1.LVS Project: 14Years Developmentand ExperienceWensong ZhangThe 11th Northeast Asia OSS Promotion Forum 2012.11.14The 11th Northeast AsiaPage 1OSS Promotion Forum2. About…
Slide 1Surface Micromachining Dr. Marc Madou, Fall 2012, UCI Class 10 Slide 2 Blanket n + diffusion of Si substrate (ground plane) Passivation layer (e.g. SiO 2,…