Documents Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography EECE 491C Unger et al....

Slide 1 Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography EECE 491C Unger et al. (Quake group, CALTECH) Science, 2000 Slide 2 How complex and how…