Slide 1 ION ENERGY AND ANGULAR DISTRIBUTIONS INTO SMALL FEATURES IN PLASMA ETCHING REACTORS: THE WAFER- FOCUS RING GAP* Natalia Yu. Babaeva and Mark J. Kushner Iowa State…
Slide 1 WAFER EDGE EFFECTS CONSIDERING ION INERTIA IN CAPACITIVELY COUPLED DISCHARGES* Natalia Yu. Babaeva and Mark J. Kushner Iowa State University Department of Electrical…
Slide 1 EDGE EFFECTS IN REACTIVE ION ETCHING: THE WAFER- FOCUS RING GAP* Natalia Yu. Babaeva and Mark J. Kushner Iowa State University Department of Electrical and Computer…
LAB #7 Reassembly Get Check Off Sheet Before you start, make sure you get a reassembly packet from Mrs. Winegar. If you do not have her check your work and sign the form,…
ION ENERGY AND ANGULAR DISTRIBUTIONS INTO SMALL FEATURES IN PLASMA ETCHING REACTORS: THE WAFER- FOCUS RING GAP* Natalia Yu. Babaeva and Mark J. Kushner Iowa State University…