Documents Lecture 11.0 Etching. Etching Patterned –Material Selectivity is Important!! Un-patterned.

Slide 1 Lecture 11.0 Etching Slide 2 Etching Patterned –Material Selectivity is Important!! Un-patterned Slide 3 Etching Dry Etch An-isotropic dy/dt:dx/dt:6 Gas Phase Reaction…