Documents Yongshik Park February 13 th, 2008 EE C235/NSE C203 Scanning Probe Lithography.

Slide 1 Yongshik Park February 13 th, 2008 EE C235/NSE C203 Scanning Probe Lithography Slide 2 Outline Scanned Probe Oxidation Generating an Polymer “Resist” Layer using…

Documents Scanning Probe Lithography

Yongshik Park February 13th, 2008 EE C235/NSE C203 Scanning Probe Lithography Outline Scanned Probe Oxidation Generating an Polymer “Resist” Layer using Scanning Probe…