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MEMS Industry Overview - RIT - People · PDF fileMEMS Industry Overview Page 9 MEMS DEVICES Accelerometers Gyroscopes Microphones Pressure Sensors MEMS Switches Mirrors Gas Flow Sensors
Apr 12, 2018
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 1
ROCHESTER INSTITUTE OF TECHNOLOGYMICROELECTRONIC ENGINEERING
MEMS Industry Overview
Dr. Lynn FullerWebpage: http://people.rit.edu/lffeee
Microelectronic EngineeringRochester Institute of Technology
82 Lomb Memorial DriveRochester, NY 14623-5604
Tel (585) 475-2035Email: [email protected]
Program webpage: http://www.microe.rit.edu
9-1-2012 MEMS_Industry.ppt
http://people.rit.edu/lffeeemailto:[email protected]://www.microe.rit.edu/
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 2
OUTLINE
MEMS MarketTop 30 MEMS ManufacturersMEMS FoundariesThe TechnologyMEMS DevicesApplications for MEMSReferences
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 3
MEMS INDUSTRY OVERVIEW
MEMs Market Size (US$ billions)1995 2005
Pressure 1.5 2.5Inertial Sensors 0.45 0.8Fluidic controls 0.01 0.1Data Storage 1.0Displays 1.0Biochips 0.2Communications 0.01 1.0Other 0.03 0.1Total 2.0 6.7
Many new areas are developing and this mix will changedramatically Source: Micromachines Devices R&DMagazine, Vol.1,No.2, Oct 1996, chart May 2001
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 4
MEMS Market Trends, Chang Liu
MEMS TOP 30 MANUFACTURERS - 2006
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 5
FOUNDRIES
MEMS Market Trends, Chang Liu
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 6
SINGLE CRYSTAL SILICON
Thickness
10 m
Wafer
Diameter
75 mm
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 7
GEARS AND ACTUATORS
100 m
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 8
MICRO LITHOGRAPHIC TECHNOLOGY
Structures as small as 0.1 m
Thickness as small as 5 nm
Electronics on chip with MEMS
Inexpensive (
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 9
MEMS DEVICES
AccelerometersGyroscopesMicrophonesPressure SensorsMEMS SwitchesMirrorsGas Flow SensorsEnergy HarvestingSpectrometersTemperature SensorsViscosity SensorsChemical Sensors
MicrobolometersRF MEMSMOEMSMicro Fuel CellsBio MEMS
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 10
DEVICE FORECAST
MEMS Market Trends, Chang Liu
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 11
SMART PHONE
i-phone 9 Axis of Freedom
MEMS Market Trends, Chang Liu
Accelerometer_iPhone4.pdfAccelerometer_iPhone4.pdfAccelerometer_iPhone4.pdfAccelerometer_iPhone4.pdfAccelerometer_iPhone4.pdfAccelerometer_iPhone4.pdf
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 12
INK JET PRINT HEADS
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 13
DIGITAL MIRROR LIGHT PROJECTION
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 14
MIRRORS
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 15
COMMERCIAL MICROPHONES
Akustica
Analog Devices
Boesch
Emkay Sisonic
Futurlec
Infineon
Knowles
Motorola
STMicroelectronics
TI
Others
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 16
AKU1126 MICROPHONE
1mm x 1mm
MEMS Chip
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 17
IEEE JOURNAL PUBLICATION AND USPTO PATENTS
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 18
ON-LINE JOURNALS
March 2012
MEMS JOURNAL
mems_journal.pdf
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 19
UNIVERSITY CONSORTIUMS
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
http://mail.mems-exchange.org/mailman/listinfo/mems-talkhttp://mail.mems-exchange.org/mailman/listinfo/mems-talkhttp://mail.mems-exchange.org/mailman/listinfo/mems-talkhttp://mail.mems-exchange.org/mailman/listinfo/mems-talkhttp://mail.mems-exchange.org/mailman/listinfo/mems-talk
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 20
YOLE CONSULTING REPORTS
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 21
YOLE INDUSTRY REPORTS
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 22
REFERENCES
1. Journal of Microelectromechanical Systems, Joint IEEE/ASME Publication.
2. MEMS Market Trends, Chang Liu, Foundation of MEMS, www.MEMSCentral.com , Dec 1, 2011
3. From www.chipworks.com, Apple Uses Nine Degrees-of-Freedom Sensing in the iPhone 4 contributed by St.J. Dixon-Warren, MEMS Sector Analyst
4. Yole Development, www.Yole.fr
http://www.memscentral.com/http://www.chipworks.com/http://www.yole.fr/
September 1, 2012, Dr. Lynn Fuller, Professor
Rochester Institute of Technology
Microelectronic Engineering
MEMS Industry Overview
Page 23
HOMEWORK INDUSTRY OVERVIEW
1. How big is the MEMS industry in sales in billions of dollars per year? How big is the entire semiconductor industry in billions of dollars per year?
2. What companies make MEMS in New York State?3. What MEMS sensors do you have in your smart phone? Can you
access the sensor output signals using a free (or almost free) app? Provide details about the type of phone and the app.
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