PowerPoint Presentation FINFET INTRODUCTION TO FINFET The term âFINFETâ describes a non-planar, double gate transistor built on an SOI substrate, based on the single gate…

Slide 1 Ali Besharatian March 16, 2008 Slide 2  A HARPSS Polysilicon Vibrating Ring Gyroscope  Farrokh Ayazi and Khalil Najafi  University of Michigan  2001 Slide…

* 3 MEMS FABRICATION Ken Gilleo PhD ET-Trends LLC 24% * MEMS Material Classes Silicon Aluminum Si3N4 (Nitride) GaAs SiC Polymers SiO2 Copper Aluminum Polymers SiGe Silicon…

NOVEL PROCESSES FOR SOI-BASED MEMS AT VTT James Dekker, ack. Jaakko Saarilahti, Jyrki Kiihimäki, Hannu Kattelus VTT TECHNICAL RESEARCH CENTRE OF FINLAND OUTLINE Introduction…

* 3 MEMS FABRICATION Ken Gilleo PhD ET-Trends LLC 24% * MEMS Material Classes Silicon Aluminum Si3N4 (Nitride) GaAs SiC Polymers SiO2 Copper Aluminum Polymers SiGe Silicon…