Documents Mary Coan April 6 th 2010. Outline How it all began… Nanoelectromechanical Systems (NEMS) Basic....

Slide 1 Mary Coan April 6 th 2010 Slide 2 Outline  How it all began… Nanoelectromechanical Systems (NEMS)  Basic Properties  Typical Problems  Fabrication Processes…

Documents G3_NEMS

NEMS Nanoelectromechanical Systems (NEMS) Mary Coan April 6th 2010 Outline How it all began⦠Nanoelectromechanical Systems (NEMS) Basic Properties Typical Problems Fabrication…