1. © 2014• 1Cambridge CMOS Sensors KaiamEmerging MEMSPatent Investigation75 cours Emile Zola, F-69001 Lyon-Villeurbanne, FranceTel : +33 472 83 01 80 - Fax : +33 472 83…
1. MEMS in biomedical applications U.GAYATHRI, Dept of EEE, Surya group of institutions, Villupuram. 2. ABSTRACT: Micromachining and MEMS technologies can be used to produce…