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james-scammon documents channel

James Scammon

#james-scammon

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Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma). 3.Optics (reflection mirrors). 4.Mask (absorber on mirrors).

Extreme UV (EUV) lithography 1.Overview, why EUV lithography? 2.EUV source (hot and dense plasma)......

Category: Documents

Released: January 15, 2016

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