Documents X-ray methods for nanoscience Ritva Serimaa Department of Physics University of Helsinki Nanoscience...

Slide 1 X-ray methods for nanoscience Ritva Serimaa Department of Physics University of Helsinki Nanoscience III Slide 2 X-rays and matter wavelength of the order of 0.1…

Documents X-ray lithography (XRL) 1.Overview and resolution limit. 2.X-ray source ( electron impact and...

Slide 1 X-ray lithography (XRL) 1.Overview and resolution limit. 2.X-ray source ( electron impact and synchrotron radiation). 3.X-ray absorption and scattering. 4.X-ray lithography…