Slide 1 Microscale and Si Wafer Slide 2 From macro to nano… Slide 3 Scaling laws of small Laws of physics make the small world look different. Slide 4 Some small scale…
Slide 1 Small Scale Effect Slide 2 From macro to nano… Slide 3 Scaling laws of small Laws of physics make the small world look different. Slide 4 Some small scale phenomena…
Slide 1 MEMS Class 2 Materials for MEMS Mohammad Kilani Slide 2 MEMS Materials Silicon-Compatible Material System Silicon Silicon Oxide and Nitride Thin Metal…