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Slide 1 Department of Machine and Industrial Product Design Contact person: Dr. Tibor Goda (e-mail: [email protected])[email protected] Slide 2 Department of Machine…

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Ion implanter â HV terminal 500 kV a number of Nielsen and RF ion sources for gaseous and solid materials mass analysis better than 1 a.m.u. beam current from 1-100 mA,…