Slide 1A. Samarian, W. Tsang, J. Khachan, B. James Complex Plasma Laboratory School of Physics, University of Sydney, NSW 2006, Australia Slide 2 Outline To use micro-sized…
Outline To use micro-sized particles as diagnostic tools for the analysis of the sheath in a RF Capacitively Coupled Argon Plasma To evaluate the structure of the sheath…