INTRODUCTION Scanning Probe Microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen An image of the surface…

Slide 1 Development of Scanning Probe Lithography (SPL) EE C235/NSE C203 Nanofbrication Jun Suk Rho 1) “Device fabrication by scanned probe oxidation”, Science, 1995…

Slide 1 BMFB 3263 Materials Characterization Scanning Probe Microscopy & Relates Techniques Lecture 5 1 Slide 2 SPM is a technique to examine materials with a solid probe…

Nanolithography CHE 5480 Summer 2005 Maricel Marquez This presentation will probably involve audience discussion, which will create action items. Use PowerPoint to keep track…

Smart Nano Surgeon Development of Scanning Probe Lithography (SPL) EE C235/NSE C203 Nanofbrication Jun Suk Rho 1) âDevice fabrication by scanned probe oxidationâ, Science,…

BMFB 3263 Materials Characterization Scanning Probe Microscopy & Relates Techniques Lecture 5 * SPM is a technique to examine materials with a solid probe scanning the…

Smart Nano Surgeon Development of Scanning Probe Lithography (SPL) EE C235/NSE C203 Nanofbrication Jun Suk Rho 1) âDevice fabrication by scanned probe oxidationâ, Science,…

Slide 1 Scanning probe microscopy (SPM) and lithography Atom and particle manipulation by STM and AFM. AFM oxidation of Si or metals. Dip-pen nanolithography (DPN). 1 ECE…