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© September 1, 2012, Dr. Lynn Fuller, Professor Rochester Institute of Technology Microelectronic Engineering MEMS Industry Overview Page 1 ROCHESTER INSTITUTE OF TECHNOLOGY MICROELECTRONIC ENGINEERING MEMS Industry Overview Dr. Lynn Fuller Webpage: http://people.rit.edu/lffeee Microelectronic Engineering Rochester Institute of Technology 82 Lomb Memorial Drive Rochester, NY 14623-5604 Tel (585) 475-2035 Email: [email protected] Program webpage: http://www.microe.rit.edu 9-1-2012 MEMS_Industry.ppt
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MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

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Page 1: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 1

ROCHESTER INSTITUTE OF TECHNOLOGYMICROELECTRONIC ENGINEERING

MEMS Industry Overview

Dr. Lynn FullerWebpage: http://people.rit.edu/lffeee

Microelectronic EngineeringRochester Institute of Technology

82 Lomb Memorial DriveRochester, NY 14623-5604

Tel (585) 475-2035Email: [email protected]

Program webpage: http://www.microe.rit.edu

9-1-2012 MEMS_Industry.ppt

Page 2: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 2

OUTLINE

MEMS MarketTop 30 MEMS ManufacturersMEMS FoundariesThe TechnologyMEMS DevicesApplications for MEMSReferences

Page 3: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 3

MEMS INDUSTRY OVERVIEW

MEMs Market Size (US$ billions)1995 2005

Pressure 1.5 2.5Inertial Sensors 0.45 0.8Fluidic controls 0.01 0.1Data Storage 1.0Displays 1.0Biochips 0.2Communications 0.01 1.0Other 0.03 0.1Total 2.0 6.7

Many new areas are developing and this mix will changedramatically Source: Micromachines Devices R&DMagazine, Vol.1,No.2, Oct 1996, chart May 2001

Page 4: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 4

“MEMS Market Trends”, Chang Liu

MEMS TOP 30 MANUFACTURERS - 2006

Page 5: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 5

FOUNDRIES

“MEMS Market Trends”, Chang Liu

Page 6: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 6

SINGLE CRYSTAL SILICON

Thickness

10 µm

Wafer

Diameter

75 mm

Page 7: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 7

GEARS AND ACTUATORS

100 µm

Page 8: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 8

MICRO LITHOGRAPHIC TECHNOLOGY

Structures as small as 0.1 µm

Thickness as small as 5 nm

Electronics on chip with MEMS

Inexpensive (<$1)

Arrays of sensors as easy as one sensor

Chips with up to a few Billion devices available today

Mature technology

ADVANTAGES

Page 9: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 9

MEMS DEVICES

AccelerometersGyroscopesMicrophonesPressure SensorsMEMS SwitchesMirrorsGas Flow SensorsEnergy HarvestingSpectrometersTemperature SensorsViscosity SensorsChemical Sensors

MicrobolometersRF MEMSMOEMSMicro Fuel CellsBio MEMS

Page 10: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 10

DEVICE FORECAST

“MEMS Market Trends”, Chang Liu

Page 11: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 11

SMART PHONE

i-phone – 9 Axis of Freedom

“MEMS Market Trends”, Chang Liu

Page 12: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 12

INK JET PRINT HEADS

Page 13: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 13

DIGITAL MIRROR LIGHT PROJECTION

Page 14: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 14

MIRRORS

Page 15: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 15

COMMERCIAL MICROPHONES

Akustica

Analog Devices

Boesch

Emkay Sisonic

Futurlec

Infineon

Knowles

Motorola

STMicroelectronics

TI

Others

Page 16: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 16

AKU1126 MICROPHONE

1mm x 1mm

MEMS Chip

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© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 17

IEEE JOURNAL PUBLICATION AND USPTO PATENTS

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© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 18

ON-LINE JOURNALS

March 2012

MEMS JOURNAL

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© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 19

UNIVERSITY CONSORTIUMS

http://mail.mems-exchange.org/mailman/listinfo/mems-talk

Page 20: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 20

YOLE CONSULTING REPORTS

Page 21: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 21

YOLE INDUSTRY REPORTS

Page 22: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 22

REFERENCES

1. “Journal of Microelectromechanical Systems”, Joint IEEE/ASME Publication.

2. “MEMS Market Trends”, Chang Liu, Foundation of MEMS, www.MEMSCentral.com , Dec 1, 2011

3. From www.chipworks.com, Apple Uses Nine Degrees-of-Freedom Sensing in the iPhone 4 contributed by St.J. Dixon-Warren, MEMS Sector Analyst

4. Yole Development, www.Yole.fr

Page 23: MEMS Industry Overview - RIT - People · MEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors Energy

© September 1, 2012, Dr. Lynn Fuller, Professor

Rochester Institute of Technology

Microelectronic Engineering

MEMS Industry Overview

Page 23

HOMEWORK – INDUSTRY OVERVIEW

1. How big is the MEMS industry in sales in billions of dollars per year? How big is the entire semiconductor industry in billions of dollars per year?

2. What companies make MEMS in New York State?3. What MEMS sensors do you have in your smart phone? Can you

access the sensor output signals using a free (or almost free) app? Provide details about the type of phone and the app.