY CONSORTIUMS

    http://mail.mems-exchange.org/mailman/listinfo/mems-talk

    http://mail.mems-exchange.org/mailman/listinfo/mems-talkhttp://mail.mems-exchange.org/mailman/listinfo/mems-talkhttp://mail.mems-exchange.org/mailman/listinfo/mems-talkhttp://mail.mems-exchange.org/mailman/listinfo/mems-talkhttp://mail.mems-exchange.org/mailman/listinfo/mems-talk

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 20

    YOLE CONSULTING REPORTS

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 21

    YOLE INDUSTRY REPORTS

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 22

    REFERENCES

    1. Journal of Microelectromechanical Systems, Joint IEEE/ASME Publication.

    2. MEMS Market Trends, Chang Liu, Foundation of MEMS, www.MEMSCentral.com , Dec 1, 2011

    3. From www.chipworks.com, Apple Uses Nine Degrees-of-Freedom Sensing in the iPhone 4 contributed by St.J. Dixon-Warren, MEMS Sector Analyst

    4. Yole Development, www.Yole.fr

    http://www.memscentral.com/http://www.chipworks.com/http://www.yole.fr/

  • September 1, 2012, Dr. Lynn Fuller, Professor

    Rochester Institute of Technology

    Microelectronic Engineering

    MEMS Industry Overview

    Page 23

    HOMEWORK INDUSTRY OVERVIEW

    1. How big is the MEMS industry in sales in billions of dollars per year? How big is the entire semiconductor industry in billions of dollars per year?

    2. What companies make MEMS in New York State?3. What MEMS sensors do you have in your smart phone? Can you

    access the sensor output signals using a free (or almost free) app? Provide details about the type of phone and the app.